NL7107778A - - Google Patents

Info

Publication number
NL7107778A
NL7107778A NL7107778A NL7107778A NL7107778A NL 7107778 A NL7107778 A NL 7107778A NL 7107778 A NL7107778 A NL 7107778A NL 7107778 A NL7107778 A NL 7107778A NL 7107778 A NL7107778 A NL 7107778A
Authority
NL
Netherlands
Application number
NL7107778A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7107778A publication Critical patent/NL7107778A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
NL7107778A 1970-07-27 1971-06-07 NL7107778A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702037173 DE2037173A1 (de) 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial

Publications (1)

Publication Number Publication Date
NL7107778A true NL7107778A (enrdf_load_stackoverflow) 1972-01-31

Family

ID=5778005

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7107778A NL7107778A (enrdf_load_stackoverflow) 1970-07-27 1971-06-07

Country Status (9)

Country Link
JP (1) JPS4915102B1 (enrdf_load_stackoverflow)
BE (1) BE770550A (enrdf_load_stackoverflow)
CA (1) CA932481A (enrdf_load_stackoverflow)
CH (1) CH561082A5 (enrdf_load_stackoverflow)
DE (1) DE2037173A1 (enrdf_load_stackoverflow)
FR (1) FR2103051A5 (enrdf_load_stackoverflow)
GB (1) GB1312226A (enrdf_load_stackoverflow)
NL (1) NL7107778A (enrdf_load_stackoverflow)
SE (1) SE385785B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
JPS57143428A (en) * 1981-02-27 1982-09-04 High Frequency Heattreat Co Ltd Induction heating and hardening method

Also Published As

Publication number Publication date
CA932481A (en) 1973-08-21
DE2037173A1 (de) 1972-02-03
CH561082A5 (enrdf_load_stackoverflow) 1975-04-30
JPS4915102B1 (enrdf_load_stackoverflow) 1974-04-12
SE385785B (sv) 1976-07-26
GB1312226A (en) 1973-04-04
BE770550A (fr) 1972-01-27
FR2103051A5 (enrdf_load_stackoverflow) 1972-04-07

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