DE2215546A1 - Overlay-Transistor mit leitendem Halbleitergitter und Verfahren zu dessen Herstellung - Google Patents
Overlay-Transistor mit leitendem Halbleitergitter und Verfahren zu dessen HerstellungInfo
- Publication number
- DE2215546A1 DE2215546A1 DE19722215546 DE2215546A DE2215546A1 DE 2215546 A1 DE2215546 A1 DE 2215546A1 DE 19722215546 DE19722215546 DE 19722215546 DE 2215546 A DE2215546 A DE 2215546A DE 2215546 A1 DE2215546 A1 DE 2215546A1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor
- conductivity type
- region
- layer
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 54
- 238000000034 method Methods 0.000 title claims description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000000576 coating method Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes)
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes) consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13134271A | 1971-04-05 | 1971-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2215546A1 true DE2215546A1 (de) | 1972-10-12 |
Family
ID=22449028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722215546 Pending DE2215546A1 (de) | 1971-04-05 | 1972-03-30 | Overlay-Transistor mit leitendem Halbleitergitter und Verfahren zu dessen Herstellung |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS5222230B1 (enrdf_load_stackoverflow) |
| AU (1) | AU465586B2 (enrdf_load_stackoverflow) |
| BE (1) | BE781644A (enrdf_load_stackoverflow) |
| CA (1) | CA950130A (enrdf_load_stackoverflow) |
| DE (1) | DE2215546A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2132229B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1340461A (enrdf_load_stackoverflow) |
| IT (1) | IT950987B (enrdf_load_stackoverflow) |
| NL (1) | NL7204468A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2204889B1 (enrdf_load_stackoverflow) * | 1972-10-27 | 1975-03-28 | Sescosem | |
| GB2086135B (en) * | 1980-09-30 | 1985-08-21 | Nippon Telegraph & Telephone | Electrode and semiconductor device provided with the electrode |
-
1972
- 1972-02-24 CA CA135,538A patent/CA950130A/en not_active Expired
- 1972-03-29 GB GB1469672A patent/GB1340461A/en not_active Expired
- 1972-03-30 FR FR7211208A patent/FR2132229B1/fr not_active Expired
- 1972-03-30 DE DE19722215546 patent/DE2215546A1/de active Pending
- 1972-03-31 IT IT22727/72A patent/IT950987B/it active
- 1972-04-04 NL NL7204468A patent/NL7204468A/xx unknown
- 1972-04-04 BE BE781644A patent/BE781644A/xx unknown
- 1972-04-04 JP JP47033788A patent/JPS5222230B1/ja active Pending
- 1972-04-05 AU AU40781/72A patent/AU465586B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2132229A1 (enrdf_load_stackoverflow) | 1972-11-17 |
| BE781644A (fr) | 1972-07-31 |
| AU465586B2 (en) | 1973-10-11 |
| FR2132229B1 (enrdf_load_stackoverflow) | 1977-08-26 |
| IT950987B (it) | 1973-06-20 |
| AU4078172A (en) | 1973-10-11 |
| JPS5222230B1 (enrdf_load_stackoverflow) | 1977-06-16 |
| CA950130A (en) | 1974-06-25 |
| NL7204468A (enrdf_load_stackoverflow) | 1972-10-09 |
| GB1340461A (en) | 1973-12-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHN | Withdrawal |