DE2305102A1 - Verfahren und vorrichtung zur messung des dampfflusses durch ionisierung bei verdampfung im vakuum - Google Patents
Verfahren und vorrichtung zur messung des dampfflusses durch ionisierung bei verdampfung im vakuumInfo
- Publication number
- DE2305102A1 DE2305102A1 DE2305102A DE2305102A DE2305102A1 DE 2305102 A1 DE2305102 A1 DE 2305102A1 DE 2305102 A DE2305102 A DE 2305102A DE 2305102 A DE2305102 A DE 2305102A DE 2305102 A1 DE2305102 A1 DE 2305102A1
- Authority
- DE
- Germany
- Prior art keywords
- particles
- magnetic field
- electrode
- measuring
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 27
- 238000001704 evaporation Methods 0.000 title description 7
- 230000008020 evaporation Effects 0.000 title description 6
- 239000002245 particle Substances 0.000 claims description 43
- 150000002500 ions Chemical class 0.000 claims description 38
- 238000010894 electron beam technology Methods 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 12
- 230000005865 ionizing radiation Effects 0.000 claims description 9
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000001819 mass spectrum Methods 0.000 claims 2
- 230000003252 repetitive effect Effects 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 230000006698 induction Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
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- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000004326 stimulated echo acquisition mode for imaging Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
- G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Physical Vapour Deposition (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH191872A CH570610A5 (enExample) | 1972-02-09 | 1972-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2305102A1 true DE2305102A1 (de) | 1973-08-16 |
Family
ID=4221617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2305102A Pending DE2305102A1 (de) | 1972-02-09 | 1973-02-02 | Verfahren und vorrichtung zur messung des dampfflusses durch ionisierung bei verdampfung im vakuum |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3842267A (enExample) |
| JP (1) | JPS4889794A (enExample) |
| BE (1) | BE795278A (enExample) |
| CA (1) | CA983581A (enExample) |
| CH (1) | CH570610A5 (enExample) |
| DE (1) | DE2305102A1 (enExample) |
| FR (1) | FR2171824A5 (enExample) |
| GB (1) | GB1394155A (enExample) |
| IE (1) | IE37274B1 (enExample) |
| IT (1) | IT992543B (enExample) |
| LU (1) | LU66996A1 (enExample) |
| NL (1) | NL7301762A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4024399A (en) * | 1975-01-06 | 1977-05-17 | Jersey Nuclear-Avco Isotopes, Inc. | Method and apparatus for measuring vapor flow in isotope separation |
| US4010366A (en) * | 1975-09-22 | 1977-03-01 | Xerox Corporation | Measurement of the mass and charge of charged particles |
| JPS6311808A (ja) * | 1986-07-02 | 1988-01-19 | Mitsubishi Electric Corp | 膜厚監視装置 |
| TW222650B (enExample) * | 1991-04-01 | 1994-04-21 | Dow Corning |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2694151A (en) * | 1953-06-26 | 1954-11-09 | Cons Eng Corp | Mass spectrometry |
| US2967239A (en) * | 1954-02-19 | 1961-01-03 | Gen Electric | Method and apparatus for analyzing constituents of a substance |
| US2958774A (en) * | 1957-05-07 | 1960-11-01 | Ca Nat Research Council | Omegatron with orbit increment detection |
| NL109528C (enExample) * | 1958-03-15 | |||
| US3247373A (en) * | 1962-12-18 | 1966-04-19 | Gca Corp | Mass spectrometer leak detector with means for controlling the ion source output |
-
0
- BE BE795278D patent/BE795278A/xx unknown
-
1972
- 1972-02-09 CH CH191872A patent/CH570610A5/xx not_active IP Right Cessation
-
1973
- 1973-02-02 DE DE2305102A patent/DE2305102A1/de active Pending
- 1973-02-07 GB GB598973A patent/GB1394155A/en not_active Expired
- 1973-02-07 US US00330537A patent/US3842267A/en not_active Expired - Lifetime
- 1973-02-07 IT IT20128/73A patent/IT992543B/it active
- 1973-02-08 NL NL7301762A patent/NL7301762A/xx unknown
- 1973-02-08 CA CA163,206A patent/CA983581A/en not_active Expired
- 1973-02-09 LU LU66996A patent/LU66996A1/xx unknown
- 1973-02-09 FR FR7304779A patent/FR2171824A5/fr not_active Expired
- 1973-02-09 IE IE204/73A patent/IE37274B1/xx unknown
- 1973-02-09 JP JP48016340A patent/JPS4889794A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| IE37274B1 (en) | 1977-06-22 |
| NL7301762A (enExample) | 1973-08-13 |
| FR2171824A5 (enExample) | 1973-09-21 |
| BE795278A (fr) | 1973-08-09 |
| CH570610A5 (enExample) | 1975-12-15 |
| IT992543B (it) | 1975-09-30 |
| JPS4889794A (enExample) | 1973-11-22 |
| US3842267A (en) | 1974-10-15 |
| IE37274L (en) | 1973-08-09 |
| CA983581A (en) | 1976-02-10 |
| LU66996A1 (enExample) | 1973-04-19 |
| GB1394155A (en) | 1975-05-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHN | Withdrawal |