FR2092363A5 - - Google Patents
Info
- Publication number
- FR2092363A5 FR2092363A5 FR7104292A FR7104292A FR2092363A5 FR 2092363 A5 FR2092363 A5 FR 2092363A5 FR 7104292 A FR7104292 A FR 7104292A FR 7104292 A FR7104292 A FR 7104292A FR 2092363 A5 FR2092363 A5 FR 2092363A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US3007570A | 1970-04-20 | 1970-04-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2092363A5 true FR2092363A5 (fr) | 1972-01-21 |
Family
ID=21852369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7104292A Expired FR2092363A5 (fr) | 1970-04-20 | 1971-02-09 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3670172A (fr) |
CA (1) | CA929284A (fr) |
DE (1) | DE2108359A1 (fr) |
FR (1) | FR2092363A5 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3836775A (en) * | 1973-03-08 | 1974-09-17 | Princeton Applied Res Corp | Electron impact spectrometer of high sensitivity and large helium tolerance and process of characterizing gaseous atoms and molecules by the energy loss spectrum |
US4090076A (en) * | 1976-07-16 | 1978-05-16 | International Business Machines Corporation | High resolution electron energy device and method |
US5187327A (en) * | 1989-09-29 | 1993-02-16 | Mitsui Kinzoku Kogyo Kabushiki Kaisha | Superconducting magnetic shield |
WO1993002468A1 (fr) * | 1991-07-16 | 1993-02-04 | Seiko Epson Corporation | Appareil de deposition en phase vapeur par procede chimique, procede de formation de films semi-conducteurs et procede de production de dispositifs semi-conducteurs a mince film |
GB2331867A (en) | 1997-11-28 | 1999-06-02 | Asea Brown Boveri | Power cable termination |
JPH11176819A (ja) * | 1997-12-05 | 1999-07-02 | Mitsubishi Electric Corp | 高誘電率薄膜形成用cvd溶液原料のモニター方法およびその装置 |
DE10042663A1 (de) * | 2000-08-31 | 2002-03-14 | Deutsche Telekom Ag | Eletronenspektrometer |
US7034296B2 (en) * | 2001-11-21 | 2006-04-25 | Hitachi High-Technologies Corporation | Method of forming a sample image and charged particle beam apparatus |
US7361894B2 (en) * | 2002-10-22 | 2008-04-22 | Hitachi High-Technologies Corporation | Method of forming a sample image and charged particle beam apparatus |
WO2003044821A1 (fr) * | 2001-11-21 | 2003-05-30 | Hitachi High-Technologies Corporation | Procede d'imagerie d'echantillon et systeme de faisceau de particules chargees |
US7295015B2 (en) * | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
US7030619B2 (en) * | 2004-02-19 | 2006-04-18 | Brooks Automation, Inc. | Ionization gauge |
JP5097632B2 (ja) * | 2008-07-11 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | プラズマエッチング処理装置 |
-
1970
- 1970-04-20 US US30075A patent/US3670172A/en not_active Expired - Lifetime
-
1971
- 1971-01-11 CA CA102724A patent/CA929284A/en not_active Expired
- 1971-02-09 FR FR7104292A patent/FR2092363A5/fr not_active Expired
- 1971-02-22 DE DE19712108359 patent/DE2108359A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
CA929284A (en) | 1973-06-26 |
US3670172A (en) | 1972-06-13 |
DE2108359A1 (de) | 1971-11-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |