DE2041425A1 - Vorrichtung zum gleichmaessigen Umhuellen von Teilen mit kleinen Abmessungen - Google Patents

Vorrichtung zum gleichmaessigen Umhuellen von Teilen mit kleinen Abmessungen

Info

Publication number
DE2041425A1
DE2041425A1 DE19702041425 DE2041425A DE2041425A1 DE 2041425 A1 DE2041425 A1 DE 2041425A1 DE 19702041425 DE19702041425 DE 19702041425 DE 2041425 A DE2041425 A DE 2041425A DE 2041425 A1 DE2041425 A1 DE 2041425A1
Authority
DE
Germany
Prior art keywords
drum
attached
axis
parts
ring gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702041425
Other languages
German (de)
English (en)
Inventor
Pierre Beucherie
Michel Block
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of DE2041425A1 publication Critical patent/DE2041425A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Photoreceptors In Electrophotography (AREA)
DE19702041425 1969-08-22 1970-08-14 Vorrichtung zum gleichmaessigen Umhuellen von Teilen mit kleinen Abmessungen Pending DE2041425A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU59342 1969-08-22

Publications (1)

Publication Number Publication Date
DE2041425A1 true DE2041425A1 (de) 1971-03-04

Family

ID=19726137

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702041425 Pending DE2041425A1 (de) 1969-08-22 1970-08-14 Vorrichtung zum gleichmaessigen Umhuellen von Teilen mit kleinen Abmessungen

Country Status (6)

Country Link
BE (1) BE754079A (ja)
DE (1) DE2041425A1 (ja)
FR (1) FR2058913A5 (ja)
GB (1) GB1299290A (ja)
LU (1) LU59342A1 (ja)
NL (1) NL7012033A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113073306B (zh) * 2021-03-24 2022-11-01 中国科学院近代物理研究所 一种可批量化金属球表面均匀镀膜的方法

Also Published As

Publication number Publication date
FR2058913A5 (ja) 1971-05-28
BE754079A (ja) 1970-12-31
GB1299290A (en) 1972-12-13
NL7012033A (ja) 1971-02-24
LU59342A1 (ja) 1970-01-07

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