DE2037173A1 - Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial - Google Patents
Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterialInfo
- Publication number
- DE2037173A1 DE2037173A1 DE19702037173 DE2037173A DE2037173A1 DE 2037173 A1 DE2037173 A1 DE 2037173A1 DE 19702037173 DE19702037173 DE 19702037173 DE 2037173 A DE2037173 A DE 2037173A DE 2037173 A1 DE2037173 A1 DE 2037173A1
- Authority
- DE
- Germany
- Prior art keywords
- rod
- arrangement according
- semiconductor wafers
- tube
- recesses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 78
- 239000000463 material Substances 0.000 title claims description 37
- 239000002019 doping agent Substances 0.000 title claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 52
- 238000009792 diffusion process Methods 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 9
- 229910010271 silicon carbide Inorganic materials 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000003708 ampul Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 240000006108 Allium ampeloprasum Species 0.000 description 1
- 235000005254 Allium ampeloprasum Nutrition 0.000 description 1
- 101000724404 Homo sapiens Saccharopine dehydrogenase Proteins 0.000 description 1
- 102100028294 Saccharopine dehydrogenase Human genes 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 210000002105 tongue Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C30B31/165—Diffusion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702037173 DE2037173A1 (de) | 1970-07-27 | 1970-07-27 | Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial |
| JP12193270A JPS4915102B1 (enrdf_load_stackoverflow) | 1970-07-27 | 1970-12-29 | |
| NL7107778A NL7107778A (enrdf_load_stackoverflow) | 1970-07-27 | 1971-06-07 | |
| CH867371A CH561082A5 (enrdf_load_stackoverflow) | 1970-07-27 | 1971-06-15 | |
| GB2860671A GB1312226A (en) | 1970-07-27 | 1971-06-18 | Diffusion of doping substances into wafers of semiconductor material |
| FR7126290A FR2103051A5 (enrdf_load_stackoverflow) | 1970-07-27 | 1971-07-19 | |
| SE964071A SE385785B (sv) | 1970-07-27 | 1971-07-27 | Anordning for indiffusion av dopningsemnen i skivor av halvledarmaterial |
| BE770550A BE770550A (fr) | 1970-07-27 | 1971-07-27 | Agencement de diffusion de matieres de dopage dans des rondelles de matiere semiconductrice |
| CA119193A CA932481A (en) | 1970-07-27 | 1971-07-27 | Method of diffusing a doping substance into wafers of semiconducting material |
| US00348258A US3805735A (en) | 1970-07-27 | 1973-04-05 | Device for indiffusing dopants into semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702037173 DE2037173A1 (de) | 1970-07-27 | 1970-07-27 | Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2037173A1 true DE2037173A1 (de) | 1972-02-03 |
Family
ID=5778005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702037173 Pending DE2037173A1 (de) | 1970-07-27 | 1970-07-27 | Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS4915102B1 (enrdf_load_stackoverflow) |
| BE (1) | BE770550A (enrdf_load_stackoverflow) |
| CA (1) | CA932481A (enrdf_load_stackoverflow) |
| CH (1) | CH561082A5 (enrdf_load_stackoverflow) |
| DE (1) | DE2037173A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2103051A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1312226A (enrdf_load_stackoverflow) |
| NL (1) | NL7107778A (enrdf_load_stackoverflow) |
| SE (1) | SE385785B (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
| JPS57143428A (en) * | 1981-02-27 | 1982-09-04 | High Frequency Heattreat Co Ltd | Induction heating and hardening method |
-
1970
- 1970-07-27 DE DE19702037173 patent/DE2037173A1/de active Pending
- 1970-12-29 JP JP12193270A patent/JPS4915102B1/ja active Pending
-
1971
- 1971-06-07 NL NL7107778A patent/NL7107778A/xx unknown
- 1971-06-15 CH CH867371A patent/CH561082A5/xx not_active IP Right Cessation
- 1971-06-18 GB GB2860671A patent/GB1312226A/en not_active Expired
- 1971-07-19 FR FR7126290A patent/FR2103051A5/fr not_active Expired
- 1971-07-27 SE SE964071A patent/SE385785B/xx unknown
- 1971-07-27 BE BE770550A patent/BE770550A/xx unknown
- 1971-07-27 CA CA119193A patent/CA932481A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA932481A (en) | 1973-08-21 |
| CH561082A5 (enrdf_load_stackoverflow) | 1975-04-30 |
| NL7107778A (enrdf_load_stackoverflow) | 1972-01-31 |
| JPS4915102B1 (enrdf_load_stackoverflow) | 1974-04-12 |
| SE385785B (sv) | 1976-07-26 |
| GB1312226A (en) | 1973-04-04 |
| BE770550A (fr) | 1972-01-27 |
| FR2103051A5 (enrdf_load_stackoverflow) | 1972-04-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |