DE2401475C2 - Verfahren und Einrichtung zur Messung von relativen Bewegungsgrößen - Google Patents

Verfahren und Einrichtung zur Messung von relativen Bewegungsgrößen

Info

Publication number
DE2401475C2
DE2401475C2 DE2401475A DE2401475A DE2401475C2 DE 2401475 C2 DE2401475 C2 DE 2401475C2 DE 2401475 A DE2401475 A DE 2401475A DE 2401475 A DE2401475 A DE 2401475A DE 2401475 C2 DE2401475 C2 DE 2401475C2
Authority
DE
Germany
Prior art keywords
light
phase
partial
spatial frequency
bundle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2401475A
Other languages
German (de)
English (en)
Other versions
DE2401475A1 (de
Inventor
Fromund Dipl.-Phys. 6330 Wetzlar Hock
Jörg Dipl.-Ing. 6331 Nauborn Willhelm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems Holdings GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH filed Critical Ernst Leitz Wetzlar GmbH
Priority to DE2401475A priority Critical patent/DE2401475C2/de
Priority to GB946/75A priority patent/GB1485584A/en
Priority to NL7500312A priority patent/NL7500312A/xx
Priority to JP50005315A priority patent/JPS6238644B2/ja
Publication of DE2401475A1 publication Critical patent/DE2401475A1/de
Application granted granted Critical
Publication of DE2401475C2 publication Critical patent/DE2401475C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4255—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application for alignment or positioning purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE2401475A 1974-01-12 1974-01-12 Verfahren und Einrichtung zur Messung von relativen Bewegungsgrößen Expired DE2401475C2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE2401475A DE2401475C2 (de) 1974-01-12 1974-01-12 Verfahren und Einrichtung zur Messung von relativen Bewegungsgrößen
GB946/75A GB1485584A (en) 1974-01-12 1975-01-09 Property of relative displacement between diffraction gratings
NL7500312A NL7500312A (nl) 1974-01-12 1975-01-10 Werkwijze voor het meten van een relatieve ieverandering en inrichting voor het ssen van deze werkwijze.
JP50005315A JPS6238644B2 (enExample) 1974-01-12 1975-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2401475A DE2401475C2 (de) 1974-01-12 1974-01-12 Verfahren und Einrichtung zur Messung von relativen Bewegungsgrößen

Publications (2)

Publication Number Publication Date
DE2401475A1 DE2401475A1 (de) 1975-07-17
DE2401475C2 true DE2401475C2 (de) 1982-12-30

Family

ID=5904696

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2401475A Expired DE2401475C2 (de) 1974-01-12 1974-01-12 Verfahren und Einrichtung zur Messung von relativen Bewegungsgrößen

Country Status (4)

Country Link
JP (1) JPS6238644B2 (enExample)
DE (1) DE2401475C2 (enExample)
GB (1) GB1485584A (enExample)
NL (1) NL7500312A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2835390A1 (de) 1978-08-12 1980-02-21 Leitz Ernst Gmbh Optischer korrelator
EP0243520B1 (en) * 1986-04-29 1991-11-27 Ibm Deutschland Gmbh Interferometric mask-wafer alignment
JPS6472133A (en) * 1987-09-14 1989-03-17 Hitachi Medical Corp Device for imprinting film data for x-ray photographing device
JPS6472132A (en) * 1987-09-14 1989-03-17 Hitachi Medical Corp Device for imprinting film data for x-ray photographing device
JPH02128147U (enExample) * 1989-03-30 1990-10-23
JPH04133808U (ja) * 1991-05-30 1992-12-14 株式会社島津製作所 Ｘ線テレビ透視撮影装置
GB9928483D0 (en) 1999-12-03 2000-02-02 Renishaw Plc Opto-electronic scale reading apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1548707C3 (de) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Fotoelektrischer Schrittgeber

Also Published As

Publication number Publication date
GB1485584A (en) 1977-09-14
DE2401475A1 (de) 1975-07-17
JPS6238644B2 (enExample) 1987-08-19
NL7500312A (nl) 1975-07-15
JPS50115057A (enExample) 1975-09-09

Similar Documents

Publication Publication Date Title
DE2237564C3 (de) Verfahren zur berührungslosen optischen Messung von Bewegungsgrößen, wie Geschwindigkeiten und Verschiebestrecken und Einrichtung zur Durchführung des Verfahrens
EP0076866B1 (de) Interpolierendes Lichtschnitt-Verfahren
DE3306709C2 (enExample)
DE1548707C3 (de) Fotoelektrischer Schrittgeber
DE2260474C3 (de) Verfahren und Einrichtung zur Scharfeinstellung eines Objektivs
DE2156617B2 (de) Einrichtung zur bildkorrelation
DE1921507B1 (de) Einrichtung zur Erzeugung phasenverschobener elektrischer Signale
DE2238413B2 (de) Vorrichtung zum Messen der Verschiebung zweier gegeneinander beweglicher Teile
EP0481356A2 (de) Polarisationsoptische Anordnung
EP1485670A2 (de) Verfahren und vorrichtung zur bestimmung der absolut-koordinaten eines objekts
DE3719538C2 (enExample)
DE2636211B1 (de) Interferometrisches verfahren zur abstands- oder ebenheitsmessung
DE2210681B2 (de) Einrichtung zur berührungslosen Messung
DE1698280B2 (de) Vorrichtung zur bestimmung und steuerung der lageaenderung eines objektes gegenueber einem bezugssystem
EP0491749B1 (de) Vorrichtung zur absoluten zweidimensionalen positionsmessung
DE1915478A1 (de) Anordnung zur Messung einer relativen Auslenkung
DE2653545C2 (de) Fotoelektrische Auflicht-Wegmeßeinrichtung
DE2401475A1 (de) Verfahren zur messung der relativlageaenderung
DE69421877T2 (de) Lasersonde für Geschwindigkeits- und Neigungsmessung
DE2019762B2 (de) Anordnung zur Erzeugung eines sich aus zwei bezüglich ihres Phasenunterschiedes modulierten Komponenten zusammensetzenden Meßlichtbündels
DE2160282A1 (de) Automatische Einstellanordnung
EP0575641B1 (de) Messeinrichtung
DE2237041C3 (de) Einrichtung zur Bestimmung geometrischer Daten an Körpern mittels Interferenzen
DE2262065C3 (de) Fotoelektrischer Schrittgeber
DE2525317A1 (de) Verfahren und vorrichtung zur verschiebungsmessung mittels eines beugungsgitters

Legal Events

Date Code Title Description
OD Request for examination
D2 Grant after examination
8320 Willingness to grant licences declared (paragraph 23)
8327 Change in the person/name/address of the patent owner

Owner name: WILD LEITZ GMBH, 6330 WETZLAR, DE

8339 Ceased/non-payment of the annual fee