DE2151030C2 - Vorrichtung zum Sublimieren - Google Patents
Vorrichtung zum SublimierenInfo
- Publication number
- DE2151030C2 DE2151030C2 DE2151030A DE2151030A DE2151030C2 DE 2151030 C2 DE2151030 C2 DE 2151030C2 DE 2151030 A DE2151030 A DE 2151030A DE 2151030 A DE2151030 A DE 2151030A DE 2151030 C2 DE2151030 C2 DE 2151030C2
- Authority
- DE
- Germany
- Prior art keywords
- hollow body
- heat
- radiation source
- substance
- heat radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/02—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US8198270A | 1970-10-19 | 1970-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2151030A1 DE2151030A1 (de) | 1972-04-20 |
| DE2151030C2 true DE2151030C2 (de) | 1982-09-23 |
Family
ID=22167643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2151030A Expired DE2151030C2 (de) | 1970-10-19 | 1971-10-13 | Vorrichtung zum Sublimieren |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3662154A (enExample) |
| JP (1) | JPS5615922B1 (enExample) |
| CA (1) | CA930030A (enExample) |
| DE (1) | DE2151030C2 (enExample) |
| FR (1) | FR2111480A5 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3530106A1 (de) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen |
| US5156815A (en) * | 1988-09-08 | 1992-10-20 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
| US5080870A (en) * | 1988-09-08 | 1992-01-14 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
| US5034604A (en) * | 1989-08-29 | 1991-07-23 | Board Of Regents, The University Of Texas System | Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3241740A (en) * | 1963-10-16 | 1966-03-22 | Cons Vacuum Corp | Vacuum pumping methods and apparatus |
| US3427432A (en) * | 1966-06-10 | 1969-02-11 | Granville Phillips Co | Sublimation device |
-
1970
- 1970-10-19 US US81982A patent/US3662154A/en not_active Expired - Lifetime
-
1971
- 1971-10-13 DE DE2151030A patent/DE2151030C2/de not_active Expired
- 1971-10-14 CA CA125138A patent/CA930030A/en not_active Expired
- 1971-10-18 JP JP8237071A patent/JPS5615922B1/ja active Pending
- 1971-10-18 FR FR7137284A patent/FR2111480A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA930030A (en) | 1973-07-10 |
| JPS5615922B1 (enExample) | 1981-04-13 |
| US3662154A (en) | 1972-05-09 |
| FR2111480A5 (enExample) | 1972-06-02 |
| DE2151030A1 (de) | 1972-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OGA | New person/name/address of the applicant | ||
| OD | Request for examination | ||
| D2 | Grant after examination |