DE2204491C3 - Meßsteuerung einer Siliciumsäge über eine Hilfsspindel - Google Patents

Meßsteuerung einer Siliciumsäge über eine Hilfsspindel

Info

Publication number
DE2204491C3
DE2204491C3 DE19722204491 DE2204491A DE2204491C3 DE 2204491 C3 DE2204491 C3 DE 2204491C3 DE 19722204491 DE19722204491 DE 19722204491 DE 2204491 A DE2204491 A DE 2204491A DE 2204491 C3 DE2204491 C3 DE 2204491C3
Authority
DE
Germany
Prior art keywords
spindle
semiconductor rod
measuring
cutting
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19722204491
Other languages
German (de)
English (en)
Other versions
DE2204491A1 (de
DE2204491B2 (de
Inventor
Hans 8031 Groebenzell Stut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19722204491 priority Critical patent/DE2204491C3/de
Priority to CH1493872A priority patent/CH545177A/de
Priority to GB5830172A priority patent/GB1394707A/en
Priority to FR7302602A priority patent/FR2170679A5/fr
Publication of DE2204491A1 publication Critical patent/DE2204491A1/de
Publication of DE2204491B2 publication Critical patent/DE2204491B2/de
Application granted granted Critical
Publication of DE2204491C3 publication Critical patent/DE2204491C3/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/008—Accessories specially designed for sawing machines or sawing devices comprising computers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/10—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with provision for measuring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE19722204491 1972-01-31 1972-01-31 Meßsteuerung einer Siliciumsäge über eine Hilfsspindel Expired DE2204491C3 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19722204491 DE2204491C3 (de) 1972-01-31 1972-01-31 Meßsteuerung einer Siliciumsäge über eine Hilfsspindel
CH1493872A CH545177A (de) 1972-01-31 1972-10-12 Vorrichtung zum Schneiden von Halbleiterstäben, insbesondere Siliciumstäben, in Scheiben
GB5830172A GB1394707A (en) 1972-01-31 1972-12-18 Rod-cutting devices
FR7302602A FR2170679A5 (enrdf_load_stackoverflow) 1972-01-31 1973-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722204491 DE2204491C3 (de) 1972-01-31 1972-01-31 Meßsteuerung einer Siliciumsäge über eine Hilfsspindel

Publications (3)

Publication Number Publication Date
DE2204491A1 DE2204491A1 (de) 1973-08-09
DE2204491B2 DE2204491B2 (de) 1980-06-19
DE2204491C3 true DE2204491C3 (de) 1981-02-26

Family

ID=5834584

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722204491 Expired DE2204491C3 (de) 1972-01-31 1972-01-31 Meßsteuerung einer Siliciumsäge über eine Hilfsspindel

Country Status (4)

Country Link
CH (1) CH545177A (enrdf_load_stackoverflow)
DE (1) DE2204491C3 (enrdf_load_stackoverflow)
FR (1) FR2170679A5 (enrdf_load_stackoverflow)
GB (1) GB1394707A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949700A (en) * 1987-12-17 1990-08-21 Tokyou Seimitsu Co., Ltd. Ingot support device in slicing apparatus
JPH0767692B2 (ja) * 1989-09-07 1995-07-26 株式会社東京精密 スライシングマシンの切断方法
JPH09508326A (ja) * 1994-02-07 1997-08-26 ストルエルス アクチェ セルスカプ 試料から物質構造サンプルを切断するための装置
CN109482967B (zh) * 2018-11-26 2023-09-26 安徽昊方机电股份有限公司 一种锯床料棒的延长夹具

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3039235A (en) * 1961-01-31 1962-06-19 Hamco Mach & Elect Co Cutting apparatus
FR1294795A (fr) * 1961-04-17 1962-06-01 Landis Gendron S A Dispositif d'avance très précis et son application à une machine à scier les monocristaux de silicium
DE1217840B (de) * 1961-07-24 1966-05-26 Telefunken Patent Innenlochsaegevorrichtung
US3577861A (en) * 1969-04-07 1971-05-11 Kayex Corp Transfer device for cutting apparatus

Also Published As

Publication number Publication date
CH545177A (de) 1973-12-15
DE2204491A1 (de) 1973-08-09
FR2170679A5 (enrdf_load_stackoverflow) 1973-09-14
DE2204491B2 (de) 1980-06-19
GB1394707A (en) 1975-05-21

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Legal Events

Date Code Title Description
OD Request for examination
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee