DE2351393C3 - Ladungsverschiebeanordnung in Zwei-Phasen-Technik und Verfahren zu ihrer Herstellung - Google Patents
Ladungsverschiebeanordnung in Zwei-Phasen-Technik und Verfahren zu ihrer HerstellungInfo
- Publication number
- DE2351393C3 DE2351393C3 DE2351393A DE2351393A DE2351393C3 DE 2351393 C3 DE2351393 C3 DE 2351393C3 DE 2351393 A DE2351393 A DE 2351393A DE 2351393 A DE2351393 A DE 2351393A DE 2351393 C3 DE2351393 C3 DE 2351393C3
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- charge
- insulating layer
- shifting arrangement
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims 3
- 239000000758 substrate Substances 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000002513 implantation Methods 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000006866 deterioration Effects 0.000 claims 1
- 238000011161 development Methods 0.000 claims 1
- 230000018109 developmental process Effects 0.000 claims 1
- 239000012777 electrically insulating material Substances 0.000 claims 1
- 230000000873 masking effect Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 1
- -1 boron ions Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D44/00—Charge transfer devices
- H10D44/40—Charge-coupled devices [CCD]
- H10D44/45—Charge-coupled devices [CCD] having field effect produced by insulated gate electrodes
- H10D44/472—Surface-channel CCD
- H10D44/474—Two-phase CCD
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/213—Channel regions of field-effect devices
- H10D62/335—Channel regions of field-effect devices of charge-coupled devices
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2351393A DE2351393C3 (de) | 1973-10-12 | 1973-10-12 | Ladungsverschiebeanordnung in Zwei-Phasen-Technik und Verfahren zu ihrer Herstellung |
| GB3924074A GB1444494A (en) | 1973-10-12 | 1974-09-09 | Charge-coupled devices |
| CH1306174A CH574153A5 (enrdf_load_stackoverflow) | 1973-10-12 | 1974-09-27 | |
| FR7432633A FR2247821B1 (enrdf_load_stackoverflow) | 1973-10-12 | 1974-09-27 | |
| NL7413181A NL7413181A (nl) | 1973-10-12 | 1974-10-07 | Ladingsverschuivingsinrichting volgens de asentechniek. |
| IT28125/74A IT1022644B (it) | 1973-10-12 | 1974-10-07 | Disposizione e spostamento di carica con la tecnica a due fasi |
| LU71079A LU71079A1 (enrdf_load_stackoverflow) | 1973-10-12 | 1974-10-10 | |
| DK529674A DK140356C (da) | 1973-10-12 | 1974-10-10 | Ladningsforskydningsindretning i tofaseteknik |
| SE7412746A SE7412746L (enrdf_load_stackoverflow) | 1973-10-12 | 1974-10-10 | |
| JP49116997A JPS5068077A (enrdf_load_stackoverflow) | 1973-10-12 | 1974-10-11 | |
| BE149453A BE820981A (fr) | 1973-10-12 | 1974-10-11 | Dispositif a transfert de charges en technique dite a deux phases |
| US06/060,376 US4290187A (en) | 1973-10-12 | 1979-07-25 | Method of making charge-coupled arrangement in the two-phase technique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2351393A DE2351393C3 (de) | 1973-10-12 | 1973-10-12 | Ladungsverschiebeanordnung in Zwei-Phasen-Technik und Verfahren zu ihrer Herstellung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2351393A1 DE2351393A1 (de) | 1975-04-24 |
| DE2351393B2 DE2351393B2 (de) | 1977-11-03 |
| DE2351393C3 true DE2351393C3 (de) | 1978-06-22 |
Family
ID=5895316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2351393A Expired DE2351393C3 (de) | 1973-10-12 | 1973-10-12 | Ladungsverschiebeanordnung in Zwei-Phasen-Technik und Verfahren zu ihrer Herstellung |
Country Status (11)
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1101548A (en) * | 1971-08-19 | 1981-05-19 | Walter F. Kosonocky | Two phase charge coupled devices employing fixed charge for creating asymmetrical potential wells |
| JPS4847234A (enrdf_load_stackoverflow) * | 1971-10-18 | 1973-07-05 |
-
1973
- 1973-10-12 DE DE2351393A patent/DE2351393C3/de not_active Expired
-
1974
- 1974-09-09 GB GB3924074A patent/GB1444494A/en not_active Expired
- 1974-09-27 CH CH1306174A patent/CH574153A5/xx not_active IP Right Cessation
- 1974-09-27 FR FR7432633A patent/FR2247821B1/fr not_active Expired
- 1974-10-07 NL NL7413181A patent/NL7413181A/xx not_active Application Discontinuation
- 1974-10-07 IT IT28125/74A patent/IT1022644B/it active
- 1974-10-10 DK DK529674A patent/DK140356C/da active
- 1974-10-10 LU LU71079A patent/LU71079A1/xx unknown
- 1974-10-10 SE SE7412746A patent/SE7412746L/xx unknown
- 1974-10-11 JP JP49116997A patent/JPS5068077A/ja active Pending
- 1974-10-11 BE BE149453A patent/BE820981A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1444494A (en) | 1976-07-28 |
| CH574153A5 (enrdf_load_stackoverflow) | 1976-03-31 |
| FR2247821B1 (enrdf_load_stackoverflow) | 1979-02-16 |
| DK140356C (da) | 1980-01-07 |
| DK529674A (enrdf_load_stackoverflow) | 1975-06-09 |
| DE2351393A1 (de) | 1975-04-24 |
| BE820981A (fr) | 1975-02-03 |
| FR2247821A1 (enrdf_load_stackoverflow) | 1975-05-09 |
| SE7412746L (enrdf_load_stackoverflow) | 1975-04-14 |
| LU71079A1 (enrdf_load_stackoverflow) | 1975-04-17 |
| JPS5068077A (enrdf_load_stackoverflow) | 1975-06-07 |
| DK140356B (da) | 1979-08-06 |
| IT1022644B (it) | 1978-04-20 |
| NL7413181A (nl) | 1975-04-15 |
| DE2351393B2 (de) | 1977-11-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |