DE2327662A1 - Widerstandsthermometer - Google Patents
WiderstandsthermometerInfo
- Publication number
- DE2327662A1 DE2327662A1 DE19732327662 DE2327662A DE2327662A1 DE 2327662 A1 DE2327662 A1 DE 2327662A1 DE 19732327662 DE19732327662 DE 19732327662 DE 2327662 A DE2327662 A DE 2327662A DE 2327662 A1 DE2327662 A1 DE 2327662A1
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- resistance thermometer
- glass
- thermometer according
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 42
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 39
- 239000011521 glass Substances 0.000 claims description 30
- 229910052697 platinum Inorganic materials 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 6
- 239000010980 sapphire Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000000992 sputter etching Methods 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 238000000889 atomisation Methods 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910000510 noble metal Inorganic materials 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/02—Housing; Enclosing; Embedding; Filling the housing or enclosure
- H01C1/024—Housing; Enclosing; Embedding; Filling the housing or enclosure the housing or enclosure being hermetically sealed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
- H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed as one or more layers or coatings
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Thermistors And Varistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26254572A | 1972-06-14 | 1972-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2327662A1 true DE2327662A1 (de) | 1974-01-10 |
Family
ID=22997955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732327662 Pending DE2327662A1 (de) | 1972-06-14 | 1973-05-30 | Widerstandsthermometer |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4964478A (enrdf_load_stackoverflow) |
| AU (1) | AU474953B2 (enrdf_load_stackoverflow) |
| DE (1) | DE2327662A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2188158A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1440393A (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3829765A1 (de) * | 1987-09-04 | 1989-03-16 | Murata Manufacturing Co | Platin-temperatursensor |
| EP0303116A3 (en) * | 1987-08-12 | 1989-09-20 | Snow Brand Milk Products & Co., Ltd. | Sensor used for electrical heating measurement |
| DE9013464U1 (de) * | 1990-09-25 | 1991-01-31 | Arnheiter, Bernd, Dipl.-Phys., 4040 Neuss | Temperatursensor |
| DE9311061U1 (de) * | 1993-07-23 | 1993-10-28 | Ech Elektrochemie Halle Gmbh, 06120 Halle | Vorrichtung zur Thermostatierung von gaschromatographischen Trennsäulen |
| DE19605468A1 (de) * | 1995-02-15 | 1996-08-22 | Murata Manufacturing Co | Platintemperatursensor |
| DE10322166B4 (de) * | 2002-11-12 | 2005-04-28 | Heraeus Sensor Technology Gmbh | Temperaturfühler und seine Verwendung |
| US7046116B2 (en) | 2002-11-12 | 2006-05-16 | Heraeus Sensor Technology Gmbh | Temperature probe and its use |
| US8183974B2 (en) | 2007-09-28 | 2012-05-22 | Heracus Sensor Technology GmbH | 1200° C. film resistor |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1546091A (en) * | 1975-02-28 | 1979-05-16 | Johnson Matthey Co Ltd | Thermometers |
| JPS51120270A (en) * | 1975-04-14 | 1976-10-21 | Oosakafu | Theraml transducer |
| JPS5295279A (en) * | 1976-02-06 | 1977-08-10 | Agency Of Ind Science & Technol | Temperature detecting method |
| IE47186B1 (en) * | 1977-09-13 | 1984-01-11 | Johnson Matthey Co Ltd | Improvements in and relating to the measurement of temperature |
| JPS5543448A (en) * | 1978-09-22 | 1980-03-27 | Hitachi Ltd | Hot-wire flow meter |
| DE2944487A1 (de) * | 1979-11-03 | 1981-05-14 | Robert Bosch Gmbh, 7000 Stuttgart | Schneller temperatursensor fuer eine brennkraftmaschine |
| US4375056A (en) * | 1980-02-29 | 1983-02-22 | Leeds & Northrup Company | Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture |
| DE3208096A1 (de) * | 1982-03-06 | 1983-09-15 | Robert Bosch Gmbh, 7000 Stuttgart | Messsonde zur bestimmung der masse und/oder temperatur eines stroemenden mediums |
| JPS5965216A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | 熱式流量計 |
| JPS60201224A (ja) * | 1984-03-27 | 1985-10-11 | Kyushu Daigaku | 多層薄膜熱伝達ゲ−ジ |
| IN165267B (enrdf_load_stackoverflow) * | 1984-07-31 | 1989-09-09 | Rosemount Inc | |
| JPS61181104A (ja) * | 1985-02-06 | 1986-08-13 | シャープ株式会社 | 白金測温抵抗体 |
| DE3733192C1 (de) * | 1987-10-01 | 1988-10-06 | Bosch Gmbh Robert | PTC-Temperaturfuehler sowie Verfahren zur Herstellung von PTC-Temperaturfuehlerelementen fuer den PTC-Temperaturfuehler |
| GB8711161D0 (en) * | 1987-05-12 | 1987-06-17 | Smith Ind Plc | Temperature sensors |
| DE8900142U1 (de) * | 1989-01-07 | 1990-05-10 | Robert Bosch Gmbh, 7000 Stuttgart | Träger für Sensoren |
| JPH0314588A (ja) * | 1989-06-09 | 1991-01-23 | Taisho Pharmaceut Co Ltd | 生理活性物質３８２２ａ，ｂ |
| US6762671B2 (en) * | 2002-10-25 | 2004-07-13 | Delphi Technologies, Inc. | Temperature sensor and method of making and using the same |
| FI126956B (fi) | 2010-10-14 | 2017-08-31 | Janesko Oy | Menetelmä ja mitta-anturi lämpötilan mittaamiseksi |
| FI125815B (fi) | 2010-10-14 | 2016-02-29 | Janesko Oy | Mitta-anturi lämpötilan mittaamiseksi |
| CN103233426A (zh) * | 2013-04-27 | 2013-08-07 | 中国建筑第六工程局有限公司 | 一种软基中无支墩的贝雷梁支架及其支护方法 |
| EP2953103A1 (de) * | 2014-06-02 | 2015-12-09 | Siemens Schweiz AG | Gefahrenmelder |
| DE102016112496B4 (de) * | 2016-07-07 | 2022-06-15 | Endress + Hauser Flowtec Ag | Verfahren zur Herstellung eines Sensors eines thermischen Durchflussmessgeräts zur Messung des Massedurchflusses eines Mediums in einem Messrohr und ein Sensor |
| CN114699624A (zh) * | 2022-04-24 | 2022-07-05 | 盈天实业(深圳)有限公司 | 介入式医疗导管及其制作方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3382100A (en) * | 1965-09-14 | 1968-05-07 | Melpar Inc | Rhenium thin film resistors |
| US3660158A (en) * | 1968-12-30 | 1972-05-02 | Gen Electric | Thin film nickel temperature sensor and method of forming |
-
1973
- 1973-05-21 FR FR7318372A patent/FR2188158A1/fr not_active Withdrawn
- 1973-05-30 DE DE19732327662 patent/DE2327662A1/de active Pending
- 1973-06-07 AU AU56661/73A patent/AU474953B2/en not_active Expired
- 1973-06-11 JP JP6490273A patent/JPS4964478A/ja active Pending
- 1973-06-14 GB GB2825173A patent/GB1440393A/en not_active Expired
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0303116A3 (en) * | 1987-08-12 | 1989-09-20 | Snow Brand Milk Products & Co., Ltd. | Sensor used for electrical heating measurement |
| DE3829765A1 (de) * | 1987-09-04 | 1989-03-16 | Murata Manufacturing Co | Platin-temperatursensor |
| DE9013464U1 (de) * | 1990-09-25 | 1991-01-31 | Arnheiter, Bernd, Dipl.-Phys., 4040 Neuss | Temperatursensor |
| DE9311061U1 (de) * | 1993-07-23 | 1993-10-28 | Ech Elektrochemie Halle Gmbh, 06120 Halle | Vorrichtung zur Thermostatierung von gaschromatographischen Trennsäulen |
| DE19605468A1 (de) * | 1995-02-15 | 1996-08-22 | Murata Manufacturing Co | Platintemperatursensor |
| DE19605468C2 (de) * | 1995-02-15 | 1998-11-19 | Murata Manufacturing Co | Platintemperatursensor |
| DE10322166B4 (de) * | 2002-11-12 | 2005-04-28 | Heraeus Sensor Technology Gmbh | Temperaturfühler und seine Verwendung |
| US7046116B2 (en) | 2002-11-12 | 2006-05-16 | Heraeus Sensor Technology Gmbh | Temperature probe and its use |
| US8183974B2 (en) | 2007-09-28 | 2012-05-22 | Heracus Sensor Technology GmbH | 1200° C. film resistor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4964478A (enrdf_load_stackoverflow) | 1974-06-21 |
| FR2188158A1 (enrdf_load_stackoverflow) | 1974-01-18 |
| AU5666173A (en) | 1974-12-12 |
| GB1440393A (en) | 1976-06-23 |
| AU474953B2 (en) | 1976-08-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2327662A1 (de) | Widerstandsthermometer | |
| DE2919433C2 (de) | Meßsonde zur Messung der Masse und/oder Temperatur eines strömenden Mediums | |
| DE2507731C3 (de) | Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung | |
| EP0354598B1 (de) | Sonde zur thermischen Massenstrommessung von Gasen und Flüssigkeiten | |
| DE4445243C2 (de) | Temperaturfühler | |
| DE1590870C3 (de) | Elektrischer Präzisionswiderstand | |
| DE3301659C2 (enrdf_load_stackoverflow) | ||
| DE3630393C2 (de) | Widerstandsthermometer | |
| DE3231345C3 (de) | Verfahren zur Herstellung von Sonden zur Messung der Masse und/oder Temperatur eines strömenden Mediums | |
| EP0944816A1 (de) | Elektrischer widerstand mit wenigstens zwei anschlusskontaktfeldern auf einem keramik-substrat sowie verfahren zu dessen herstellung | |
| AT403851B (de) | Widerstandsthermometer mit einem messwiderstand | |
| DE2558752C3 (de) | Verfahren zur Herstellung eines Schichrwiderstandes als Meßwiderstand für Widerstandsthermometer | |
| DE1648241C3 (de) | Maximumthermometer für Oberflächentemperaturen | |
| DE2029065A1 (de) | Elektrisches Widerstandsthermometer | |
| EP0095013A1 (de) | Sender- bzw. Empfängerelement für eine nach dem Wärmeimpfverfahren arbeitende Durchfluss-Messvorrichtung und unter Verwendung dieser Elemente gebaute Vorrichtung | |
| DE3033028A1 (de) | Praezisionswiderstand und verfahren zu dessen herstellung. | |
| DE1465205C3 (de) | Widerstandselement | |
| DE2100789A1 (de) | Thermistor und Verfahren zu seiner Herstellung | |
| EP1202051A1 (de) | Vorrichtung zum Messen der Sauerstoffkonzentration in Gasen unter der Verwendung eines inhomogenen magnetischen Felds | |
| DE3110047A1 (de) | Sensor zur messung physikalischer groessen sowie verfahren zu seiner herstellung und seine verwendung | |
| EP0235362B1 (de) | Anordnung zur Messung der Strömungsgeschwindigkeit | |
| EP2208036A1 (de) | Wärmeleitungs-gasdruckmessanordnung | |
| EP0447596B1 (de) | Temperaturfühler | |
| DE3812195A1 (de) | Temperatursensor | |
| DE9202705U1 (de) | Temperaturmeßfühler |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHW | Rejection |