DE2456384C3 - Verfahren zur Herstellung einer Dünnschichtelektrode in einem Fühlelement zur Bestimmung einer Abweichung vom Lot - Google Patents
Verfahren zur Herstellung einer Dünnschichtelektrode in einem Fühlelement zur Bestimmung einer Abweichung vom LotInfo
- Publication number
- DE2456384C3 DE2456384C3 DE2456384A DE2456384A DE2456384C3 DE 2456384 C3 DE2456384 C3 DE 2456384C3 DE 2456384 A DE2456384 A DE 2456384A DE 2456384 A DE2456384 A DE 2456384A DE 2456384 C3 DE2456384 C3 DE 2456384C3
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- thin
- sensing element
- container
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title claims 4
- 238000000034 method Methods 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 239000000243 solution Substances 0.000 claims 2
- 239000002966 varnish Substances 0.000 claims 2
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 238000007743 anodising Methods 0.000 claims 1
- 238000010420 art technique Methods 0.000 claims 1
- 239000002585 base Substances 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 claims 1
- 238000005234 chemical deposition Methods 0.000 claims 1
- 239000008151 electrolyte solution Substances 0.000 claims 1
- 238000009713 electroplating Methods 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 150000004820 halides Chemical class 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000012886 linear function Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 238000007650 screen-printing Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 28
- 239000007789 gas Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 241000238633 Odonata Species 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
- G01C9/24—Measuring inclination, e.g. by clinometers, by levels by using liquids in closed containers partially filled with liquid so as to leave a gas bubble
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Level Indicators Using A Float (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1796773A CH567245A5 (en) | 1973-12-20 | 1973-12-20 | Electric sensing device for spirit level - measures impedance between electrodes which varies when spirit level is tilted |
| CH737874A CH578241A5 (en) | 1974-05-30 | 1974-05-30 | Electric sensing device for spirit level - measures impedance between electrodes which varies when spirit level is tilted |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2456384A1 DE2456384A1 (de) | 1975-07-03 |
| DE2456384B2 DE2456384B2 (de) | 1979-01-11 |
| DE2456384C3 true DE2456384C3 (de) | 1979-09-20 |
Family
ID=25701218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2456384A Expired DE2456384C3 (de) | 1973-12-20 | 1974-11-28 | Verfahren zur Herstellung einer Dünnschichtelektrode in einem Fühlelement zur Bestimmung einer Abweichung vom Lot |
Country Status (10)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5822910A (ja) * | 1981-08-03 | 1983-02-10 | Masao Ono | 水準測定方法および水準器 |
| GB2188427B (en) * | 1986-03-27 | 1990-05-23 | Duracell Int | Inclination sensor |
| AT391400B (de) * | 1988-11-28 | 1990-09-25 | Koenig Helmut | Anlage zur behandlung von backgut |
| DE4036262A1 (de) * | 1990-03-07 | 1991-09-12 | Hl Planartechnik Gmbh | Elektrische messanordnung zur messung bzw. berechnung des fuellstandes oder anderer mechanischer daten einer elektrisch leitenden fluessigkeit |
| DE59103838D1 (de) * | 1990-03-07 | 1995-01-26 | Hl Planartechnik Gmbh | Elektrische Messanordnung zur Messung bzw. Berechnung des Füllstandes oder anderer mechanischer Daten einer elektrisch leitenden Flüssigkeit. |
| DE4435521A1 (de) * | 1994-10-04 | 1996-04-11 | Licentia Gmbh | Neigungssensor und Verfahren zu dessen Herstellung |
| CN106595592B (zh) * | 2016-12-13 | 2019-10-25 | 武汉理工大学 | 一种基于液面水平原理的双向测斜仪 |
| CN109631845B (zh) * | 2018-11-16 | 2023-12-19 | 浙江海洋大学 | 海洋平台倾斜观察设备 |
-
1974
- 1974-10-24 AT AT857274A patent/AT348267B/de not_active IP Right Cessation
- 1974-11-05 NL NL7414381.A patent/NL166788C/xx not_active IP Right Cessation
- 1974-11-21 IT IT29672/74A patent/IT1025892B/it active
- 1974-11-25 JP JP13443174A patent/JPS5712084B2/ja not_active Expired
- 1974-11-28 SE SE7414922A patent/SE7414922L/xx not_active Application Discontinuation
- 1974-11-28 DE DE2456384A patent/DE2456384C3/de not_active Expired
- 1974-12-05 DD DD182816A patent/DD114677A5/xx unknown
- 1974-12-16 NO NO744525A patent/NO744525L/no unknown
- 1974-12-19 FR FR7442100A patent/FR2255579B1/fr not_active Expired
- 1974-12-19 GB GB55041/74A patent/GB1495489A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| IT1025892B (it) | 1978-08-30 |
| NO744525L (enrdf_load_html_response) | 1975-07-14 |
| ATA857274A (de) | 1978-06-15 |
| SE7414922L (sv) | 1975-06-23 |
| GB1495489A (en) | 1977-12-21 |
| DD114677A5 (enrdf_load_html_response) | 1975-08-12 |
| DE2456384B2 (de) | 1979-01-11 |
| AT348267B (de) | 1979-02-12 |
| FR2255579B1 (enrdf_load_html_response) | 1982-07-02 |
| JPS5096255A (enrdf_load_html_response) | 1975-07-31 |
| DE2456384A1 (de) | 1975-07-03 |
| JPS5712084B2 (enrdf_load_html_response) | 1982-03-09 |
| FR2255579A1 (enrdf_load_html_response) | 1975-07-18 |
| NL7414381A (nl) | 1975-06-24 |
| NL166788C (nl) | 1981-09-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE60221285T2 (de) | Elektrolytischer neigungssensor | |
| DE3313150C1 (de) | Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung | |
| DE2456384C3 (de) | Verfahren zur Herstellung einer Dünnschichtelektrode in einem Fühlelement zur Bestimmung einer Abweichung vom Lot | |
| EP2867904A1 (de) | Widerstand, insbesondere niederohmiger strommesswiderstand | |
| DD253509A5 (de) | Elektronenstrahlroehre und verfahren zum herstellen einer elektronenstrahlroehre | |
| DE69123896T2 (de) | pH-Messelektrode und Verfahren zur Herstellung derselben | |
| DE69311798T2 (de) | Konstruktion einer mikroelektroden-anordnung | |
| DE2950383A1 (de) | Elektrochemische elektrode sowie verfahren zur ausbildung einer auf ionen ansprechenden membran fuer eine elektrochemische elektrode sowie verfahren zur herstellung einer elektrochemischen elektrode | |
| EP0358788A1 (de) | Elektrolytischer Neigungsfühler | |
| WO1998012553A1 (de) | Magnetische sauerstoffmesseinrichtung | |
| AT405884B (de) | Detektor zur messung der elektrolytischen leitfähigkeit | |
| DE4333348A1 (de) | Ionenselektive Elektrode und Durchflußzelle mit einer solchen Elektrode | |
| EP0401536B1 (de) | Massverkörperung | |
| EP0016263A1 (de) | Dünnschichtwiderstand mit grossem Temperaturkoeffizienten und Verfahren zu dessen Herstellung | |
| DE4441548A1 (de) | Neigungssensor | |
| DE19732173A1 (de) | Neigungsmesser | |
| DE3413762A1 (de) | Vorrichtung zur coulometrischen dickenbestimmung von metallschichten | |
| DE19603093C2 (de) | Stabförmige Elektrode mit einer Korrosionsschutzschicht und Verfahren zur Herstellung derselben | |
| CH567245A5 (en) | Electric sensing device for spirit level - measures impedance between electrodes which varies when spirit level is tilted | |
| DE19631530A1 (de) | Ionenselektiver Sensor | |
| DE10022210A1 (de) | Einstabmesskette | |
| WO1991005248A1 (de) | Messelektrodenanordnung zum messen in flüssigkeiten | |
| CH693969A5 (de) | Feuchtesensor. | |
| EP0471330A1 (de) | Messeinrichtung für pH-Werte | |
| EP0058835B1 (de) | Halbleitervorrichtung und Verfahren zu ihrer Herstellung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: OERLIKON-CONTRAVES AG, ZUERICH, CH |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: MITSCHERLICH, H., DIPL.-ING. KOERBER, W., DIPL.-ING. DR.RER.NAT. SCHMIDT-EVERS, J., DIPL.-ING., PAT.-ANWAELTE, 8000 MUENCHEN |
|
| 8339 | Ceased/non-payment of the annual fee |