DE2214234A1 - Subhmationsquelle - Google Patents
SubhmationsquelleInfo
- Publication number
- DE2214234A1 DE2214234A1 DE19722214234 DE2214234A DE2214234A1 DE 2214234 A1 DE2214234 A1 DE 2214234A1 DE 19722214234 DE19722214234 DE 19722214234 DE 2214234 A DE2214234 A DE 2214234A DE 2214234 A1 DE2214234 A1 DE 2214234A1
- Authority
- DE
- Germany
- Prior art keywords
- sublimation
- sublimable
- sublimation source
- sublimable material
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 65
- 238000000859 sublimation Methods 0.000 claims description 63
- 230000008022 sublimation Effects 0.000 claims description 63
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910001362 Ta alloys Inorganic materials 0.000 claims 1
- 229910001069 Ti alloy Inorganic materials 0.000 claims 1
- 229910001092 metal group alloy Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000003197 gene knockdown Methods 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 150000002483 hydrogen compounds Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/186—Getter supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB774571A GB1386251A (en) | 1971-03-24 | 1971-03-24 | Source of sublimable material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2214234A1 true DE2214234A1 (de) | 1972-10-12 |
Family
ID=9838915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722214234 Pending DE2214234A1 (de) | 1971-03-24 | 1972-03-23 | Subhmationsquelle |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3824039A (https=) |
| DE (1) | DE2214234A1 (https=) |
| FR (1) | FR2130600B1 (https=) |
| GB (1) | GB1386251A (https=) |
| IT (1) | IT950690B (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9057362B2 (en) * | 2011-09-28 | 2015-06-16 | The Boeing Company | Sublimation pump and method |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1712370A (en) * | 1926-04-27 | 1929-05-07 | Gen Electric | Electric discharge device |
| US2146374A (en) * | 1934-09-10 | 1939-02-07 | King Lab Inc | Getter |
| US2107945A (en) * | 1934-11-20 | 1938-02-08 | Gen Electric | Cathode structure |
| NL46111C (https=) * | 1935-10-12 | |||
| US2469626A (en) * | 1946-06-20 | 1949-05-10 | Philips Lab Inc | High vacuum getter |
| US2951170A (en) * | 1958-12-04 | 1960-08-30 | Machlett Lab Inc | Getter for electron tubes |
| US3258636A (en) * | 1961-09-01 | 1966-06-28 | Electron emitter with activator of sill cide, boride or carbide of solid solu- tion of barium and at least one other alkaline earth metal | |
| US3388290A (en) * | 1964-04-15 | 1968-06-11 | Wisconsin Alumni Res Found | Electron orbiting device including a flat,ribbon-type,thermionic filament |
| US3391303A (en) * | 1965-01-25 | 1968-07-02 | Lewis D. Hall | Electronic vacuum pump including a sputter electrode |
| US3324331A (en) * | 1966-01-28 | 1967-06-06 | Eg & G Inc | Gaseous reservoir and heater for hydrogen thyratrons |
| US3357634A (en) * | 1966-02-28 | 1967-12-12 | Nat Res Corp | Orbiting electron vacuum device and anode-getter apparatus therefor |
-
1971
- 1971-03-24 GB GB774571A patent/GB1386251A/en not_active Expired
-
1972
- 1972-03-22 IT IT22298/72A patent/IT950690B/it active
- 1972-03-23 FR FR7210198A patent/FR2130600B1/fr not_active Expired
- 1972-03-23 US US00237335A patent/US3824039A/en not_active Expired - Lifetime
- 1972-03-23 DE DE19722214234 patent/DE2214234A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3824039A (en) | 1974-07-16 |
| IT950690B (it) | 1973-06-20 |
| FR2130600A1 (https=) | 1972-11-03 |
| FR2130600B1 (https=) | 1976-08-06 |
| GB1386251A (en) | 1975-03-05 |
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