DE2029675A1 - Process for the production of a recessed, concave supply cathode with a grid - Google Patents

Description

PATENT LAWYERS

DR. CLAUS REINLANDER DIPL.-ING. KLAUS BERNHARDT

D-8 MONKS 60 2029675

BXCKERSTRASSI3 *

Varian Associates

611 Hansen Way

Palo Alto, Calif. 94-303, USA

Process for the manufacture of a recessed, concave supply cathode with a grid

Priority: June 16, 1969 USA 833 458

summary

Methods are given for the production of concave, depressed supply cathodes. A butene pattern with several cells is formed in the concave end face of the cathode blank. In the cell-shaped areas of the concave emitter end face, an arrangement of concave depressions is formed, which are delimited by the cells of the groove pattern. A grid array with multiple cells is provided in the butenouster. The butene pattern is formed by photo-etching, an electrical discharge process, or by milling. The grid arrangement can be soldered into the butes or simply arranged in a position not in contact with the butts.

State of the art

Hitherto, a grid arrangement of several cells on or in the surface of a concave cathode emitter surface allocated to depressions has been proposed, in which the cells of the grid arrangement have openings in "int" control grids

009884/1478 bad original

are aligned. Such a kethole was written in the earlier application F 17 64 594.2 of the jtaieltoim -Τ »-. Such cathodes are particularly suitable for electron guns! in linearstrablrollueeii old forkonvergenss and high performance, as the inclusion of a control grid current is greatly reduced "This is because IATI" äaß the grid arrangement in or on OCE cathode äasia contributes ₀ to focus through the aligned openings dea Steuergittera the electron = radiate "In addition, contributes to prevent ias Eotasaiergitter role in an electron emission from the cathode Berelefeea dea, the dee to the webs Stemergitters aligned · are However, so far there are no pr & ktiseti usable production processes for such forratstoatlioden nit such Fokusaierungsgitter

Together menfaggunjg ^ gr

The present invention aims at tia aemes ferfaliren for the production of a konlca ¥ en ₉ ¥ <irtl © ft © a ¥ © 3f3? Atsfeatliofle in which a grid arrangement is provided.

According to a feature of the present invention a Yonatstethodenrohstückes a futenmuster _v ausgeTbiläet with several cells in the concave face in which a Gitteran ™ order can be arranged with a plurality of openings ₉ and in the concave face of the Eathod @ nrohsttt @ kee is an array of recessed facets formed, whereby these facets are limited by the individual cells the lateiimuaters with several cells »

Preferably, the hats are in the concave face of the Milled cathode blanks.

B's can, however, just as swecküädig no, because ÜntaiORteter «heroic in dl« concave face on foi & odei & rohetitek «© oimstiätz.

BATH ORIGINAL

009884/1476

In certain cases it can also be advantageous to form the hat oyster with the aid of an electrical discharge, the discharge range electrode having a master, that with at least part of the groove pattern to be formed matches.

In the following, the invention will be explained in more detail with reference to the modes of presentation shown in the drawing. In the drawing show:

Flg. 1 is a Tel! Long section through an electron gun is the (according to the method of this invention prepared

Fig. 2 and 4 enlarged detailed views of other embodiments

Guide forms, the detail shown being the part the one in Flg. 1 corresponds to the arrangement shown circled by lines 2-2 and 4-4,

3 and 5 enlarged detailed views of parts of the Flg. and 4, which are circled along lines 3-3 and 5-5 respectively,

6 shows a perspective view of a flow diagram or

Workflow s in which a method according to the invention rar production of cafeteria is shown,

7 shows a flow chart in a block diagram for the purpose of explanation of a cathode manufacturing process according to the present invention, "

8 shows a flow diagram in block form, in which the best imate steps of a method according to the present invention Invention are shown, and

9 is a sectional view of a tool of an electrical Discharge machine, in which it is shown how this machine in the implementation of an inventive Procedure is used.

Description of the preferred embodiments

In Fig. 1, an electron gun 1 is shown a concave _v Vorratskathodeneaitter 2 · The Slitter used comprises

0098 84 / 147.6 BM) okqinal

a - shape on «as described in the entire US patent application 650 893 above, and © r consists briefly of a spherical section on a porous tungsten, which is impregnated with barium _v and in the concave face 4 of the emitter 2 a ! Betaere »in a tight» arrangement »recessed facets 3 formed. The concave face 4 of the emitter 2 is provided with an opening in the middle
concave surface 4 is a

Control grid 6 aageorimet, Äas & οέ IJqtm of the feontewem surface 4 is adapted »BIc
are preferably heasagooal ^ w & ü
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BATH ORIGINAL

The focusing grating 8, which is made of molybdenum, for example covered with an electron emission preventing material such as carbon, titanium, zirconium, iridium, etc., to prevent a current from being intercepted by the control grid 6 as the coating emits from such parts of the cathode surface 4, the electron trajectories of which would impinge on the web parts of the grid 6.

After the rays have passed through the openings 7 they combine to form a single jet which passes through the central opening in the anode 5. Corresponding In a typical example, the electron gun 1 generates an electron beam of 1 ampere at 10 kV with a microspace charge constant of 1.0 and a cathode load current density of 1.2 amps per cm. 0.8 # of the beam current was captured by the grid *

In Figures 2 and 3, an embodiment of the gate cathode 2 is shown. In this embodiment, the focusing grating 8 is held at its edge by a relatively heavy tubular, thermally conductive holder 11, which serves to dissipate the heat and to cool the grating 8. The grating 8 is held so that it is not in contact with the Hutenmuster 9 to a Wlnieableltung of the cathode 2, which normally operates in the range of 900 to 1100 ⁰ C to suppress the grating. 8 This arrangement, in which there is no contact between the cathode and the grid, also serves to prevent the barium impregnation from migrating from the cathode 2 to the grid 8. According to a typical example, the hats 9 have a width of 0.040 cm and a supplying of 0.012 cm, and the grating 8 has a web width of 025 ca 0 _t and a depth in the steel Riohtung of 0.0225 cm, and it is from the bottom of the seed 9 at a distance of 0.0025 em.

9884 / U76

BAD CRiGlWAL

In the pig. 4 and 5 let torrate cathode 2 shown »at Äor the Kathodenkiirpei? above

Bottom of the Inten 9 «ad of the oaüoeomiem FlSAo ios © itters 8 is held · Heeigaot © EStetöffe mofGsoea Ifelyfeääa «=

In Fig. 6 is a] flioSo © lieo3 "tojo oi®

poses, at ilen He Staf © a to? ^ ©!? Liogeai © 3i Manufacture voa Tosxatolmbtoeloa coooig ^ Θ2ίΐιΊ ₀ la Gfitteranorfiniaiigem ^ orcosetea oteSo loi iiooon ¥ o2 ^> fcte ^> © a

into the concave © Oiberilüetoo 4 oimoo

ratskathodenrohsiüelseo 2 _Ό lao otüQ qtso g> i ©? ioon Uolfeoa 1 with a "letaalfraron 1bct7o ocstnloäfeci ^ osi ED.tosiolo α £ ο lupf he or KunetBtofffic ^ ^ ISCL IIOS? ^ iot ₀ in oiaon sehritt (a) Baten 9 in olmca notecolläßoa & oiag @ 3sal (io

eiogelaeeea _s θοΙ & οΙ ilooeo Ita-öoEEBo-feos ¹ Tue ^- O

IEA Stemerglttora 6 ãAä üoa imatos üoo PoImooiQiOlttoie ¹ 8 einstiantf ÄÄ in äc5m ISffl ^ oa 9 Qisgo © 3? eliiicrö uosäom o @ ll ₀ BI © mute 9 can © In © »© 1äCDio @ lkoia α% 3Χ7 @ £ ΌΟ3θ§ ₀ ämE ⁱ © fe ice = mill or through a Boasisol'iiiüaß taittolo oumeE ¹

Discharge made worioa »aao to

below anhaiad äer Fig., 1 IbIo 3 tossteloboa wosiom s @ llc

Hachiea the Glttemastei?

are made in a Terfatec in each of the cells of the fctöassiaters 3 tmvten eattmdoZ or by a processing charge

Xn eins «Terfa'hreneaeltiapi'feife (©) trftai Siae l'etaESoiepgi'ö'feoff 8 emt—

neither in one of the üttea above using the? lg »2« si 3 toatetelotom iwie _t

BAD ORIGINAL 0 U ¹ JH iU / H 7 6

the position touching the grooves, as described above with reference to FIG. 4 and 5, arranged in the butene pattern 9.

In FIG. 7, the general method described in FIG. 6 is described in more detail using a method in which one chemical treatment that is used in the cathode blank 2 to form the grid-like pattern of the butes 9.

In one work step (a) on the concave surface 4 of the Xathodenrohetttokes 2, about with the help of a Adhesive or by clamping, a grid mask attached, which is essentially equal to the grid 8 and in fact by " the grid 8 itself can be formed. In a process step (b), an acid-resistant Esuleionsttbersug is applied to the concave surface 4 of the cathode blank 2 through the openings in the grid mask, which is approximately from the A-Z 111 photoresist overlap, which is provided by firsa Shipley Company is manufactured. In the process step (c) the smoothing mask is removed, whereby the exposed grid pattern remains on the surface 4 of the cathode piece.

In the process step (d), the surface 4 is treated with a chemical acid agent, such as Ealius ferrosyanide, and an etchant, so that the butex meter 3 is inserted into the concave surface 4. In «Ines Vwrfahrtseeliritt (e) are in | the surface 4, as described above, provided with recesses. In one process, the expandable impregnating agent for the porous tungsten body is removed, for example, by a chemical process or by a treatment in which the impregnating agent is expelled.

In one process, the porous tungsten body with an electron-emitting material such as Barim, impregnated by a conventional method. In a method step (h), the grid 8 is placed in its electron emission-preventing coating in the grid pattern of the butene 9 either arranged in such a way that it does not touch the butes "like" it

009884 / U76, ".",:. "

above with reference to clef fl. 2 and 3, or so that it touches the hats, trie @s above with reference to FIG be carried out before the grille 8 is installed _f or after the grille 8 has been installed «When this operation is carried out» after the gifter 8 is arranged; »Order is, wlvü the ¥ ErkJE®ug sur production bucket Yertieftm« single through the corresponding opening in ä & m öiitf »8

In the fl »Arlieiteeeteitt (α) is flat © like IeI ttae JkÄolioeeteltt (e.) Dec In the H geetellt irbelteverfatacsM o & ao © £ tto3a» efeo attached to the ion rotoetielc 2 · M fiean Aeboiusseetel-fet {fe) wittesea im ämseek die a Εΐο? Ιΐ1βηΐϊ! ββ £ ι »1) θ% © 1ί © & os ola © larbe aaf brought _y so« taS iurcsfe ftas aieben ralt Eas? te Stegpaater la, the with fixed CborL © camoii ΙΜβΐ & ο toes lattice HOster fite il © natea 9 aasgotelöet witeüo Sa ica sobxltt (c) wiM die GiStcCTOdEso GftßöiBOBisseißo oo ScD älo

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bath

dee In Flg. 7 is replaced by the fact that the Haster for the butene 9 old help of an electrical discharge process in the concave surface 4 of the Xathodenrohstüekes 2 be formed. You electrical discharge electrode 15 has a spherically curved surface 16, the corresponding of the surface 4 of the cathode blank 2 is formed · On the surface 16 of the electrode 15 is a raised grid » Pattern 17 is formed, which corresponds to the grid pattern of the butene 9 to be formed in the Xathode blank 2. The electrode removal tool 15 for forming the electrical discharge is then pressed against the surface 4 of the ZathodenrohstUekes 2 moves so that the grid pattern 9 can eat into this surface. The rest of the procedure is the same as in the one above based on the Pig. 7 procedure.

009884/1476 _BAD original

Claims (1)

14 Process "or production of a recessed torrate cathode for the generation of an electrical element, old coaxial beam," characterized in that, in the concave end face of a raw torrate cathode, a large-sized debris is formed, whereby this larger-length opening corresponds to a general opening of the other control elements _v tea over ier keatewem Staia8lonBfläeae the Torratskathode arranged wextlem eoll _v iaüB Ib "tor concave face of the Kathoienrol & etttelcee a" lnorcimmg ams konkawem _t ▼ ertieften Etaiseionsfacetten is aiugfiliildet ₉ volel Each of facetton einzelnen- so ang®®rim © t "ä & B DNR © h a single cell of the "EhrsselUgini ütateBiiuitem to-is-bordered and that in the Itttenwaster a grid old mteeifeii. "Is arranged openings wolei the grid eim itepcwtor tieaitzt _f which corresponds in general to the luteamietes' i3oi AESM Stoemster of Stemergitters. 2. The method according to claim I ₉ imtaroli go) c «imseichnet * dad sur formation of the« honest lutezaiuetere la the concave face of the storage cathode beetfitücic * »the concave face t in which the butes are to be formed« is marked «over the pattern for the $ ewt! n0 «» lit®ii 8at * & «ufsuseichnen _v and that the luten etttspseeheuA dta amfs« s «ieliii« t «a! faster are eiagofsiet * into the concave face. Method according to address 1, äadureh e »k« BiUMioaiMt »dmi sos des sWhrselligen WAtmammtwaem In d« r konka ¥ «n Stixn- flee the storage cathod «xiro * etQok» e the ksak «ire frontal surface through an electric watch MMimmofrmstiMimWftmfWu ait the help of a bucket Verksevgelektirade 1ü» fteit «t« toi »dip 'Dia die lets * d« ng fceetiaettde ^ Muite «ng fceetiaettde ^ Muite a rope of the desired atteanwtes «entafiletitf im® in the 009884 / U76 BATH Front face of the YorratskathodenrohetÜekee auegeblldet will be eoll. 4. The method according to claim 1, characterized in that but illustration of the multicellular lutensuaters in the concave Front face of the supply cathode raw piece da «Hutensraeter into the concave face of the gate cathode blank is chemically etched. i> A method according to one · «of the preceding claims, characterized in that the lathodenrohstück that lutennoster is to be formed in de" includes a porous Igrper mos "tungsten, in the pores of a stretchable material has penetrated. 6. The method according to claim 5 »characterized in that the expandable material τοη de "lathodenrohstttck provided with pockets is removed, so that a raw piece of porous" metal remains, and that the pores of the metal blank "it a" Electron-emitting material are penetrated »so that a gate cathode body is formed 7 · Method according to one of the preceding claims, characterized characterized in that the grille is thereby in the lutenmster anger | is arranged so that the web part of the grid la the loud monster used and that the grille provided "it de" old butes XathodenkSrper is soldered 8 · A method according to one 'of the preceding Aneprfie & e * in that the grating to be in angeordiiet de "latanBftster Torratskathodenrohetüokee is verseben" it mtam »ine electron emission preventing tfoersag · 9 · A process according to one "of Asupruehe 4 to 8, deAnroiii gate» · -geiehnet "that ax training de" Watmamamtmxm "it Ulf ©« tmni chesisehen Itsvorganges on the konlmvafi Stirnflleli "to * u & thodenrohstfieloMi a" Gltteraaeke sjifelxrmoat Wixi ₉ Mm tea desired lattice tenant infwviJit ». that in the d «r Sattot · nnivi- 009884 / UT6 BATH ORIGINAL that the grating and the exposed areas of the concave face of the cathode ray tube not covered by the mask is coated with an acid-resistant emulsion, so that the grittex mask is removed in order to expose the surface of the cath arm raw piece that is exposed by di © Grid & ske al> g®decl £ t, and that the exposed areas are immersed in the end face of the .KathodenrohstÜckes. isfessslticb geät M <¥.? &v> n? in order to develop the worn bute pattern " 10. The method according to one of v <$ @ 3 rh? N @ g®1tend claims "characterized in that the _f · einseln% oll® to Hostere for the sow, which in the T & mkmm. Stimfläeh® dee! Athodenrehetückee trained ei "d _t a" hexagonal® W & rm BAD ORIG5KÄL 009884/1476 Blank page