JPS5322037B2 - - Google Patents
Info
- Publication number
- JPS5322037B2 JPS5322037B2 JP3020274A JP3020274A JPS5322037B2 JP S5322037 B2 JPS5322037 B2 JP S5322037B2 JP 3020274 A JP3020274 A JP 3020274A JP 3020274 A JP3020274 A JP 3020274A JP S5322037 B2 JPS5322037 B2 JP S5322037B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/10—Control of position or direction without using feedback
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/20—Control of position or direction using feedback using a digital comparing device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41352—Alternative clamping dilation of piezo, caterpillar motion, inchworm
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Details Of Television Scanning (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2313107A DE2313107C3 (de) | 1973-03-16 | 1973-03-16 | Verfahren und Schaltungsanordnung zum Steuern der Ausdehnung eines piezoelektrischen Elementes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49124952A JPS49124952A (ja) | 1974-11-29 |
JPS5322037B2 true JPS5322037B2 (ja) | 1978-07-06 |
Family
ID=5874951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3020274A Expired JPS5322037B2 (ja) | 1973-03-16 | 1974-03-15 |
Country Status (3)
Country | Link |
---|---|
US (1) | US3916226A (ja) |
JP (1) | JPS5322037B2 (ja) |
DE (1) | DE2313107C3 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5378716A (en) * | 1976-12-23 | 1978-07-12 | Sony Corp | Magnetic picture recorder/reproducer |
US4263527A (en) * | 1979-05-17 | 1981-04-21 | The Charles Stark Draper Laboratory, Inc. | Charge control of piezoelectric actuators to reduce hysteresis effects |
JPS56105322A (en) * | 1980-01-19 | 1981-08-21 | Matsushita Electric Ind Co Ltd | Driving device of electromechanical conversion element |
JPS61285082A (ja) * | 1985-06-10 | 1986-12-15 | Toshiba Corp | 圧電型駆動装置 |
US4841191A (en) * | 1987-02-20 | 1989-06-20 | Hitachi, Ltd. | Piezoelectric actuator control apparatus |
DE3809284A1 (de) * | 1988-03-19 | 1989-09-28 | Diehl Gmbh & Co | Steuerschaltung fuer ein piezo-stellglied |
DE3909206C1 (ja) * | 1989-03-21 | 1990-05-31 | Adalbert Dr.-Ing. 8000 Muenchen De Bandemer | |
US5051646A (en) * | 1989-04-28 | 1991-09-24 | Digital Instruments, Inc. | Method of driving a piezoelectric scanner linearly with time |
US5077473A (en) * | 1990-07-26 | 1991-12-31 | Digital Instruments, Inc. | Drift compensation for scanning probe microscopes using an enhanced probe positioning system |
US5714831A (en) * | 1995-11-13 | 1998-02-03 | Wisconsin Alumni Research Foundation | Method and apparatus for improved control of piezoelectric positioners |
WO2010039343A1 (en) * | 2008-09-30 | 2010-04-08 | Fujifilm Corporation | Method for nozzle velocity control |
JP2012504072A (ja) * | 2008-09-30 | 2012-02-16 | フジフィルム ディマティックス, インコーポレイテッド | ノズル流過速度の制御 |
JP6311314B2 (ja) * | 2014-01-06 | 2018-04-18 | 株式会社リコー | 光偏向装置、光走査装置、画像表示装置及び画像形成装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2594841A (en) * | 1945-08-11 | 1952-04-29 | Brush Dev Co | Piezoelectric transducer with pushpull and feedback circuit |
US3156759A (en) * | 1961-01-13 | 1964-11-10 | Gen Precision Inc | Dual cantilever mounted scanning mechanism |
US3278770A (en) * | 1962-08-02 | 1966-10-11 | Branson Instr | Extremal-centering method and system |
US3293456A (en) * | 1963-03-18 | 1966-12-20 | Branson Instr | Ultrasonic cleaning apparatus |
US3356848A (en) * | 1963-04-03 | 1967-12-05 | Martin Marietta Corp | Electro-optical error measuring system for determining target displacement |
US3555453A (en) * | 1968-05-09 | 1971-01-12 | Lansing Research Corp | Stabilization of lasers or the like |
US3489930A (en) * | 1968-07-29 | 1970-01-13 | Branson Instr | Apparatus for controlling the power supplied to an ultrasonic transducer |
US3646413A (en) * | 1970-09-25 | 1972-02-29 | Avco Corp | Piezoelectric-driven variable capacitor |
-
1973
- 1973-03-16 DE DE2313107A patent/DE2313107C3/de not_active Expired
-
1974
- 1974-03-04 US US448144A patent/US3916226A/en not_active Expired - Lifetime
- 1974-03-15 JP JP3020274A patent/JPS5322037B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2313107A1 (de) | 1974-11-14 |
DE2313107C3 (de) | 1975-10-09 |
US3916226A (en) | 1975-10-28 |
DE2313107B2 (de) | 1975-02-27 |
JPS49124952A (ja) | 1974-11-29 |