GB1485584A - Property of relative displacement between diffraction gratings - Google Patents

Property of relative displacement between diffraction gratings

Info

Publication number
GB1485584A
GB1485584A GB94675A GB94675A GB1485584A GB 1485584 A GB1485584 A GB 1485584A GB 94675 A GB94675 A GB 94675A GB 94675 A GB94675 A GB 94675A GB 1485584 A GB1485584 A GB 1485584A
Authority
GB
United Kingdom
Prior art keywords
relative displacement
lens
diffraction grating
materials
jan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB94675A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ernst Leitz Wetzlar GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH filed Critical Ernst Leitz Wetzlar GmbH
Publication of GB1485584A publication Critical patent/GB1485584A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4255—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application for alignment or positioning purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

1485584 Measuring relative displacement ERNST LEITZ WETZLAR GmbH 9 Jan 1975 [12 Jan 1974] 946/75 Heading G1A [Also in Division G2] In a device for measuring the relative displacement between two diffractive structures 4 and 8 a light source 1 behind a diaphragm 2 illuminates the (movable) diffraction grating 4 via a lens 3. A lens 5 forms the Fourier transform of the radiation passing through the grating 4 into a plane containing a spatial frequency filter 6 which may have two "eye" shaped openings. The openings are intended to isolate certain diffraction orders, for example, the Œ1 orders. The radiation passing through is then focused on to the other stationary diffraction grating 8. A further lens 9 converges the resulting radiation upon a photo-electric receiver consisting of a bank of six receivers. The receivers output, which show sinusoidal phase displaced modulations, are then processed to provide information about the nature of the movement of the diffraction grating 4. The description includes many examples Figs. 2-16 (not shown) of suitable diaphragm apertures for the spatial filters, employing various materials (including coloured or polarized materials) and various patterns of materials to achieve a variety of different phase displacement effects. The optics of the system may be adapted to include concave mirrors as focusing means.
GB94675A 1974-01-12 1975-01-09 Property of relative displacement between diffraction gratings Expired GB1485584A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742401475 DE2401475C2 (en) 1974-01-12 1974-01-12 Method and device for measuring relative movement quantities

Publications (1)

Publication Number Publication Date
GB1485584A true GB1485584A (en) 1977-09-14

Family

ID=5904696

Family Applications (1)

Application Number Title Priority Date Filing Date
GB94675A Expired GB1485584A (en) 1974-01-12 1975-01-09 Property of relative displacement between diffraction gratings

Country Status (4)

Country Link
JP (1) JPS6238644B2 (en)
DE (1) DE2401475C2 (en)
GB (1) GB1485584A (en)
NL (1) NL7500312A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6476405B1 (en) 1999-12-03 2002-11-05 Renishaw Plc Measurement apparatus having a diffraction grating structure

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0243520B1 (en) * 1986-04-29 1991-11-27 Ibm Deutschland Gmbh Interferometric mask-wafer alignment
JPS6472133A (en) * 1987-09-14 1989-03-17 Hitachi Medical Corp Device for imprinting film data for x-ray photographing device
JPS6472132A (en) * 1987-09-14 1989-03-17 Hitachi Medical Corp Device for imprinting film data for x-ray photographing device
JPH02128147U (en) * 1989-03-30 1990-10-23
JPH04133808U (en) * 1991-05-30 1992-12-14 株式会社島津製作所 X-ray television fluoroscopy equipment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1548707C3 (en) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Photoelectric step generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6476405B1 (en) 1999-12-03 2002-11-05 Renishaw Plc Measurement apparatus having a diffraction grating structure

Also Published As

Publication number Publication date
NL7500312A (en) 1975-07-15
DE2401475C2 (en) 1982-12-30
JPS50115057A (en) 1975-09-09
JPS6238644B2 (en) 1987-08-19
DE2401475A1 (en) 1975-07-17

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee