NL7012388A - - Google Patents
Info
- Publication number
- NL7012388A NL7012388A NL7012388A NL7012388A NL7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/84—Arrangements for removing or diverting unwanted particles, e.g. for negative ions or fringing electrons; Arrangements for velocity or mass selection
- H01J29/845—Arrangements for removing or diverting unwanted particles, e.g. for negative ions or fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7012388A NL7012388A (https=) | 1970-08-21 | 1970-08-21 | |
| DE19712137510 DE2137510C3 (de) | 1970-08-21 | 1971-07-27 | Elektronenoptische Anordnung mit einer Energieselektionsanordnung |
| GB3875371A GB1364930A (en) | 1970-08-21 | 1971-08-18 | Microscope employing a beam of chargedparticles |
| CA120799A CA934075A (en) | 1970-08-21 | 1971-08-18 | Electron-optical device comprising an energy-selection filter |
| FR7130437A FR2104604A5 (https=) | 1970-08-21 | 1971-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7012388A NL7012388A (https=) | 1970-08-21 | 1970-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7012388A true NL7012388A (https=) | 1972-02-23 |
Family
ID=19810828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7012388A NL7012388A (https=) | 1970-08-21 | 1970-08-21 |
Country Status (5)
| Country | Link |
|---|---|
| CA (1) | CA934075A (https=) |
| DE (1) | DE2137510C3 (https=) |
| FR (1) | FR2104604A5 (https=) |
| GB (1) | GB1364930A (https=) |
| NL (1) | NL7012388A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0555911A1 (en) * | 1992-02-12 | 1993-08-18 | Koninklijke Philips Electronics N.V. | Method of reducing a spatial spread within an electron beam, and an electron beam apparatus suitable for carrying out such a method |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7404363A (nl) * | 1974-04-01 | 1975-10-03 | Philips Nv | Elektronenmikroskoop met energieanalysator. |
| FR2584234B1 (fr) * | 1985-06-28 | 1988-12-09 | Cameca | Testeur de circuit integre a faisceau d'electrons |
| US6184524B1 (en) | 1996-08-07 | 2001-02-06 | Gatan, Inc. | Automated set up of an energy filtering transmission electron microscope |
| US5798524A (en) * | 1996-08-07 | 1998-08-25 | Gatan, Inc. | Automated adjustment of an energy filtering transmission electron microscope |
| JP4527289B2 (ja) * | 1998-12-17 | 2010-08-18 | エフ イー アイ カンパニ | オージェ電子の検出を含む粒子光学装置 |
| JP3757371B2 (ja) * | 1999-07-05 | 2006-03-22 | 日本電子株式会社 | エネルギーフィルタ及びそれを用いた電子顕微鏡 |
| US6410924B1 (en) * | 1999-11-16 | 2002-06-25 | Schlumberger Technologies, Inc. | Energy filtered focused ion beam column |
| EP1521289B1 (en) * | 2003-09-11 | 2008-06-25 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Single stage charged particle beam energy width reduction system for charged particle beam system |
| EP1783811A3 (en) | 2005-11-02 | 2008-02-27 | FEI Company | Corrector for the correction of chromatic aberrations in a particle-optical apparatus |
| GB0700754D0 (en) * | 2007-01-15 | 2007-02-21 | Oxford Instr Analytical Ltd | Charged particle analyser and method |
| EP2166557A1 (en) | 2008-09-22 | 2010-03-24 | FEI Company | Method for correcting distortions in a particle-optical apparatus |
| EP2325862A1 (en) | 2009-11-18 | 2011-05-25 | Fei Company | Corrector for axial aberrations of a particle-optical lens |
| EP2511936B1 (en) | 2011-04-13 | 2013-10-02 | Fei Company | Distortion free stigmation of a TEM |
-
1970
- 1970-08-21 NL NL7012388A patent/NL7012388A/xx unknown
-
1971
- 1971-07-27 DE DE19712137510 patent/DE2137510C3/de not_active Expired
- 1971-08-18 CA CA120799A patent/CA934075A/en not_active Expired
- 1971-08-18 GB GB3875371A patent/GB1364930A/en not_active Expired
- 1971-08-20 FR FR7130437A patent/FR2104604A5/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0555911A1 (en) * | 1992-02-12 | 1993-08-18 | Koninklijke Philips Electronics N.V. | Method of reducing a spatial spread within an electron beam, and an electron beam apparatus suitable for carrying out such a method |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2137510C3 (de) | 1978-11-09 |
| GB1364930A (en) | 1974-08-29 |
| DE2137510A1 (de) | 1972-02-24 |
| DE2137510B2 (de) | 1978-03-16 |
| CA934075A (en) | 1973-09-18 |
| FR2104604A5 (https=) | 1972-04-14 |