NL7500312A - METHOD FOR MEASURING A RELATIVE CHANGE AND ARRANGEMENT FOR SSENING THIS METHOD. - Google Patents

METHOD FOR MEASURING A RELATIVE CHANGE AND ARRANGEMENT FOR SSENING THIS METHOD.

Info

Publication number
NL7500312A
NL7500312A NL7500312A NL7500312A NL7500312A NL 7500312 A NL7500312 A NL 7500312A NL 7500312 A NL7500312 A NL 7500312A NL 7500312 A NL7500312 A NL 7500312A NL 7500312 A NL7500312 A NL 7500312A
Authority
NL
Netherlands
Prior art keywords
ssening
measuring
arrangement
relative change
relative
Prior art date
Application number
NL7500312A
Other languages
Dutch (nl)
Original Assignee
Leitz Ernst Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leitz Ernst Gmbh filed Critical Leitz Ernst Gmbh
Publication of NL7500312A publication Critical patent/NL7500312A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4255—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application for alignment or positioning purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NL7500312A 1974-01-12 1975-01-10 METHOD FOR MEASURING A RELATIVE CHANGE AND ARRANGEMENT FOR SSENING THIS METHOD. NL7500312A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742401475 DE2401475C2 (en) 1974-01-12 1974-01-12 Method and device for measuring relative movement quantities

Publications (1)

Publication Number Publication Date
NL7500312A true NL7500312A (en) 1975-07-15

Family

ID=5904696

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7500312A NL7500312A (en) 1974-01-12 1975-01-10 METHOD FOR MEASURING A RELATIVE CHANGE AND ARRANGEMENT FOR SSENING THIS METHOD.

Country Status (4)

Country Link
JP (1) JPS6238644B2 (en)
DE (1) DE2401475C2 (en)
GB (1) GB1485584A (en)
NL (1) NL7500312A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0243520B1 (en) * 1986-04-29 1991-11-27 Ibm Deutschland Gmbh Interferometric mask-wafer alignment
JPS6472132A (en) * 1987-09-14 1989-03-17 Hitachi Medical Corp Device for imprinting film data for x-ray photographing device
JPS6472133A (en) * 1987-09-14 1989-03-17 Hitachi Medical Corp Device for imprinting film data for x-ray photographing device
JPH02128147U (en) * 1989-03-30 1990-10-23
JPH04133808U (en) * 1991-05-30 1992-12-14 株式会社島津製作所 X-ray television fluoroscopy equipment
GB9928483D0 (en) * 1999-12-03 2000-02-02 Renishaw Plc Opto-electronic scale reading apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1548707C3 (en) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Photoelectric step generator

Also Published As

Publication number Publication date
GB1485584A (en) 1977-09-14
JPS6238644B2 (en) 1987-08-19
DE2401475C2 (en) 1982-12-30
DE2401475A1 (en) 1975-07-17
JPS50115057A (en) 1975-09-09

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