DE2313107C3 - Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes - Google Patents

Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes

Info

Publication number
DE2313107C3
DE2313107C3 DE2313107A DE2313107A DE2313107C3 DE 2313107 C3 DE2313107 C3 DE 2313107C3 DE 2313107 A DE2313107 A DE 2313107A DE 2313107 A DE2313107 A DE 2313107A DE 2313107 C3 DE2313107 C3 DE 2313107C3
Authority
DE
Germany
Prior art keywords
current
deflection
piezo element
current source
circuit arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2313107A
Other languages
German (de)
English (en)
Other versions
DE2313107A1 (de
DE2313107B2 (de
Inventor
Dieter Bertram Dr.Rer.Nat. 7032 Sindelfingen Knoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard GmbH Germany
Original Assignee
Hewlett Packard GmbH Germany
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard GmbH Germany filed Critical Hewlett Packard GmbH Germany
Priority to DE2313107A priority Critical patent/DE2313107C3/de
Priority to US448144A priority patent/US3916226A/en
Priority to JP3020274A priority patent/JPS5322037B2/ja
Publication of DE2313107A1 publication Critical patent/DE2313107A1/de
Publication of DE2313107B2 publication Critical patent/DE2313107B2/de
Application granted granted Critical
Publication of DE2313107C3 publication Critical patent/DE2313107C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/10—Control of position or direction without using feedback
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41352—Alternative clamping dilation of piezo, caterpillar motion, inchworm

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Details Of Television Scanning (AREA)
DE2313107A 1973-03-16 1973-03-16 Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes Expired DE2313107C3 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE2313107A DE2313107C3 (de) 1973-03-16 1973-03-16 Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes
US448144A US3916226A (en) 1973-03-16 1974-03-04 Method and circuitry to control the deflection of a piezoelectric element
JP3020274A JPS5322037B2 (https=) 1973-03-16 1974-03-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2313107A DE2313107C3 (de) 1973-03-16 1973-03-16 Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes

Publications (3)

Publication Number Publication Date
DE2313107A1 DE2313107A1 (de) 1974-11-14
DE2313107B2 DE2313107B2 (de) 1975-02-27
DE2313107C3 true DE2313107C3 (de) 1975-10-09

Family

ID=5874951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2313107A Expired DE2313107C3 (de) 1973-03-16 1973-03-16 Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes

Country Status (3)

Country Link
US (1) US3916226A (https=)
JP (1) JPS5322037B2 (https=)
DE (1) DE2313107C3 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4149118A (en) 1976-03-20 1979-04-10 Max Planck Gesellschaft Zur Forderung Der Wissenschaften, E.V. Electronic control and regulation system

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5378716A (en) * 1976-12-23 1978-07-12 Sony Corp Magnetic picture recorder/reproducer
US4263527A (en) * 1979-05-17 1981-04-21 The Charles Stark Draper Laboratory, Inc. Charge control of piezoelectric actuators to reduce hysteresis effects
JPS56105322A (en) * 1980-01-19 1981-08-21 Matsushita Electric Ind Co Ltd Driving device of electromechanical conversion element
JPS61285082A (ja) * 1985-06-10 1986-12-15 Toshiba Corp 圧電型駆動装置
US4841191A (en) * 1987-02-20 1989-06-20 Hitachi, Ltd. Piezoelectric actuator control apparatus
DE3809284A1 (de) * 1988-03-19 1989-09-28 Diehl Gmbh & Co Steuerschaltung fuer ein piezo-stellglied
DE3909206C1 (https=) * 1989-03-21 1990-05-31 Adalbert Dr.-Ing. 8000 Muenchen De Bandemer
US5051646A (en) * 1989-04-28 1991-09-24 Digital Instruments, Inc. Method of driving a piezoelectric scanner linearly with time
US5077473A (en) * 1990-07-26 1991-12-31 Digital Instruments, Inc. Drift compensation for scanning probe microscopes using an enhanced probe positioning system
US5714831A (en) * 1995-11-13 1998-02-03 Wisconsin Alumni Research Foundation Method and apparatus for improved control of piezoelectric positioners
WO2010039343A1 (en) * 2008-09-30 2010-04-08 Fujifilm Corporation Method for nozzle velocity control
KR20110061652A (ko) * 2008-09-30 2011-06-09 후지필름 디마틱스, 인크. 노즐을 통한 속도 조절
JP6311314B2 (ja) * 2014-01-06 2018-04-18 株式会社リコー 光偏向装置、光走査装置、画像表示装置及び画像形成装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2594841A (en) * 1945-08-11 1952-04-29 Brush Dev Co Piezoelectric transducer with pushpull and feedback circuit
US3156759A (en) * 1961-01-13 1964-11-10 Gen Precision Inc Dual cantilever mounted scanning mechanism
US3278770A (en) * 1962-08-02 1966-10-11 Branson Instr Extremal-centering method and system
US3293456A (en) * 1963-03-18 1966-12-20 Branson Instr Ultrasonic cleaning apparatus
US3356848A (en) * 1963-04-03 1967-12-05 Martin Marietta Corp Electro-optical error measuring system for determining target displacement
US3555453A (en) * 1968-05-09 1971-01-12 Lansing Research Corp Stabilization of lasers or the like
US3489930A (en) * 1968-07-29 1970-01-13 Branson Instr Apparatus for controlling the power supplied to an ultrasonic transducer
US3646413A (en) * 1970-09-25 1972-02-29 Avco Corp Piezoelectric-driven variable capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4149118A (en) 1976-03-20 1979-04-10 Max Planck Gesellschaft Zur Forderung Der Wissenschaften, E.V. Electronic control and regulation system

Also Published As

Publication number Publication date
US3916226A (en) 1975-10-28
DE2313107A1 (de) 1974-11-14
JPS49124952A (https=) 1974-11-29
DE2313107B2 (de) 1975-02-27
JPS5322037B2 (https=) 1978-07-06

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee