DE2229724B2 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
DE2229724B2
DE2229724B2 DE2229724A DE2229724A DE2229724B2 DE 2229724 B2 DE2229724 B2 DE 2229724B2 DE 2229724 A DE2229724 A DE 2229724A DE 2229724 A DE2229724 A DE 2229724A DE 2229724 B2 DE2229724 B2 DE 2229724B2
Authority
DE
Germany
Prior art keywords
pump
blade
angle
attack
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2229724A
Other languages
German (de)
English (en)
Other versions
DE2229724A1 (de
Inventor
Ruediger Dr.-Ing. Dr. 5000 Koeln Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE2229724A priority Critical patent/DE2229724B2/de
Priority to CH448873A priority patent/CH564692A5/xx
Priority to FR7322024A priority patent/FR2190184A5/fr
Priority to GB2890673A priority patent/GB1397179A/en
Priority to US00371372A priority patent/US3826588A/en
Publication of DE2229724A1 publication Critical patent/DE2229724A1/de
Publication of DE2229724B2 publication Critical patent/DE2229724B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE2229724A 1972-06-19 1972-06-19 Turbomolekularpumpe Withdrawn DE2229724B2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE2229724A DE2229724B2 (de) 1972-06-19 1972-06-19 Turbomolekularpumpe
CH448873A CH564692A5 (OSRAM) 1972-06-19 1973-03-28
FR7322024A FR2190184A5 (OSRAM) 1972-06-19 1973-06-15
GB2890673A GB1397179A (en) 1972-06-19 1973-06-18 Turbomolecular vacuum pump
US00371372A US3826588A (en) 1972-06-19 1973-06-19 Turbomolecular vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2229724A DE2229724B2 (de) 1972-06-19 1972-06-19 Turbomolekularpumpe

Publications (2)

Publication Number Publication Date
DE2229724A1 DE2229724A1 (de) 1974-01-10
DE2229724B2 true DE2229724B2 (de) 1980-06-04

Family

ID=5848074

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2229724A Withdrawn DE2229724B2 (de) 1972-06-19 1972-06-19 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US3826588A (OSRAM)
CH (1) CH564692A5 (OSRAM)
DE (1) DE2229724B2 (OSRAM)
FR (1) FR2190184A5 (OSRAM)
GB (1) GB1397179A (OSRAM)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2518201C3 (de) * 1975-04-24 1979-03-15 Battelle-Institut E.V., 6000 Frankfurt Vorrichtung zum Trennen von Gasgemischen in Bestandteile unterschiedlicher Molekülmassen
US4422822A (en) * 1980-08-11 1983-12-27 Norman Milleron Rotating fiber array molecular driver and molecular momentum transfer device constructed therewith
GB2128687B (en) * 1982-10-13 1986-10-29 Rolls Royce Rotor or stator blade for an axial flow compressor
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
GB2226603B (en) * 1988-02-26 1992-07-29 Nikolai Mikhailovich Novikov Turbomolecular vacuum pump
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
JPH1089284A (ja) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
WO2009101699A1 (ja) * 2008-02-15 2009-08-20 Shimadzu Corporation ターボ分子ポンプ
JP5369591B2 (ja) 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6241223B2 (ja) * 2013-03-13 2017-12-06 株式会社島津製作所 真空ポンプ
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
JP7052752B2 (ja) * 2019-01-30 2022-04-12 株式会社島津製作所 ターボ分子ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe

Also Published As

Publication number Publication date
FR2190184A5 (OSRAM) 1974-01-25
US3826588A (en) 1974-07-30
DE2229724A1 (de) 1974-01-10
GB1397179A (en) 1975-06-11
CH564692A5 (OSRAM) 1975-07-31

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Legal Events

Date Code Title Description
OD Request for examination
8230 Patent withdrawn