DE2431448B2 - Verfahren zum beschichten eines substrates mit einem nitrid oder carbid von titan oder zirkonium durch reaktives aufdampfen - Google Patents

Verfahren zum beschichten eines substrates mit einem nitrid oder carbid von titan oder zirkonium durch reaktives aufdampfen

Info

Publication number
DE2431448B2
DE2431448B2 DE19742431448 DE2431448A DE2431448B2 DE 2431448 B2 DE2431448 B2 DE 2431448B2 DE 19742431448 DE19742431448 DE 19742431448 DE 2431448 A DE2431448 A DE 2431448A DE 2431448 B2 DE2431448 B2 DE 2431448B2
Authority
DE
Germany
Prior art keywords
substrate
titanium
carbide
nitride
zirconium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19742431448
Other languages
German (de)
English (en)
Other versions
DE2431448A1 (de
Inventor
Kurt D Berkeley Scheuer mann Glen R Novato Calif Kennedy (VStA)
Original Assignee
Airco, Inc, Montvale, N J (VStA)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airco, Inc, Montvale, N J (VStA) filed Critical Airco, Inc, Montvale, N J (VStA)
Publication of DE2431448A1 publication Critical patent/DE2431448A1/de
Publication of DE2431448B2 publication Critical patent/DE2431448B2/de
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/24983—Hardness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
DE19742431448 1973-07-25 1974-07-01 Verfahren zum beschichten eines substrates mit einem nitrid oder carbid von titan oder zirkonium durch reaktives aufdampfen Ceased DE2431448B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US382308A US3900592A (en) 1973-07-25 1973-07-25 Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate

Publications (2)

Publication Number Publication Date
DE2431448A1 DE2431448A1 (de) 1975-03-06
DE2431448B2 true DE2431448B2 (de) 1977-07-07

Family

ID=23508397

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19742431448 Ceased DE2431448B2 (de) 1973-07-25 1974-07-01 Verfahren zum beschichten eines substrates mit einem nitrid oder carbid von titan oder zirkonium durch reaktives aufdampfen

Country Status (3)

Country Link
US (1) US3900592A (enrdf_load_stackoverflow)
JP (1) JPS5319325B2 (enrdf_load_stackoverflow)
DE (1) DE2431448B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827548A1 (de) * 1977-09-12 1979-03-22 Gen Electric Ringfoermiges metall-schneidwerkzeug aus titankarbid-ueberzogenem stahl sowie verfahren zum schaben von metallstaeben
DE3431330A1 (de) * 1984-08-25 1986-03-06 Battelle-Institut E.V., 6000 Frankfurt Scherblatt fuer einen elektrorasierer

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AT385058B (de) * 1946-07-17 1988-02-10 Vni Instrument Inst Verfahren zur verfestigung von schneidwerkzeugen
JPS5221283A (en) * 1975-08-13 1977-02-17 Seiko Instr & Electronics Ltd Constituting element of works for clock parts etc.
US4035541A (en) * 1975-11-17 1977-07-12 Kennametal Inc. Sintered cemented carbide body coated with three layers
DE2705225C2 (de) * 1976-06-07 1983-03-24 Nobuo Tokyo Nishida Ornamentteil für Uhren usw.
JPS5334027U (enrdf_load_stackoverflow) * 1976-08-31 1978-03-25
CA1093395A (en) * 1977-01-13 1981-01-13 Mohammad J. Hakim Chemical vapor deposition
US4109061A (en) * 1977-12-08 1978-08-22 United Technologies Corporation Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
CH619344B (de) * 1977-12-23 Balzers Hochvakuum Verfahren zur herstellung goldfarbener ueberzuege.
US4260658A (en) * 1979-06-21 1981-04-07 Kobe, Inc. Erosion resistant surface
CH640886A5 (de) * 1979-08-02 1984-01-31 Balzers Hochvakuum Verfahren zum aufbringen harter verschleissfester ueberzuege auf unterlagen.
DE3030149C3 (de) * 1979-08-09 1996-12-19 Mitsubishi Materials Corp Schneidplättchen und Verfahren zu seiner Herstellung
CH624817B (de) * 1979-09-04 Balzers Hochvakuum Verfahren zur herstellung goldfarbener ueberzuege.
FR2483848A1 (fr) * 1980-06-06 1981-12-11 Stephanois Rech Mec Procede pour la fabrication d'une couche composite resistant a la fois au grippage, a l'abrasion, a la corrosion et a la fatigue par contraintes alternees, et couche composite ainsi obtenue
FR2493304A1 (fr) * 1980-10-30 1982-05-07 Europ Propulsion Procede d'assemblage de pieces refractaires
CA1163231A (en) * 1981-07-24 1984-03-06 Don E. Brodie Reactive plating method and product
SE8300910L (sv) * 1983-02-18 1984-08-19 Santrade Ltd Sammansatt kropp bestaende av ett substrat belagt med hart, slitstarkt ytskikt
JPS60234965A (ja) * 1984-05-04 1985-11-21 Diesel Kiki Co Ltd 薄膜製造方法
JPS61183458A (ja) * 1985-02-08 1986-08-16 Citizen Watch Co Ltd 黒色イオンプレ−テイング膜
US4935313A (en) * 1985-02-12 1990-06-19 Masco Corporation Of Indiana Process of manufacturing seal members having a low friction coefficient
IT1182433B (it) * 1985-02-12 1987-10-05 Gevipi Ag Organi di tenuta in materiale duro aventi basso coefficiente di attrito
JPS61288062A (ja) * 1985-06-17 1986-12-18 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン チタン物体の耐摩耗性改善方法
DE3544975C1 (de) * 1985-12-19 1992-09-24 Krupp Gmbh Verfahren zur Herstellung eines beschichteten Formkoerpers
CH667361GA3 (enrdf_load_stackoverflow) * 1986-02-04 1988-10-14
FR2612204A1 (fr) * 1987-03-12 1988-09-16 Vac Tec Syst Procede et appareil pour le depot par un plasma d'arc electrique sous vide de revetements decoratifs et de revetements resistant a l'usure
JPS63239103A (ja) * 1987-03-27 1988-10-05 Ulvac Corp 立方晶窒化硼素被覆体およびその製造法
EP0423345A1 (de) * 1989-04-06 1991-04-24 Institut Strukturnoi Makrokinetiki Akademii Nauk Sssr Verfahren zur herstellung eines hochschmelzenden anorganischen überzuges auf der werkstückoberfläche
US5075181A (en) * 1989-05-05 1991-12-24 Kennametal Inc. High hardness/high compressive stress multilayer coated tool
US5304417A (en) * 1989-06-02 1994-04-19 Air Products And Chemicals, Inc. Graphite/carbon articles for elevated temperature service and method of manufacture
DE3936550C1 (en) * 1989-11-03 1991-04-18 Arthur Klink Gmbh, 7530 Pforzheim, De Substrate coating for wear resistance - with titanium nitride in vacuum chamber contg. titanium evaporator and heater with rotary substrate holder
JPH03153876A (ja) * 1989-11-10 1991-07-01 Shin Etsu Chem Co Ltd 炭化珪素質部材
JP2704317B2 (ja) * 1990-03-09 1998-01-26 ケンナメタル インコーポレイテツド 窒化チタニウムの非電導体基板上への物理的蒸着
US5264297A (en) * 1990-03-09 1993-11-23 Kennametal Inc. Physical vapor deposition of titanium nitride on a nonconductive substrate
GB9005321D0 (en) * 1990-03-09 1990-05-02 Matthews Allan Modulated structure composites produced by vapour disposition
JPH04125841A (ja) * 1990-09-17 1992-04-27 Tdk Corp 摺動部材の保護膜とその形成法
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5384201A (en) * 1991-05-31 1995-01-24 Robert Bosch Gmbh Tool for treating surfaces of structural parts and carrier material for the same
DE4232429A1 (de) * 1992-09-28 1994-03-31 Bosch Gmbh Robert Werkzeug zur Behandlung von Oberflächen von Bauteilen und Trägerwerkstoff für dieses Werkzeug
US5242753A (en) * 1991-07-11 1993-09-07 Praxair S.T. Technology, Inc. Substoichiometric zirconium nitride coating
US5185211A (en) * 1991-07-11 1993-02-09 Praxair S.T. Technology, Inc. Non-stoichiometric titanium nitride coating
US5811182A (en) * 1991-10-04 1998-09-22 Tulip Memory Systems, Inc. Magnetic recording medium having a substrate and a titanium nitride underlayer
FR2682125A1 (fr) * 1991-10-07 1993-04-09 Nitruvid Procede de traitement pour deposer une couche de carbone en phase vapeur sur la surface d'une piece metallique et piece ainsi obtenue.
WO1993021629A1 (en) * 1992-04-15 1993-10-28 Tulip Memory Systems, Inc. Precision-etched textured stop/start zone for magnetic-recording disks
US5443892A (en) * 1993-03-19 1995-08-22 Martin Marietta Energy Systems, Inc. Coated graphite articles useful in metallurgical processes and method for making same
DE4421144C2 (de) * 1993-07-21 2003-02-13 Unaxis Balzers Ag Beschichtetes Werkzeug mit erhöhter Standzeit
US5707705A (en) * 1993-09-08 1998-01-13 Tulip Memory Systems, Inc. Titanium or titanium-alloy substrate for magnetic-recording media
US5681635A (en) * 1994-01-20 1997-10-28 Tulip Memory Systems, Inc. Magnetic recording medium having a ceramic substrate, an underlayer having a dense fibrous zone T structure, and a magnetic layer
DE19625577A1 (de) * 1996-06-27 1998-01-02 Vaw Motor Gmbh Aluminium-Gußteil und Verfahren zu seiner Herstellung
TW476742B (en) * 1996-12-23 2002-02-21 Smh Man Services Ag Zirconia based ceramic article for use as a wear resistant exterior part for a wristwatch, and method for obtaining the same
US6447890B1 (en) * 1997-06-16 2002-09-10 Ati Properties, Inc. Coatings for cutting tools
US6360423B1 (en) 1997-12-16 2002-03-26 Clad Metals Llc Stick resistant coating for cookware
US7093340B2 (en) 1997-12-16 2006-08-22 All-Clad Metalcrafters Llc Stick resistant ceramic coating for cookware
US6432022B1 (en) 1998-05-15 2002-08-13 Alpha Getriebebau Gmbh Low-play planetary gear mechanism
RU2161661C1 (ru) * 1999-08-16 2001-01-10 Падеров Анатолий Николаевич Способ нанесения износостойких покрытий и повышения долговечности деталей
US20040157066A1 (en) * 2003-02-07 2004-08-12 Arzoumanidis G. Alexis Method of applying a hardcoating typically provided on downhole tools, and a system and apparatus having such a hardcoating
US7147939B2 (en) * 2003-02-27 2006-12-12 Kennametal Inc. Coated carbide tap
SE526567C2 (sv) * 2003-07-16 2005-10-11 Sandvik Intellectual Property Stödlist för långhålsborr med slityta i avvikande färg
US7211338B2 (en) * 2003-12-19 2007-05-01 Honeywell International, Inc. Hard, ductile coating system
US7581906B2 (en) * 2004-05-19 2009-09-01 Tdy Industries, Inc. Al2O3 ceramic tools with diffusion bonding enhanced layer
RU2270271C1 (ru) * 2004-05-25 2006-02-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
RU2270274C1 (ru) * 2004-06-04 2006-02-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
WO2011090066A1 (ja) * 2010-01-20 2011-07-28 株式会社Ihi 刃物用刃先構造および該刃先構造を備えた刃物
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CN102383093A (zh) * 2010-08-31 2012-03-21 鸿富锦精密工业（深圳）有限公司 涂层、具有该涂层的被覆件及该被覆件的制备方法
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US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827548A1 (de) * 1977-09-12 1979-03-22 Gen Electric Ringfoermiges metall-schneidwerkzeug aus titankarbid-ueberzogenem stahl sowie verfahren zum schaben von metallstaeben
DE3431330A1 (de) * 1984-08-25 1986-03-06 Battelle-Institut E.V., 6000 Frankfurt Scherblatt fuer einen elektrorasierer

Also Published As

Publication number Publication date
DE2431448A1 (de) 1975-03-06
US3900592A (en) 1975-08-19
JPS5319325B2 (enrdf_load_stackoverflow) 1978-06-20
JPS5034610A (enrdf_load_stackoverflow) 1975-04-03

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