DE19808549B4 - Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur - Google Patents

Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur Download PDF

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Publication number
DE19808549B4
DE19808549B4 DE19808549A DE19808549A DE19808549B4 DE 19808549 B4 DE19808549 B4 DE 19808549B4 DE 19808549 A DE19808549 A DE 19808549A DE 19808549 A DE19808549 A DE 19808549A DE 19808549 B4 DE19808549 B4 DE 19808549B4
Authority
DE
Germany
Prior art keywords
comb
tines
micromechanical
comb structure
structure according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19808549A
Other languages
German (de)
English (en)
Other versions
DE19808549A1 (de
Inventor
Jens Mohaupt
Markus Lutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19808549A priority Critical patent/DE19808549B4/de
Priority to US09/257,618 priority patent/US6122964A/en
Priority to KR1019990006449A priority patent/KR100572816B1/ko
Priority to JP11050860A priority patent/JPH11311635A/ja
Publication of DE19808549A1 publication Critical patent/DE19808549A1/de
Application granted granted Critical
Publication of DE19808549B4 publication Critical patent/DE19808549B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
DE19808549A 1998-02-28 1998-02-28 Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur Expired - Fee Related DE19808549B4 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19808549A DE19808549B4 (de) 1998-02-28 1998-02-28 Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur
US09/257,618 US6122964A (en) 1998-02-28 1999-02-25 Micromechanical comb structure
KR1019990006449A KR100572816B1 (ko) 1998-02-28 1999-02-26 미소기계적 콤 구조체 및 이를 포함하는 장치 및 가속 센서
JP11050860A JPH11311635A (ja) 1998-02-28 1999-02-26 マイクロメカニックなコ―ム構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19808549A DE19808549B4 (de) 1998-02-28 1998-02-28 Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur

Publications (2)

Publication Number Publication Date
DE19808549A1 DE19808549A1 (de) 1999-09-02
DE19808549B4 true DE19808549B4 (de) 2008-07-10

Family

ID=7859257

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19808549A Expired - Fee Related DE19808549B4 (de) 1998-02-28 1998-02-28 Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur

Country Status (4)

Country Link
US (1) US6122964A (ko)
JP (1) JPH11311635A (ko)
KR (1) KR100572816B1 (ko)
DE (1) DE19808549B4 (ko)

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US7051590B1 (en) * 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
DE19959707A1 (de) * 1999-12-10 2001-06-13 Bosch Gmbh Robert Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor
DE19960604A1 (de) * 1999-12-16 2001-06-21 Bosch Gmbh Robert Mikromechanische Federstruktur, insbesondere für einen Drehratensensor
JP2001227954A (ja) * 2000-02-15 2001-08-24 Toyota Motor Corp 物理量検出装置
US6508126B2 (en) 2000-07-21 2003-01-21 Denso Corporation Dynamic quantity sensor having movable and fixed electrodes with high rigidity
DE10145721A1 (de) * 2001-09-17 2003-04-10 Infineon Technologies Ag Vorrichtung zum mechanischen Steuern einer elektrischen Kapazität und Verfahren zur Herstellung derselben
US7514283B2 (en) 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US7075160B2 (en) 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6936491B2 (en) 2003-06-04 2005-08-30 Robert Bosch Gmbh Method of fabricating microelectromechanical systems and devices having trench isolated contacts
US6952041B2 (en) 2003-07-25 2005-10-04 Robert Bosch Gmbh Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
FR2858854B1 (fr) * 2003-08-13 2005-12-16 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par rappel ameliore
US6954348B1 (en) 2003-11-21 2005-10-11 Memx, Inc. Tunable MEMS capacitor
US7138694B2 (en) * 2004-03-02 2006-11-21 Analog Devices, Inc. Single crystal silicon sensor with additional layer and method of producing the same
US7068125B2 (en) 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
DE102004015122A1 (de) * 2004-03-27 2005-10-13 Robert Bosch Gmbh Sensor mit integriertem Antriebs- und Detektionsmittel
US7102467B2 (en) 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
WO2006061781A1 (en) * 2004-12-06 2006-06-15 Koninklijke Philips Electronics, N.V. Multisensor assembly
US20070170528A1 (en) 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
EP2016022A2 (en) * 2006-04-19 2009-01-21 Cornell Research Foundation, Inc. Methods and systems for object identification and for authentication
US7824943B2 (en) * 2006-06-04 2010-11-02 Akustica, Inc. Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
EP1998345A1 (en) * 2007-05-31 2008-12-03 Infineon Technologies SensoNor AS Method of manufacturing capacitive elements for a capacitive device
TWI335903B (en) * 2007-10-05 2011-01-11 Pixart Imaging Inc Out-of-plane sensing device
US8076893B2 (en) * 2008-09-04 2011-12-13 The Board Of Trustees Of The University Of Illinois Displacement actuation and sensing for an electrostatic drive
DE102009001381A1 (de) 2009-03-06 2010-09-09 Robert Bosch Gmbh Antriebselement und Verfahren zum Betrieb eines Antriebselements
WO2011147430A1 (de) * 2010-05-26 2011-12-01 Siemens Aktiengesellschaft Vorrichtung und verfahren zur erfassung von schwingungen
DE102010039236B4 (de) * 2010-08-12 2023-06-29 Robert Bosch Gmbh Sensoranordnung und Verfahren zum Abgleich einer Sensoranordnung
US20120211805A1 (en) * 2011-02-22 2012-08-23 Bernhard Winkler Cavity structures for mems devices
DE102011078355B3 (de) * 2011-06-29 2012-10-11 Siemens Aktiengesellschaft Kapazitives Sensorelement zur Detektion einer Verschiebung mit mehreren Elektrodenpaaren und Verfahren zu dessen Betrieb
WO2013030907A1 (ja) * 2011-08-26 2013-03-07 トヨタ自動車株式会社 変位量モニタ電極の構造
DE102012206531B4 (de) 2012-04-17 2015-09-10 Infineon Technologies Ag Verfahren zur Erzeugung einer Kavität innerhalb eines Halbleitersubstrats
US9136136B2 (en) 2013-09-19 2015-09-15 Infineon Technologies Dresden Gmbh Method and structure for creating cavities with extreme aspect ratios
EP3921603A4 (en) * 2019-02-07 2022-03-23 Texas Instruments Incorporated MECHANICAL TOLERANCE COMPENSATION IN A CAPACITIVE SENSING CONTROL ELEMENT
US11499845B2 (en) 2019-02-07 2022-11-15 Texas Instruments Incorporated Compensation of mechanical tolerance in a capacitive sensing control element
CN111766403B (zh) * 2020-07-20 2022-10-04 西安交通大学 一种抗高g值冲击的梳齿微加速度计及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3827962A1 (de) * 1987-08-19 1989-03-02 Samsung Electronics Co Ltd Filter zur unterdrueckung von oberflaechen-interferenzen fuer satellitenkommunikations-empfaenger
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer

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GB1514923A (en) * 1974-07-02 1978-06-21 Plessey Co Ltd Acoustic surface wave filters
US4162465A (en) * 1977-09-14 1979-07-24 University Of Illinois Foundation Surface acoustic wave device with reflection suppression
US4206380A (en) * 1978-12-22 1980-06-03 Hitachi, Ltd. Piezoelectric surface acoustic wave device with suppression of reflected signals
JPS60140917A (ja) * 1983-12-28 1985-07-25 Toshiba Corp 弾性表面波トランスジユ−サ
US4918349A (en) * 1987-11-13 1990-04-17 Hitachi, Ltd. Surface acoustic wave device having apodized transducer provided with irregular pitch electrode group
FR2650919B1 (fr) * 1989-08-10 1992-01-03 Dassault Electronique Dispositif acoustoelectrique a ondes de surface perfectionne
US5481102A (en) * 1994-03-31 1996-01-02 Hazelrigg, Jr.; George A. Micromechanical/microelectromechanical identification devices and methods of fabrication and encoding thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3827962A1 (de) * 1987-08-19 1989-03-02 Samsung Electronics Co Ltd Filter zur unterdrueckung von oberflaechen-interferenzen fuer satellitenkommunikations-empfaenger
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer

Also Published As

Publication number Publication date
KR19990072964A (ko) 1999-09-27
JPH11311635A (ja) 1999-11-09
DE19808549A1 (de) 1999-09-02
KR100572816B1 (ko) 2006-04-24
US6122964A (en) 2000-09-26

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: B81B 1/00 AFI19991009BHDE

8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee