ATE191585T1 - Detektoren für geladene teilchen sowie diese verwendende massenspektrometer - Google Patents

Detektoren für geladene teilchen sowie diese verwendende massenspektrometer

Info

Publication number
ATE191585T1
ATE191585T1 AT96306426T AT96306426T ATE191585T1 AT E191585 T1 ATE191585 T1 AT E191585T1 AT 96306426 T AT96306426 T AT 96306426T AT 96306426 T AT96306426 T AT 96306426T AT E191585 T1 ATE191585 T1 AT E191585T1
Authority
AT
Austria
Prior art keywords
same
charged particle
mass spectrometers
particle detectors
charged
Prior art date
Application number
AT96306426T
Other languages
English (en)
Inventor
Patrick James Turner
Raymond Clive Haines
Original Assignee
Micromass Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micromass Ltd filed Critical Micromass Ltd
Application granted granted Critical
Publication of ATE191585T1 publication Critical patent/ATE191585T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
AT96306426T 1995-09-07 1996-09-05 Detektoren für geladene teilchen sowie diese verwendende massenspektrometer ATE191585T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9518258.0A GB9518258D0 (en) 1995-09-07 1995-09-07 Charged-Particle detectors and mass spectrometers employing the same

Publications (1)

Publication Number Publication Date
ATE191585T1 true ATE191585T1 (de) 2000-04-15

Family

ID=10780334

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96306426T ATE191585T1 (de) 1995-09-07 1996-09-05 Detektoren für geladene teilchen sowie diese verwendende massenspektrometer

Country Status (7)

Country Link
US (2) US5757012A (de)
EP (1) EP0762472B1 (de)
JP (1) JP2886508B2 (de)
AT (1) ATE191585T1 (de)
CA (1) CA2184963C (de)
DE (1) DE69607543T2 (de)
GB (1) GB9518258D0 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9518258D0 (en) * 1995-09-07 1995-11-08 Micromass Ltd Charged-Particle detectors and mass spectrometers employing the same
WO1999031707A1 (en) * 1997-12-16 1999-06-24 Stephen Douglas Fuerstenau Method and apparatus for detection of charge on ions and particles
DE19838553B4 (de) * 1998-08-25 2010-08-12 Thermo Fisher Scientific (Bremen) Gmbh Faraday-Auffänger zur Messung von Ionenströmen in Massenspektrometern
AU766473B2 (en) 1998-10-06 2003-10-16 University Of Washington Charged particle beam detection system
US6723998B2 (en) * 2000-09-15 2004-04-20 Varian Semiconductor Equipment Associates, Inc. Faraday system for ion implanters
US7265346B2 (en) * 2001-05-25 2007-09-04 Analytica Of Brandford, Inc. Multiple detection systems
US6815689B1 (en) * 2001-12-12 2004-11-09 Southwest Research Institute Mass spectrometry with enhanced particle flux range
DE10258118A1 (de) * 2002-12-06 2004-07-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Messen und zur Bestimmung von Ladungsträgerströmen und davon ableitbaren Größen in ionen- und plasmagestützten Prozessen
DE10329383B4 (de) * 2003-06-30 2006-07-27 Advanced Micro Devices, Inc., Sunnyvale Ionenstrahldetektor für Ionenimplantationsanlagen, Faraday-Behälter dafür und Verfahren zur Steuerung der Eigenschaften eines Ionenstrahls mittels des Ionenstrahldetektors
DE10329388B4 (de) * 2003-06-30 2006-12-28 Advanced Micro Devices, Inc., Sunnyvale Faraday-Anordnung als Ionenstrahlmessvorrichtung für eine Ionenimplantationsanlage und Verfahren zu deren Betrieb
US7338683B2 (en) * 2004-05-10 2008-03-04 Superpower, Inc. Superconductor fabrication processes
DE102005045463B4 (de) * 2005-09-22 2007-12-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messanordnung zur Strahlungserfassung unter Vakuumbedingungen
DE112008001001B4 (de) 2007-04-16 2013-04-11 Ulvac, Inc. Verfahren zur Steuerung von Massenspektrometern und Massenspektrometer
US8138473B2 (en) 2007-05-15 2012-03-20 Ulvac, Inc. Mass spectrometry unit
DE102009048120B4 (de) * 2009-10-02 2013-08-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Erfassen von Umgebungs- und Betriebsparametern in Plasmen
CN108615666B (zh) * 2016-12-09 2024-04-19 上海凯世通半导体股份有限公司 束流检测装置
CN112558138B (zh) * 2020-12-07 2022-03-11 中国原子能科学研究院 质子注量率测量装置及系统
CN114420528A (zh) * 2021-12-28 2022-04-29 四川红华实业有限公司 一种固定式同位素磁式质谱仪接收器及其方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE34346E (en) * 1988-03-01 1993-08-17 Pollenex Corporation Ionizer
US4811159A (en) * 1988-03-01 1989-03-07 Associated Mills Inc. Ionizer
DE3928836A1 (de) * 1989-06-14 1990-12-20 Finnigan Mat Gmbh Massenspektrometer
FR2695499B1 (fr) * 1992-09-08 1997-04-30 Int Jeux Dispositif de lecture de codes magnetiques et de codes optiques.
GB9219239D0 (en) * 1992-09-11 1992-10-28 Fisons Plc Mass spectrometer with adjustable aperture mechanism
US5621209A (en) * 1995-04-10 1997-04-15 High Voltage Engineering Europa B.V. Attomole detector
GB9518258D0 (en) * 1995-09-07 1995-11-08 Micromass Ltd Charged-Particle detectors and mass spectrometers employing the same
US5650618A (en) * 1995-11-30 1997-07-22 The Regents Of The University Of California Compact mass spectrometer for plasma discharge ion analysis

Also Published As

Publication number Publication date
CA2184963A1 (en) 1997-03-08
GB9518258D0 (en) 1995-11-08
DE69607543T2 (de) 2000-12-07
EP0762472A1 (de) 1997-03-12
US5903002A (en) 1999-05-11
US5757012A (en) 1998-05-26
CA2184963C (en) 2001-02-20
DE69607543D1 (de) 2000-05-11
JP2886508B2 (ja) 1999-04-26
EP0762472B1 (de) 2000-04-05
JPH09171083A (ja) 1997-06-30

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