DE2108359A1 - Vorrichtung zur Erzeugung eines gebündelten Strahlen geladener Teilchen, insbesondere für Elektronenspektrometer - Google Patents
Vorrichtung zur Erzeugung eines gebündelten Strahlen geladener Teilchen, insbesondere für ElektronenspektrometerInfo
- Publication number
- DE2108359A1 DE2108359A1 DE19712108359 DE2108359A DE2108359A1 DE 2108359 A1 DE2108359 A1 DE 2108359A1 DE 19712108359 DE19712108359 DE 19712108359 DE 2108359 A DE2108359 A DE 2108359A DE 2108359 A1 DE2108359 A1 DE 2108359A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- acceleration
- electron
- energy
- deceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims description 61
- 230000001133 acceleration Effects 0.000 claims description 27
- 239000000126 substance Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000035699 permeability Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 55
- 238000010894 electron beam technology Methods 0.000 description 15
- 239000001307 helium Substances 0.000 description 13
- 229910052734 helium Inorganic materials 0.000 description 13
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 13
- 238000009826 distribution Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000001941 electron spectroscopy Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000004304 visual acuity Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 241000947840 Alteromonadales Species 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001803 electron scattering Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3007570A | 1970-04-20 | 1970-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2108359A1 true DE2108359A1 (de) | 1971-11-11 |
Family
ID=21852369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712108359 Pending DE2108359A1 (de) | 1970-04-20 | 1971-02-22 | Vorrichtung zur Erzeugung eines gebündelten Strahlen geladener Teilchen, insbesondere für Elektronenspektrometer |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3670172A (enExample) |
| CA (1) | CA929284A (enExample) |
| DE (1) | DE2108359A1 (enExample) |
| FR (1) | FR2092363A5 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3836775A (en) * | 1973-03-08 | 1974-09-17 | Princeton Applied Res Corp | Electron impact spectrometer of high sensitivity and large helium tolerance and process of characterizing gaseous atoms and molecules by the energy loss spectrum |
| US4090076A (en) * | 1976-07-16 | 1978-05-16 | International Business Machines Corporation | High resolution electron energy device and method |
| US5187327A (en) * | 1989-09-29 | 1993-02-16 | Mitsui Kinzoku Kogyo Kabushiki Kaisha | Superconducting magnetic shield |
| WO1993002468A1 (fr) * | 1991-07-16 | 1993-02-04 | Seiko Epson Corporation | Appareil de deposition en phase vapeur par procede chimique, procede de formation de films semi-conducteurs et procede de production de dispositifs semi-conducteurs a mince film |
| GB2331867A (en) | 1997-11-28 | 1999-06-02 | Asea Brown Boveri | Power cable termination |
| JPH11176819A (ja) * | 1997-12-05 | 1999-07-02 | Mitsubishi Electric Corp | 高誘電率薄膜形成用ｃｖｄ溶液原料のモニター方法およびその装置 |
| DE10042663A1 (de) * | 2000-08-31 | 2002-03-14 | Deutsche Telekom Ag | Eletronenspektrometer |
| WO2003044821A1 (en) * | 2001-11-21 | 2003-05-30 | Hitachi High-Technologies Corporation | Sample imaging method and charged particle beam system |
| EP1455378B1 (en) * | 2001-11-21 | 2013-08-14 | Hitachi High-Technologies Corporation | Sample imaging method and charged particle beam system |
| US7361894B2 (en) * | 2002-10-22 | 2008-04-22 | Hitachi High-Technologies Corporation | Method of forming a sample image and charged particle beam apparatus |
| US7295015B2 (en) * | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
| US7030619B2 (en) * | 2004-02-19 | 2006-04-18 | Brooks Automation, Inc. | Ionization gauge |
| JP5097632B2 (ja) * | 2008-07-11 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | プラズマエッチング処理装置 |
-
1970
- 1970-04-20 US US30075A patent/US3670172A/en not_active Expired - Lifetime
-
1971
- 1971-01-11 CA CA102724A patent/CA929284A/en not_active Expired
- 1971-02-09 FR FR7104292A patent/FR2092363A5/fr not_active Expired
- 1971-02-22 DE DE19712108359 patent/DE2108359A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2092363A5 (enExample) | 1972-01-21 |
| CA929284A (en) | 1973-06-26 |
| US3670172A (en) | 1972-06-13 |
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