DE2328164A1 - Verfahren zur reinigung von praezisionsteilen aus metall, keramik oder glas - Google Patents
Verfahren zur reinigung von praezisionsteilen aus metall, keramik oder glasInfo
- Publication number
- DE2328164A1 DE2328164A1 DE19732328164 DE2328164A DE2328164A1 DE 2328164 A1 DE2328164 A1 DE 2328164A1 DE 19732328164 DE19732328164 DE 19732328164 DE 2328164 A DE2328164 A DE 2328164A DE 2328164 A1 DE2328164 A1 DE 2328164A1
- Authority
- DE
- Germany
- Prior art keywords
- workpiece
- solvent
- cleaning
- chlorotrifluoroethane
- removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 46
- 239000007788 liquid Substances 0.000 title claims abstract description 23
- 239000012535 impurity Substances 0.000 title claims abstract description 19
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000011521 glass Substances 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 230000007774 longterm Effects 0.000 claims abstract description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims abstract 6
- -1 methanol Chemical compound 0.000 claims abstract 3
- 239000002904 solvent Substances 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 39
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 33
- 238000009835 boiling Methods 0.000 claims description 21
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 14
- CYXIKYKBLDZZNW-UHFFFAOYSA-N 2-Chloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)CCl CYXIKYKBLDZZNW-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 claims description 8
- 239000000356 contaminant Substances 0.000 claims description 8
- 238000011109 contamination Methods 0.000 claims description 8
- 238000007654 immersion Methods 0.000 claims description 7
- 238000002604 ultrasonography Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 5
- 229930195733 hydrocarbon Natural products 0.000 claims description 5
- 150000001298 alcohols Chemical class 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 claims description 3
- 150000002576 ketones Chemical class 0.000 claims description 3
- 238000005201 scrubbing Methods 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 229950011008 tetrachloroethylene Drugs 0.000 claims description 3
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- YACLCMMBHTUQON-UHFFFAOYSA-N 1-chloro-1-fluoroethane Chemical compound CC(F)Cl YACLCMMBHTUQON-UHFFFAOYSA-N 0.000 claims 1
- XWCDCDSDNJVCLO-UHFFFAOYSA-N Chlorofluoromethane Chemical compound FCCl XWCDCDSDNJVCLO-UHFFFAOYSA-N 0.000 claims 1
- 238000007664 blowing Methods 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 239000013589 supplement Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 229940073584 methylene chloride Drugs 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 10
- 239000002775 capsule Substances 0.000 description 9
- 238000005238 degreasing Methods 0.000 description 7
- 239000003925 fat Substances 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000004506 ultrasonic cleaning Methods 0.000 description 4
- 239000001993 wax Substances 0.000 description 4
- 241000282836 Camelus dromedarius Species 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- JZULKTSSLJNBQJ-UHFFFAOYSA-N chromium;sulfuric acid Chemical compound [Cr].OS(O)(=O)=O JZULKTSSLJNBQJ-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000013527 degreasing agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012454 non-polar solvent Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- YSIBECUBQTZGNX-UHFFFAOYSA-N C.[Cl].[F] Chemical compound C.[Cl].[F] YSIBECUBQTZGNX-UHFFFAOYSA-N 0.000 description 1
- BAANXFDRJUUSEE-UHFFFAOYSA-N CC.[F].[Cl] Chemical class CC.[F].[Cl] BAANXFDRJUUSEE-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- SJKDEFDWZQSHRT-UHFFFAOYSA-N [Cl].FC(C)(F)F Chemical compound [Cl].FC(C)(F)F SJKDEFDWZQSHRT-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000010721 machine oil Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Surface Treatment Of Glass (AREA)
- Detergent Compositions (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25952772A | 1972-06-05 | 1972-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2328164A1 true DE2328164A1 (de) | 1973-12-20 |
Family
ID=22985312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732328164 Pending DE2328164A1 (de) | 1972-06-05 | 1973-06-02 | Verfahren zur reinigung von praezisionsteilen aus metall, keramik oder glas |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS4943458A (cs) |
| DE (1) | DE2328164A1 (cs) |
| IT (1) | IT977370B (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992022508A1 (de) * | 1991-06-19 | 1992-12-23 | Leica Mikroskopie Und Systeme Gmbh | Verfahren zur emissionsfreien, insbesondere fckw-freien, reinigung von präzisions-optiken bzw. -optikbaugruppen |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132311A (ja) * | 1982-02-03 | 1983-08-06 | Hitachi Ltd | ロ−ル偏心制御方法 |
| JPS63121A (ja) * | 1987-06-17 | 1988-01-05 | Wakomu:Kk | 蒸気乾燥洗浄装置 |
| JPH03269100A (ja) * | 1990-03-19 | 1991-11-29 | Japan Field Kk | テルペン系溶剤を用いた被洗浄物の洗浄方法 |
| JP2023057802A (ja) * | 2021-10-12 | 2023-04-24 | Ａｇｃ株式会社 | 洗浄剤組成物および洗浄方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3308839A (en) * | 1964-10-12 | 1967-03-14 | Donald J Barday | Method and apparatus for cleaning objects with solvent |
-
1973
- 1973-02-15 IT IT4828573A patent/IT977370B/it active
- 1973-05-21 JP JP5711173A patent/JPS4943458A/ja active Pending
- 1973-06-02 DE DE19732328164 patent/DE2328164A1/de active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992022508A1 (de) * | 1991-06-19 | 1992-12-23 | Leica Mikroskopie Und Systeme Gmbh | Verfahren zur emissionsfreien, insbesondere fckw-freien, reinigung von präzisions-optiken bzw. -optikbaugruppen |
| US5362330A (en) * | 1991-06-19 | 1994-11-08 | Leica Mikroskopie Und Systeme Gmbh | Process for the emission-free, in particular CFC-free, cleaning of precision optics or optical element groups |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4943458A (cs) | 1974-04-24 |
| IT977370B (it) | 1974-09-10 |
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