DE2137510C3 - Elektronenoptische Anordnung mit einer Energieselektionsanordnung - Google Patents

Elektronenoptische Anordnung mit einer Energieselektionsanordnung

Info

Publication number
DE2137510C3
DE2137510C3 DE19712137510 DE2137510A DE2137510C3 DE 2137510 C3 DE2137510 C3 DE 2137510C3 DE 19712137510 DE19712137510 DE 19712137510 DE 2137510 A DE2137510 A DE 2137510A DE 2137510 C3 DE2137510 C3 DE 2137510C3
Authority
DE
Germany
Prior art keywords
arrangement
lens
energy selection
arrangement according
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19712137510
Other languages
German (de)
English (en)
Other versions
DE2137510A1 (de
DE2137510B2 (de
Inventor
Willem Hendrik Jan Eindhoven Andersen (Niederlande)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2137510A1 publication Critical patent/DE2137510A1/de
Publication of DE2137510B2 publication Critical patent/DE2137510B2/de
Application granted granted Critical
Publication of DE2137510C3 publication Critical patent/DE2137510C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Arrangements for removing or diverting unwanted particles, e.g. for negative ions or fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Arrangements for removing or diverting unwanted particles, e.g. for negative ions or fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
DE19712137510 1970-08-21 1971-07-27 Elektronenoptische Anordnung mit einer Energieselektionsanordnung Expired DE2137510C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012388A NL7012388A (https=) 1970-08-21 1970-08-21

Publications (3)

Publication Number Publication Date
DE2137510A1 DE2137510A1 (de) 1972-02-24
DE2137510B2 DE2137510B2 (de) 1978-03-16
DE2137510C3 true DE2137510C3 (de) 1978-11-09

Family

ID=19810828

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712137510 Expired DE2137510C3 (de) 1970-08-21 1971-07-27 Elektronenoptische Anordnung mit einer Energieselektionsanordnung

Country Status (5)

Country Link
CA (1) CA934075A (https=)
DE (1) DE2137510C3 (https=)
FR (1) FR2104604A5 (https=)
GB (1) GB1364930A (https=)
NL (1) NL7012388A (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7404363A (nl) * 1974-04-01 1975-10-03 Philips Nv Elektronenmikroskoop met energieanalysator.
FR2584234B1 (fr) * 1985-06-28 1988-12-09 Cameca Testeur de circuit integre a faisceau d'electrons
EP0555911B1 (en) * 1992-02-12 1999-01-07 Koninklijke Philips Electronics N.V. Method of reducing a spatial spread within an electron beam, and an electron beam apparatus suitable for carrying out such a method
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JP4527289B2 (ja) * 1998-12-17 2010-08-18 エフ イー アイ カンパニ オージェ電子の検出を含む粒子光学装置
JP3757371B2 (ja) * 1999-07-05 2006-03-22 日本電子株式会社 エネルギーフィルタ及びそれを用いた電子顕微鏡
US6410924B1 (en) * 1999-11-16 2002-06-25 Schlumberger Technologies, Inc. Energy filtered focused ion beam column
EP1521289B1 (en) * 2003-09-11 2008-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Single stage charged particle beam energy width reduction system for charged particle beam system
EP1783811A3 (en) 2005-11-02 2008-02-27 FEI Company Corrector for the correction of chromatic aberrations in a particle-optical apparatus
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
EP2166557A1 (en) 2008-09-22 2010-03-24 FEI Company Method for correcting distortions in a particle-optical apparatus
EP2325862A1 (en) 2009-11-18 2011-05-25 Fei Company Corrector for axial aberrations of a particle-optical lens
EP2511936B1 (en) 2011-04-13 2013-10-02 Fei Company Distortion free stigmation of a TEM

Also Published As

Publication number Publication date
GB1364930A (en) 1974-08-29
DE2137510A1 (de) 1972-02-24
DE2137510B2 (de) 1978-03-16
CA934075A (en) 1973-09-18
NL7012388A (https=) 1972-02-23
FR2104604A5 (https=) 1972-04-14

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee