GB1299290A - A device and method for uniformly coating small objects - Google Patents

A device and method for uniformly coating small objects

Info

Publication number
GB1299290A
GB1299290A GB3869270A GB3869270A GB1299290A GB 1299290 A GB1299290 A GB 1299290A GB 3869270 A GB3869270 A GB 3869270A GB 3869270 A GB3869270 A GB 3869270A GB 1299290 A GB1299290 A GB 1299290A
Authority
GB
United Kingdom
Prior art keywords
drum
coating
aug
grooves
small objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3869270A
Inventor
Michel Block
Pierre Beucherie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of GB1299290A publication Critical patent/GB1299290A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

1299290 Coating drum EUROPEAN ATOMIC ENERGY COMMUNITY 11 Aug 1970 [22 Aug 1969] 38692/70 Heading C7B, C7F [Also in Division B2] A device for coating small objects comprises a drum 1 having a non-vertical longitudinal axis, the interior of the drum having projections or grooves 2 slightly larger than the object 9 to be coated, the drum being mounted for rotation about said axis and being provided with a percussion device 7 or other means for vibrating the drum, and being disposed in a vacuum chamber having a passage through which a rotatable shaft for driving the drum extends, the drum being formed with apertures 19 on the side to which the drive shaft is fixed, and the opposite side having a central orifice for admitting electric current conducting means 10 and gas to the inside of the drum for inductive plasma spraying. Grooves 2 may be axial, circumferential or helical, and teeth 5 raise weight 7 by means of a peg attached thereto and then allow it to fall and strike the drum. Coating may be by inductive plasma spraying, vapour deposition, sputtering, or electrolysis, in which case the drum is at least partly immersed in the electrolyte.
GB3869270A 1969-08-22 1970-08-11 A device and method for uniformly coating small objects Expired GB1299290A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU59342 1969-08-22

Publications (1)

Publication Number Publication Date
GB1299290A true GB1299290A (en) 1972-12-13

Family

ID=19726137

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3869270A Expired GB1299290A (en) 1969-08-22 1970-08-11 A device and method for uniformly coating small objects

Country Status (6)

Country Link
BE (1) BE754079A (en)
DE (1) DE2041425A1 (en)
FR (1) FR2058913A5 (en)
GB (1) GB1299290A (en)
LU (1) LU59342A1 (en)
NL (1) NL7012033A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113073306B (en) * 2021-03-24 2022-11-01 中国科学院近代物理研究所 Method capable of realizing uniform film coating on surfaces of metal balls in batches

Also Published As

Publication number Publication date
FR2058913A5 (en) 1971-05-28
BE754079A (en) 1970-12-31
NL7012033A (en) 1971-02-24
DE2041425A1 (en) 1971-03-04
LU59342A1 (en) 1970-01-07

Similar Documents

Publication Publication Date Title
EP0958195B1 (en) Method for coating surfaces using an installation with sputter electrodes
GB1356769A (en) Apparatus and method for depositing thin layers on a substrate
CN205488027U (en) Controllable no magnetic field high power microwave device of dual -frenquency
US3926147A (en) Glow discharge-tumbling vapor deposition apparatus
CN107227445A (en) A kind of arc ion plating apparatus of deposited tube inside coating
GB785878A (en) A method of carrying out industrial processes in a glow discharge
KR20200129615A (en) Plastic vacuum deposition coating system capable of coating with uniform thickness
GB1299290A (en) A device and method for uniformly coating small objects
JPS5641375A (en) Sputtering apparatus
CN100410418C (en) Bearing outer ring ball track ion injection and deposition combined treatment method
US20050196548A1 (en) Component protected against corrosion and method for the production thereof and device for carrying out the method
CN208121186U (en) A kind of strong glow discharge deposition diamond-like-carbon film device
JPS5696084A (en) Rotary electrolytic machine of water
GB620405A (en) Improvements in or relating to compact electric condensers
JPS5488178A (en) Gas flow counter
CN213327820U (en) Cleaning device for vacuum coating machine
CN211620606U (en) Magnetron sputtering target with online cleaning function
US4579635A (en) Method and apparatus for the fixation of radioactive krypton
Bessot New Vacuum Deposition Techniques. Evolution and Trends
JPS5745339A (en) Production of deposited film
JPS55161825A (en) Formation of antireflection coating of lens made from synthetic resin
JPS5757871A (en) Vapor depositing device
JPS5690998A (en) Barrel plating apparatus
GB1003212A (en) Improvements in vacuum pumps of the ionization and evaporation type
JPS6455375A (en) Device for projecting ion beam

Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees