AU474953B2 - Thin film resistance thermometer - Google Patents

Thin film resistance thermometer

Info

Publication number
AU474953B2
AU474953B2 AU56661/73A AU5666173A AU474953B2 AU 474953 B2 AU474953 B2 AU 474953B2 AU 56661/73 A AU56661/73 A AU 56661/73A AU 5666173 A AU5666173 A AU 5666173A AU 474953 B2 AU474953 B2 AU 474953B2
Authority
AU
Australia
Prior art keywords
thin film
film resistance
resistance thermometer
thermometer
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU56661/73A
Other versions
AU5666173A (en
Inventor
W. Fisher Edward
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elsag Bailey Inc
Original Assignee
Bailey Meter Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bailey Meter Co filed Critical Bailey Meter Co
Publication of AU5666173A publication Critical patent/AU5666173A/en
Application granted granted Critical
Publication of AU474953B2 publication Critical patent/AU474953B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/02—Housing; Enclosing; Embedding; Filling the housing or enclosure
    • H01C1/024—Housing; Enclosing; Embedding; Filling the housing or enclosure the housing or enclosure being hermetically sealed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed as one or more layers or coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Thermistors And Varistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
AU56661/73A 1972-06-14 1973-06-07 Thin film resistance thermometer Expired AU474953B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26254572A 1972-06-14 1972-06-14
USUS262545 1972-06-14

Publications (2)

Publication Number Publication Date
AU5666173A AU5666173A (en) 1974-12-12
AU474953B2 true AU474953B2 (en) 1976-08-05

Family

ID=22997955

Family Applications (1)

Application Number Title Priority Date Filing Date
AU56661/73A Expired AU474953B2 (en) 1972-06-14 1973-06-07 Thin film resistance thermometer

Country Status (5)

Country Link
JP (1) JPS4964478A (en)
AU (1) AU474953B2 (en)
DE (1) DE2327662A1 (en)
FR (1) FR2188158A1 (en)
GB (1) GB1440393A (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1546091A (en) * 1975-02-28 1979-05-16 Johnson Matthey Co Ltd Thermometers
JPS51120270A (en) * 1975-04-14 1976-10-21 Oosakafu Theraml transducer
JPS5295279A (en) * 1976-02-06 1977-08-10 Agency Of Ind Science & Technol Temperature detecting method
IE47186B1 (en) * 1977-09-13 1984-01-11 Johnson Matthey Co Ltd Improvements in and relating to the measurement of temperature
JPS5543448A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Hot-wire flow meter
DE2944487A1 (en) * 1979-11-03 1981-05-14 Robert Bosch Gmbh, 7000 Stuttgart FAST TEMPERATURE SENSOR FOR AN INTERNAL COMBUSTION ENGINE
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
DE3208096A1 (en) * 1982-03-06 1983-09-15 Robert Bosch Gmbh, 7000 Stuttgart MEASURING PROBE FOR DETERMINING THE SIZE AND / OR TEMPERATURE OF A FLOWING MEDIUM
JPS5965216A (en) * 1982-10-06 1984-04-13 Hitachi Ltd Heat type flowmeter
JPS60201224A (en) * 1984-03-27 1985-10-11 Kyushu Daigaku Multilayered thin-film heat conduction gauge
IN165267B (en) * 1984-07-31 1989-09-09 Rosemount Inc
JPS61181104A (en) * 1985-02-06 1986-08-13 シャープ株式会社 Platinum temperature measuring resistor
DE3733192C1 (en) * 1987-10-01 1988-10-06 Bosch Gmbh Robert PTC temperature sensor and method for producing PTC temperature sensor elements for the PTC temperature sensor
GB8711161D0 (en) * 1987-05-12 1987-06-17 Smith Ind Plc Temperature sensors
JPH0774790B2 (en) * 1987-08-12 1995-08-09 雪印乳業株式会社 Sensor used for electric heating method
JP2605297B2 (en) * 1987-09-04 1997-04-30 株式会社村田製作所 Platinum temperature sensor and method of manufacturing the same
DE8900142U1 (en) * 1989-01-07 1990-05-10 Robert Bosch Gmbh, 7000 Stuttgart Carrier for sensors
JPH0314588A (en) * 1989-06-09 1991-01-23 Taisho Pharmaceut Co Ltd Physiologically active compound 3822a and b
DE9013464U1 (en) * 1990-09-25 1991-01-31 Arnheiter, Bernd, Dipl.-Phys., 4040 Neuss Temperature sensor
DE9311061U1 (en) * 1993-07-23 1993-10-28 Ech Elektrochemie Halle Gmbh, 06120 Halle Device for thermostatting gas chromatographic separation columns
JPH08219900A (en) * 1995-02-15 1996-08-30 Murata Mfg Co Ltd Platinum-based temperature sensor
US6762671B2 (en) * 2002-10-25 2004-07-13 Delphi Technologies, Inc. Temperature sensor and method of making and using the same
US7046116B2 (en) 2002-11-12 2006-05-16 Heraeus Sensor Technology Gmbh Temperature probe and its use
DE10322166B4 (en) * 2002-11-12 2005-04-28 Heraeus Sensor Technology Gmbh Temperature sensor and its use
DE102007046900C5 (en) 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh High-temperature sensor and a method for its production
FI126956B (en) 2010-10-14 2017-08-31 Janesko Oy Method and gauge for measuring temperature
FI125815B (en) 2010-10-14 2016-02-29 Janesko Oy Measurement detector for temperature measurement
CN103233426A (en) * 2013-04-27 2013-08-07 中国建筑第六工程局有限公司 Bailey beam support free of buttress in soft foundation and supporting method thereof
EP2953103A1 (en) * 2014-06-02 2015-12-09 Siemens Schweiz AG Danger warning system
DE102016112496B4 (en) 2016-07-07 2022-06-15 Endress + Hauser Flowtec Ag Method for manufacturing a sensor of a thermal flow meter for measuring the mass flow of a medium in a measuring tube and a sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3382100A (en) * 1965-09-14 1968-05-07 Melpar Inc Rhenium thin film resistors
US3660158A (en) * 1968-12-30 1972-05-02 Gen Electric Thin film nickel temperature sensor and method of forming

Also Published As

Publication number Publication date
GB1440393A (en) 1976-06-23
FR2188158A1 (en) 1974-01-18
AU5666173A (en) 1974-12-12
JPS4964478A (en) 1974-06-21
DE2327662A1 (en) 1974-01-10

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