DE2029675A1 - Verfahren zur Herstellung einer ver tieften, konkaven Vorratskathode mit einem Gitter - Google Patents
Verfahren zur Herstellung einer ver tieften, konkaven Vorratskathode mit einem GitterInfo
- Publication number
- DE2029675A1 DE2029675A1 DE19702029675 DE2029675A DE2029675A1 DE 2029675 A1 DE2029675 A1 DE 2029675A1 DE 19702029675 DE19702029675 DE 19702029675 DE 2029675 A DE2029675 A DE 2029675A DE 2029675 A1 DE2029675 A1 DE 2029675A1
- Authority
- DE
- Germany
- Prior art keywords
- cathode
- grid
- concave
- face
- concave face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 3
- 241001122767 Theaceae Species 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000839 emulsion Substances 0.000 claims 1
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 6
- IAQRGUVFOMOMEM-UHFFFAOYSA-N butene Natural products CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- KZVBBTZJMSWGTK-UHFFFAOYSA-N 1-[2-(2-butoxyethoxy)ethoxy]butane Chemical compound CCCCOCCOCCOCCCC KZVBBTZJMSWGTK-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241000237502 Ostreidae Species 0.000 description 1
- 101150094640 Siae gene Proteins 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 101150093411 ZNF143 gene Proteins 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- RFHAOTPXVQNOHP-UHFFFAOYSA-N fluconazole Chemical compound C1=NC=NN1CC(C=1C(=CC(F)=CC=1)F)(O)CN1C=NC=N1 RFHAOTPXVQNOHP-UHFFFAOYSA-N 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 235000020636 oyster Nutrition 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 210000003371 toe Anatomy 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
- H01J9/042—Manufacture, activation of the emissive part
- H01J9/047—Cathodes having impregnated bodies
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Solid Thermionic Cathode (AREA)
- Electron Beam Exposure (AREA)
- Microwave Tubes (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US83345869A | 1969-06-16 | 1969-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2029675A1 true DE2029675A1 (de) | 1971-01-21 |
Family
ID=25264477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702029675 Pending DE2029675A1 (de) | 1969-06-16 | 1970-06-16 | Verfahren zur Herstellung einer ver tieften, konkaven Vorratskathode mit einem Gitter |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3594885A (enrdf_load_stackoverflow) |
| JP (1) | JPS5220817B1 (enrdf_load_stackoverflow) |
| CA (1) | CA922878A (enrdf_load_stackoverflow) |
| DE (1) | DE2029675A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2052633A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1264765A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2602649A1 (de) * | 1975-01-31 | 1976-08-05 | Varian Associates | Gittergesteuerte elektronenquelle und verfahren zu ihrer herstellung |
| DE3414549A1 (de) * | 1983-04-18 | 1985-02-07 | Litton Systems, Inc., Beverly Hills, Calif. | Elektronenkanone mit verbessertem aufbau von kathode und abschattungsgitter |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3843902A (en) * | 1972-08-24 | 1974-10-22 | Varian Associates | Gridded convergent flow electron gun |
| DE2535467C2 (de) * | 1975-08-08 | 1985-06-05 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Herstellen einer Kathode einer gittergesteuerten Leistungsröhre |
| JPS6273362U (enrdf_load_stackoverflow) * | 1985-10-24 | 1987-05-11 | ||
| US4734073A (en) * | 1986-10-10 | 1988-03-29 | The United States Of America As Represented By The Secretary Of The Army | Method of making a thermionic field emitter cathode |
| FR2723502B1 (fr) * | 1994-08-04 | 1997-01-10 | Valeo Electronique | Borne collectrice pour la mise en contact d'une pile pour l'alimentation d'un circuit electronique, circuit electronique et emetteur de telecommande l'incorporant |
| KR100782370B1 (ko) * | 2006-08-04 | 2007-12-07 | 삼성전자주식회사 | 지연 전기장을 이용한 이온 에너지 분포 분석기에 근거한이온 분석 시스템 |
| US7723699B2 (en) * | 2007-06-26 | 2010-05-25 | Varian Semiconductor Equipment Associates, Inc. | Cathode having electron production and focusing grooves, ion source and related method |
| US7978804B2 (en) * | 2007-12-10 | 2011-07-12 | Schlumberger Technology Corporation | Low power neutron generators |
| US9455112B2 (en) * | 2013-12-30 | 2016-09-27 | Mapper Lithography Ip B.V. | Cathode arrangement, electron gun, and lithography system comprising such electron gun |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE550302A (enrdf_load_stackoverflow) * | 1955-08-15 | |||
| US3067486A (en) * | 1957-06-20 | 1962-12-11 | Itt | Target electrode for barrier grid storage tube and method of making same |
| US2977496A (en) * | 1958-12-04 | 1961-03-28 | Machlett Lab Inc | Electrode structure for electron tubes |
| US3139552A (en) * | 1960-03-07 | 1964-06-30 | Hughes Aircraft Co | Charged particle gun with nonspherical emissive surface |
| NL135267C (enrdf_load_stackoverflow) * | 1961-10-04 |
-
1969
- 1969-06-16 US US833458A patent/US3594885A/en not_active Expired - Lifetime
-
1970
- 1970-06-15 CA CA085480A patent/CA922878A/en not_active Expired
- 1970-06-16 DE DE19702029675 patent/DE2029675A1/de active Pending
- 1970-06-16 GB GB1264765D patent/GB1264765A/en not_active Expired
- 1970-06-16 FR FR7022034A patent/FR2052633A5/fr not_active Expired
- 1970-06-16 JP JP45051635A patent/JPS5220817B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2602649A1 (de) * | 1975-01-31 | 1976-08-05 | Varian Associates | Gittergesteuerte elektronenquelle und verfahren zu ihrer herstellung |
| DE3414549A1 (de) * | 1983-04-18 | 1985-02-07 | Litton Systems, Inc., Beverly Hills, Calif. | Elektronenkanone mit verbessertem aufbau von kathode und abschattungsgitter |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1264765A (enrdf_load_stackoverflow) | 1972-02-23 |
| JPS5220817B1 (enrdf_load_stackoverflow) | 1977-06-06 |
| CA922878A (en) | 1973-03-20 |
| US3594885A (en) | 1971-07-27 |
| FR2052633A5 (enrdf_load_stackoverflow) | 1971-04-09 |
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