DE2151030C2 - Vorrichtung zum Sublimieren - Google Patents

Vorrichtung zum Sublimieren

Info

Publication number
DE2151030C2
DE2151030C2 DE2151030A DE2151030A DE2151030C2 DE 2151030 C2 DE2151030 C2 DE 2151030C2 DE 2151030 A DE2151030 A DE 2151030A DE 2151030 A DE2151030 A DE 2151030A DE 2151030 C2 DE2151030 C2 DE 2151030C2
Authority
DE
Germany
Prior art keywords
hollow body
heat
radiation source
substance
heat radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2151030A
Other languages
German (de)
English (en)
Other versions
DE2151030A1 (de
Inventor
David James Palo Alto Calif. Harra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of DE2151030A1 publication Critical patent/DE2151030A1/de
Application granted granted Critical
Publication of DE2151030C2 publication Critical patent/DE2151030C2/de
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/02Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE2151030A 1970-10-19 1971-10-13 Vorrichtung zum Sublimieren Expired DE2151030C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8198270A 1970-10-19 1970-10-19

Publications (2)

Publication Number Publication Date
DE2151030A1 DE2151030A1 (de) 1972-04-20
DE2151030C2 true DE2151030C2 (de) 1982-09-23

Family

ID=22167643

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2151030A Expired DE2151030C2 (de) 1970-10-19 1971-10-13 Vorrichtung zum Sublimieren

Country Status (5)

Country Link
US (1) US3662154A (enExample)
JP (1) JPS5615922B1 (enExample)
CA (1) CA930030A (enExample)
DE (1) DE2151030C2 (enExample)
FR (1) FR2111480A5 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
US5156815A (en) * 1988-09-08 1992-10-20 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
US5080870A (en) * 1988-09-08 1992-01-14 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
US5034604A (en) * 1989-08-29 1991-07-23 Board Of Regents, The University Of Texas System Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3241740A (en) * 1963-10-16 1966-03-22 Cons Vacuum Corp Vacuum pumping methods and apparatus
US3427432A (en) * 1966-06-10 1969-02-11 Granville Phillips Co Sublimation device

Also Published As

Publication number Publication date
CA930030A (en) 1973-07-10
JPS5615922B1 (enExample) 1981-04-13
US3662154A (en) 1972-05-09
FR2111480A5 (enExample) 1972-06-02
DE2151030A1 (de) 1972-04-20

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Legal Events

Date Code Title Description
OGA New person/name/address of the applicant
OD Request for examination
D2 Grant after examination