BE754079A - - Google Patents
Info
- Publication number
- BE754079A BE754079A BE754079DA BE754079A BE 754079 A BE754079 A BE 754079A BE 754079D A BE754079D A BE 754079DA BE 754079 A BE754079 A BE 754079A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Photoreceptors In Electrophotography (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| LU59342 | 1969-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE754079A true BE754079A (xx) | 1970-12-31 |
Family
ID=19726137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE754079D BE754079A (xx) | 1969-08-22 | 1970-07-29 |
Country Status (6)
| Country | Link |
|---|---|
| BE (1) | BE754079A (xx) |
| DE (1) | DE2041425A1 (xx) |
| FR (1) | FR2058913A5 (xx) |
| GB (1) | GB1299290A (xx) |
| LU (1) | LU59342A1 (xx) |
| NL (1) | NL7012033A (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113073306B (zh) * | 2021-03-24 | 2022-11-01 | 中国科学院近代物理研究所 | 一种可批量化金属球表面均匀镀膜的方法 |
-
1969
- 1969-08-22 LU LU59342D patent/LU59342A1/xx unknown
-
1970
- 1970-07-29 BE BE754079D patent/BE754079A/xx unknown
- 1970-08-11 GB GB3869270A patent/GB1299290A/en not_active Expired
- 1970-08-14 DE DE19702041425 patent/DE2041425A1/de active Pending
- 1970-08-14 NL NL7012033A patent/NL7012033A/xx unknown
- 1970-08-18 FR FR7030277A patent/FR2058913A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7012033A (xx) | 1971-02-24 |
| GB1299290A (en) | 1972-12-13 |
| FR2058913A5 (xx) | 1971-05-28 |
| DE2041425A1 (de) | 1971-03-04 |
| LU59342A1 (xx) | 1970-01-07 |