CA929284A - Charged particle generating and utilizing - Google Patents

Charged particle generating and utilizing

Info

Publication number
CA929284A
CA929284A CA102724A CA102724A CA929284A CA 929284 A CA929284 A CA 929284A CA 102724 A CA102724 A CA 102724A CA 102724 A CA102724 A CA 102724A CA 929284 A CA929284 A CA 929284A
Authority
CA
Canada
Prior art keywords
utilizing
charged particle
particle generating
generating
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA102724A
Other languages
English (en)
Inventor
E. Golden David
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADVANCED RESEARCH INSTRUMENT SYSTEMS
Original Assignee
ADVANCED RESEARCH INSTRUMENT SYSTEMS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADVANCED RESEARCH INSTRUMENT SYSTEMS filed Critical ADVANCED RESEARCH INSTRUMENT SYSTEMS
Application granted granted Critical
Publication of CA929284A publication Critical patent/CA929284A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA102724A 1970-04-20 1971-01-11 Charged particle generating and utilizing Expired CA929284A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US3007570A 1970-04-20 1970-04-20

Publications (1)

Publication Number Publication Date
CA929284A true CA929284A (en) 1973-06-26

Family

ID=21852369

Family Applications (1)

Application Number Title Priority Date Filing Date
CA102724A Expired CA929284A (en) 1970-04-20 1971-01-11 Charged particle generating and utilizing

Country Status (4)

Country Link
US (1) US3670172A (enExample)
CA (1) CA929284A (enExample)
DE (1) DE2108359A1 (enExample)
FR (1) FR2092363A5 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836775A (en) * 1973-03-08 1974-09-17 Princeton Applied Res Corp Electron impact spectrometer of high sensitivity and large helium tolerance and process of characterizing gaseous atoms and molecules by the energy loss spectrum
US4090076A (en) * 1976-07-16 1978-05-16 International Business Machines Corporation High resolution electron energy device and method
US5187327A (en) * 1989-09-29 1993-02-16 Mitsui Kinzoku Kogyo Kabushiki Kaisha Superconducting magnetic shield
WO1993002468A1 (fr) * 1991-07-16 1993-02-04 Seiko Epson Corporation Appareil de deposition en phase vapeur par procede chimique, procede de formation de films semi-conducteurs et procede de production de dispositifs semi-conducteurs a mince film
GB2331867A (en) 1997-11-28 1999-06-02 Asea Brown Boveri Power cable termination
JPH11176819A (ja) * 1997-12-05 1999-07-02 Mitsubishi Electric Corp 高誘電率薄膜形成用ｃｖｄ溶液原料のモニター方法およびその装置
DE10042663A1 (de) * 2000-08-31 2002-03-14 Deutsche Telekom Ag Eletronenspektrometer
WO2003044821A1 (en) * 2001-11-21 2003-05-30 Hitachi High-Technologies Corporation Sample imaging method and charged particle beam system
EP1455378B1 (en) * 2001-11-21 2013-08-14 Hitachi High-Technologies Corporation Sample imaging method and charged particle beam system
US7361894B2 (en) * 2002-10-22 2008-04-22 Hitachi High-Technologies Corporation Method of forming a sample image and charged particle beam apparatus
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
JP5097632B2 (ja) * 2008-07-11 2012-12-12 株式会社日立ハイテクノロジーズ プラズマエッチング処理装置

Also Published As

Publication number Publication date
FR2092363A5 (enExample) 1972-01-21
DE2108359A1 (de) 1971-11-11
US3670172A (en) 1972-06-13

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