DE69607543T2 - Detektoren für geladene Teilchen sowie diese verwendende Massenspektrometer - Google Patents

Detektoren für geladene Teilchen sowie diese verwendende Massenspektrometer

Info

Publication number
DE69607543T2
DE69607543T2 DE69607543T DE69607543T DE69607543T2 DE 69607543 T2 DE69607543 T2 DE 69607543T2 DE 69607543 T DE69607543 T DE 69607543T DE 69607543 T DE69607543 T DE 69607543T DE 69607543 T2 DE69607543 T2 DE 69607543T2
Authority
DE
Germany
Prior art keywords
charged particle
mass spectrometers
particle detectors
charged
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69607543T
Other languages
English (en)
Other versions
DE69607543D1 (de
Inventor
Patrick James Turner
Raymond Clive Haines
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micromass UK Ltd
Original Assignee
Micromass UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micromass UK Ltd filed Critical Micromass UK Ltd
Application granted granted Critical
Publication of DE69607543D1 publication Critical patent/DE69607543D1/de
Publication of DE69607543T2 publication Critical patent/DE69607543T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
DE69607543T 1995-09-07 1996-09-05 Detektoren für geladene Teilchen sowie diese verwendende Massenspektrometer Expired - Lifetime DE69607543T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9518258.0A GB9518258D0 (en) 1995-09-07 1995-09-07 Charged-Particle detectors and mass spectrometers employing the same

Publications (2)

Publication Number Publication Date
DE69607543D1 DE69607543D1 (de) 2000-05-11
DE69607543T2 true DE69607543T2 (de) 2000-12-07

Family

ID=10780334

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69607543T Expired - Lifetime DE69607543T2 (de) 1995-09-07 1996-09-05 Detektoren für geladene Teilchen sowie diese verwendende Massenspektrometer

Country Status (7)

Country Link
US (2) US5757012A (de)
EP (1) EP0762472B1 (de)
JP (1) JP2886508B2 (de)
AT (1) ATE191585T1 (de)
CA (1) CA2184963C (de)
DE (1) DE69607543T2 (de)
GB (1) GB9518258D0 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005045463A1 (de) * 2005-09-22 2007-04-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messanordnung zur Erfassung von Umgebungsparametern und von Betriebsparametern für ein unter Vakuumbedingungen im Weltraum oder im Labor arbeitendes Gerät
DE102009048120B4 (de) * 2009-10-02 2013-08-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Erfassen von Umgebungs- und Betriebsparametern in Plasmen

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9518258D0 (en) * 1995-09-07 1995-11-08 Micromass Ltd Charged-Particle detectors and mass spectrometers employing the same
US6480278B1 (en) * 1997-12-16 2002-11-12 Stephen Douglas Fuerstenau Method and apparatus for detection of charge on ions and particles
DE19838553B4 (de) * 1998-08-25 2010-08-12 Thermo Fisher Scientific (Bremen) Gmbh Faraday-Auffänger zur Messung von Ionenströmen in Massenspektrometern
AU766473B2 (en) * 1998-10-06 2003-10-16 University Of Washington Charged particle beam detection system
US6723998B2 (en) * 2000-09-15 2004-04-20 Varian Semiconductor Equipment Associates, Inc. Faraday system for ion implanters
EP1405055A4 (de) * 2001-05-25 2007-05-23 Analytica Of Branford Inc Mehrfachdetektionssysteme
US6815689B1 (en) * 2001-12-12 2004-11-09 Southwest Research Institute Mass spectrometry with enhanced particle flux range
DE10258118A1 (de) * 2002-12-06 2004-07-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Messen und zur Bestimmung von Ladungsträgerströmen und davon ableitbaren Größen in ionen- und plasmagestützten Prozessen
DE10329383B4 (de) * 2003-06-30 2006-07-27 Advanced Micro Devices, Inc., Sunnyvale Ionenstrahldetektor für Ionenimplantationsanlagen, Faraday-Behälter dafür und Verfahren zur Steuerung der Eigenschaften eines Ionenstrahls mittels des Ionenstrahldetektors
DE10329388B4 (de) * 2003-06-30 2006-12-28 Advanced Micro Devices, Inc., Sunnyvale Faraday-Anordnung als Ionenstrahlmessvorrichtung für eine Ionenimplantationsanlage und Verfahren zu deren Betrieb
US7338683B2 (en) * 2004-05-10 2008-03-04 Superpower, Inc. Superconductor fabrication processes
KR101122305B1 (ko) 2007-04-16 2012-03-21 가부시키가이샤 아루박 질량 분석계의 제어 방법 및 질량 분석계
CN101680856A (zh) 2007-05-15 2010-03-24 株式会社爱发科 质谱分析单元
CN108615666B (zh) * 2016-12-09 2024-04-19 上海凯世通半导体股份有限公司 束流检测装置
CN112558138B (zh) * 2020-12-07 2022-03-11 中国原子能科学研究院 质子注量率测量装置及系统
CN114420528B (zh) * 2021-12-28 2024-06-11 四川红华实业有限公司 一种固定式同位素磁式质谱仪接收器及其方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4811159A (en) * 1988-03-01 1989-03-07 Associated Mills Inc. Ionizer
USRE34346E (en) * 1988-03-01 1993-08-17 Pollenex Corporation Ionizer
DE3928836A1 (de) * 1989-06-14 1990-12-20 Finnigan Mat Gmbh Massenspektrometer
FR2695499B1 (fr) * 1992-09-08 1997-04-30 Int Jeux Dispositif de lecture de codes magnetiques et de codes optiques.
GB9219239D0 (en) * 1992-09-11 1992-10-28 Fisons Plc Mass spectrometer with adjustable aperture mechanism
US5621209A (en) * 1995-04-10 1997-04-15 High Voltage Engineering Europa B.V. Attomole detector
GB9518258D0 (en) * 1995-09-07 1995-11-08 Micromass Ltd Charged-Particle detectors and mass spectrometers employing the same
US5650618A (en) * 1995-11-30 1997-07-22 The Regents Of The University Of California Compact mass spectrometer for plasma discharge ion analysis

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005045463A1 (de) * 2005-09-22 2007-04-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messanordnung zur Erfassung von Umgebungsparametern und von Betriebsparametern für ein unter Vakuumbedingungen im Weltraum oder im Labor arbeitendes Gerät
DE102005045463B4 (de) * 2005-09-22 2007-12-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messanordnung zur Strahlungserfassung unter Vakuumbedingungen
DE102009048120B4 (de) * 2009-10-02 2013-08-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Erfassen von Umgebungs- und Betriebsparametern in Plasmen

Also Published As

Publication number Publication date
ATE191585T1 (de) 2000-04-15
JPH09171083A (ja) 1997-06-30
CA2184963C (en) 2001-02-20
US5757012A (en) 1998-05-26
GB9518258D0 (en) 1995-11-08
US5903002A (en) 1999-05-11
EP0762472B1 (de) 2000-04-05
DE69607543D1 (de) 2000-05-11
EP0762472A1 (de) 1997-03-12
JP2886508B2 (ja) 1999-04-26
CA2184963A1 (en) 1997-03-08

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Legal Events

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8327 Change in the person/name/address of the patent owner

Owner name: MICROMASS UK LTD., MANCHESTER, GB