DE2214590B2 - Verfahren und vorrichtung zum vakuumverdampfen von metallen - Google Patents
Verfahren und vorrichtung zum vakuumverdampfen von metallenInfo
- Publication number
- DE2214590B2 DE2214590B2 DE19722214590 DE2214590A DE2214590B2 DE 2214590 B2 DE2214590 B2 DE 2214590B2 DE 19722214590 DE19722214590 DE 19722214590 DE 2214590 A DE2214590 A DE 2214590A DE 2214590 B2 DE2214590 B2 DE 2214590B2
- Authority
- DE
- Germany
- Prior art keywords
- cathode
- evaporated
- arc
- magnetic field
- electromagnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 19
- 239000002184 metal Substances 0.000 title claims description 19
- 150000002739 metals Chemical class 0.000 title claims description 7
- 238000000034 method Methods 0.000 title claims description 7
- 238000007738 vacuum evaporation Methods 0.000 title claims description 6
- 238000001704 evaporation Methods 0.000 claims description 13
- 230000001154 acute effect Effects 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000010891 electric arc Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000005012 migration Effects 0.000 claims 2
- 238000013508 migration Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 description 10
- 239000012212 insulator Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 238000010025 steaming Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23708372A | 1972-03-22 | 1972-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2214590A1 DE2214590A1 (de) | 1973-10-04 |
| DE2214590B2 true DE2214590B2 (de) | 1976-07-01 |
Family
ID=22892269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722214590 Granted DE2214590B2 (de) | 1972-03-22 | 1972-03-24 | Verfahren und vorrichtung zum vakuumverdampfen von metallen |
Country Status (4)
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1040631A1 (ru) * | 1980-06-25 | 1983-09-07 | Предприятие П/Я В-8851 | Вакуумно-дуговое устройство |
| CH651072A5 (de) * | 1981-02-23 | 1985-08-30 | Sablev Leonid P | Selbstverzehrende katode fuer einen lichtbogenmetallverdampfer. |
| US4512867A (en) * | 1981-11-24 | 1985-04-23 | Andreev Anatoly A | Method and apparatus for controlling plasma generation in vapor deposition |
| US4448799A (en) * | 1983-04-21 | 1984-05-15 | Multi-Arc Vacuum Systems Inc. | Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems |
| US4559121A (en) * | 1983-09-12 | 1985-12-17 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization for permeable targets |
| GB2140040B (en) * | 1983-05-09 | 1986-09-17 | Vac Tec Syst | Evaporation arc stabilization |
| US4622452A (en) * | 1983-07-21 | 1986-11-11 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition electrode apparatus |
| US4559125A (en) * | 1983-09-12 | 1985-12-17 | Vac-Tec Systems, Inc. | Apparatus for evaporation arc stabilization during the initial clean-up of an arc target |
| US4448659A (en) * | 1983-09-12 | 1984-05-15 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization including initial target cleaning |
| US4556471A (en) * | 1983-10-14 | 1985-12-03 | Multi-Arc Vacuum Systems Inc. | Physical vapor deposition apparatus |
| GB2150947A (en) * | 1983-12-07 | 1985-07-10 | Vac Tec Syst | Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring |
| US4600489A (en) * | 1984-01-19 | 1986-07-15 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring |
| JPS61501328A (ja) * | 1984-03-02 | 1986-07-03 | リ−ジェンツ・オブ・ザ・ユニヴァ−シティ・オブ・ミネソタ | 制御された真空ア−クによる材料デポジション方法及び装置 |
| US4724058A (en) * | 1984-08-13 | 1988-02-09 | Vac-Tec Systems, Inc. | Method and apparatus for arc evaporating large area targets |
| US4839245A (en) * | 1985-09-30 | 1989-06-13 | Union Carbide Corporation | Zirconium nitride coated article and method for making same |
| US4895765A (en) * | 1985-09-30 | 1990-01-23 | Union Carbide Corporation | Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture |
| US4929322A (en) * | 1985-09-30 | 1990-05-29 | Union Carbide Corporation | Apparatus and process for arc vapor depositing a coating in an evacuated chamber |
| CH671238A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-11-06 | 1989-08-15 | Vni Instrument Inst | |
| US5215640A (en) * | 1987-02-03 | 1993-06-01 | Balzers Ag | Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices |
| ATE80184T1 (de) * | 1987-06-29 | 1992-09-15 | Hauzer Holding | Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden. |
| JPH0214851A (ja) * | 1988-06-30 | 1990-01-18 | Nippon Sheet Glass Co Ltd | 多色系熱線遮へい板の製造方法 |
| US4943325A (en) * | 1988-10-19 | 1990-07-24 | Black & Veatch, Engineers-Architects | Reflector assembly |
| US4936960A (en) * | 1989-01-03 | 1990-06-26 | Advanced Energy Industries, Inc. | Method and apparatus for recovery from low impedance condition during cathodic arc processes |
| BG49771A1 (en) * | 1989-07-13 | 1992-02-14 | T I Vakuumni Sistemi | Electric- bow evaparator |
| US5037522B1 (en) * | 1990-07-24 | 1996-07-02 | Vergason Technology Inc | Electric arc vapor deposition device |
| CA2065581C (en) | 1991-04-22 | 2002-03-12 | Andal Corp. | Plasma enhancement apparatus and method for physical vapor deposition |
| US5380421A (en) * | 1992-11-04 | 1995-01-10 | Gorokhovsky; Vladimir I. | Vacuum-arc plasma source |
| JPH08505437A (ja) * | 1992-12-30 | 1996-06-11 | ナウチノ−プロイズボドストヴェノーエ・プレドプリェティエ・“ノヴァテク” | 下地の真空プラズマ処理のための装置 |
| US5480527A (en) * | 1994-04-25 | 1996-01-02 | Vapor Technologies, Inc. | Rectangular vacuum-arc plasma source |
| WO1996031899A1 (en) * | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| US5656091A (en) * | 1995-11-02 | 1997-08-12 | Vacuum Plating Technology Corporation | Electric arc vapor deposition apparatus and method |
| EP0832309A4 (en) * | 1996-04-08 | 2001-06-20 | Ronald Christy | CATHODE ARC A CATHODE |
| DE19724996C1 (de) * | 1997-06-13 | 1998-09-03 | Fraunhofer Ges Forschung | Verfahren zum plasmaaktivierten Elektronenstrahlverdampfen und Einrichtung zur Durchführung des Verfahrens |
| US5972185A (en) * | 1997-08-30 | 1999-10-26 | United Technologies Corporation | Cathodic arc vapor deposition apparatus (annular cathode) |
| US6036828A (en) * | 1997-08-30 | 2000-03-14 | United Technologies Corporation | Apparatus for steering the arc in a cathodic arc coater |
| US6009829A (en) * | 1997-08-30 | 2000-01-04 | United Technologies Corporation | Apparatus for driving the arc in a cathodic arc coater |
| US5932078A (en) * | 1997-08-30 | 1999-08-03 | United Technologies Corporation | Cathodic arc vapor deposition apparatus |
| IL127236A0 (en) | 1997-11-26 | 1999-09-22 | Vapor Technologies Inc | Apparatus for sputtering or arc evaporation |
| US6103074A (en) * | 1998-02-14 | 2000-08-15 | Phygen, Inc. | Cathode arc vapor deposition method and apparatus |
| US5997705A (en) * | 1999-04-14 | 1999-12-07 | Vapor Technologies, Inc. | Rectangular filtered arc plasma source |
| US6936145B2 (en) * | 2002-02-28 | 2005-08-30 | Ionedge Corporation | Coating method and apparatus |
| US20040261311A1 (en) * | 2003-06-13 | 2004-12-30 | Mike Mattlage | Fishing hook |
| CH696828A5 (de) * | 2003-11-18 | 2007-12-14 | Oerlikon Trading Ag | Zündvorrichtung. |
| US7867366B1 (en) | 2004-04-28 | 2011-01-11 | Alameda Applied Sciences Corp. | Coaxial plasma arc vapor deposition apparatus and method |
| US8038858B1 (en) | 2004-04-28 | 2011-10-18 | Alameda Applied Sciences Corp | Coaxial plasma arc vapor deposition apparatus and method |
| RU2279938C2 (ru) * | 2004-09-06 | 2006-07-20 | Елена Евгеньевна Никитина | Способ транспортировки длинномерных объектов через вакуумную камеру и устройство для его осуществления |
| US7498587B2 (en) * | 2006-05-01 | 2009-03-03 | Vapor Technologies, Inc. | Bi-directional filtered arc plasma source |
| US20090065045A1 (en) * | 2007-09-10 | 2009-03-12 | Zenith Solar Ltd. | Solar electricity generation system |
| US9893223B2 (en) | 2010-11-16 | 2018-02-13 | Suncore Photovoltaics, Inc. | Solar electricity generation system |
| US9153422B2 (en) | 2011-08-02 | 2015-10-06 | Envaerospace, Inc. | Arc PVD plasma source and method of deposition of nanoimplanted coatings |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US507419A (en) * | 1893-10-24 | Electric heating and welding apparatus | ||
| US3555347A (en) * | 1967-07-10 | 1971-01-12 | Gen Electric | Self aligning electron beam welder |
| US3576438A (en) * | 1969-04-28 | 1971-04-27 | Bell Telephone Labor Inc | Focus monitor for electron microscope including an auxiliary electron gun and focusing lens |
-
1972
- 1972-03-22 US US00237083A patent/US3783231A/en not_active Expired - Lifetime
- 1972-03-24 DE DE19722214590 patent/DE2214590B2/de active Granted
- 1972-04-17 GB GB1770172A patent/GB1342560A/en not_active Expired
- 1972-05-05 FR FR7216279A patent/FR2182747B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3783231A (en) | 1974-01-01 |
| DE2214590A1 (de) | 1973-10-04 |
| GB1342560A (en) | 1974-01-03 |
| FR2182747A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-12-14 |
| FR2182747B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-06-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| EHJ | Ceased/non-payment of the annual fee |