DE2125105A1 - - Google Patents

Info

Publication number
DE2125105A1
DE2125105A1 DE19712125105 DE2125105A DE2125105A1 DE 2125105 A1 DE2125105 A1 DE 2125105A1 DE 19712125105 DE19712125105 DE 19712125105 DE 2125105 A DE2125105 A DE 2125105A DE 2125105 A1 DE2125105 A1 DE 2125105A1
Authority
DE
Germany
Prior art keywords
component
drive
axis
support body
object table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712125105
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AEI
Original Assignee
AEI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AEI filed Critical AEI
Publication of DE2125105A1 publication Critical patent/DE2125105A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
DE19712125105 1970-05-22 1971-05-21 Pending DE2125105A1 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2491670 1970-05-22

Publications (1)

Publication Number Publication Date
DE2125105A1 true DE2125105A1 (OSRAM) 1971-12-02

Family

ID=10219287

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712125105 Pending DE2125105A1 (OSRAM) 1970-05-22 1971-05-21

Country Status (5)

Country Link
US (1) US3714423A (OSRAM)
DE (1) DE2125105A1 (OSRAM)
FR (1) FR2093572A5 (OSRAM)
GB (1) GB1320346A (OSRAM)
NL (1) NL7106972A (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4170737A (en) 1978-07-06 1979-10-09 Spetsialnoe Konstruktorskoe Bjuro Biologicheskogo Priborotroenia Akademii Nauk SSSR Top-entry transmission electron microscope
WO1981003580A1 (fr) * 1980-06-09 1981-12-10 Burevestnik Chambre d'echantillons pour instrument de sondage electronique
US6891170B1 (en) 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US6967335B1 (en) 2002-06-17 2005-11-22 Zyvex Corporation Manipulation system for manipulating a sample under study with a microscope
JP2007506981A (ja) * 2003-09-23 2007-03-22 ザイベックス コーポレーション Ｆｉｂで調製した試料を把持する素子を使用した顕微鏡検査のための方法、システム、および装置
TW200531420A (en) 2004-02-20 2005-09-16 Zyvex Corp Positioning device for microscopic motion
US7319336B2 (en) * 2004-02-23 2008-01-15 Zyvex Instruments, Llc Charged particle beam device probe operation
US7326293B2 (en) * 2004-03-26 2008-02-05 Zyvex Labs, Llc Patterned atomic layer epitaxy
US7786442B2 (en) * 2004-06-18 2010-08-31 General Electric Company Method and apparatus for ion source positioning and adjustment
KR102083193B1 (ko) * 2013-11-25 2020-03-02 삼성전자주식회사 로봇 청소기

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1226228B (de) * 1959-07-24 1966-10-06 Max Planck Gesellschaft Bewegbarer Praeparattisch fuer einen Korpus-kularstrahlapparat, insbesondere Elektronen-mikroskop oder Elektronenbeugungsgeraet
GB1188026A (en) * 1966-04-06 1970-04-15 Jeol Ltd X-Ray Diffraction Apparatus.
GB1219647A (en) * 1967-06-19 1971-01-20 Siemens Ag Arrangement for use in a fully focussing x-ray spectro meter

Also Published As

Publication number Publication date
NL7106972A (OSRAM) 1971-11-24
US3714423A (en) 1973-01-30
GB1320346A (en) 1973-06-13
FR2093572A5 (OSRAM) 1972-01-28

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