DE19807094A1 - Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation - Google Patents

Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation

Info

Publication number
DE19807094A1
DE19807094A1 DE19807094A DE19807094A DE19807094A1 DE 19807094 A1 DE19807094 A1 DE 19807094A1 DE 19807094 A DE19807094 A DE 19807094A DE 19807094 A DE19807094 A DE 19807094A DE 19807094 A1 DE19807094 A1 DE 19807094A1
Authority
DE
Germany
Prior art keywords
optical element
projection exposure
exposure system
heat
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19807094A
Other languages
German (de)
English (en)
Inventor
Christian Wagner
Michael Trunz
Ralf Hilgers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Priority to DE19807094A priority Critical patent/DE19807094A1/de
Priority to KR1019980057360A priority patent/KR100593429B1/ko
Priority to TW088100316A priority patent/TW401516B/zh
Priority to EP05106797A priority patent/EP1596235B1/de
Priority to DE59914228T priority patent/DE59914228D1/de
Priority to DE59912313T priority patent/DE59912313D1/de
Priority to EP99100845A priority patent/EP0938009B1/de
Priority to JP11035932A priority patent/JPH11287936A/ja
Publication of DE19807094A1 publication Critical patent/DE19807094A1/de
Priority to US09/934,817 priority patent/US7274430B2/en
Priority to US10/826,823 priority patent/US20040207825A1/en
Priority to US12/119,693 priority patent/US20080212052A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70108—Off-axis setting using a light-guiding element, e.g. diffractive optical elements [DOEs] or light guides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE19807094A 1998-02-20 1998-02-20 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation Withdrawn DE19807094A1 (de)

Priority Applications (11)

Application Number Priority Date Filing Date Title
DE19807094A DE19807094A1 (de) 1998-02-20 1998-02-20 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
KR1019980057360A KR100593429B1 (ko) 1998-02-20 1998-12-22 수동형 열 보정에 의한 마이크로리소그래피의 투사형노광 장치 및 광학 장치
TW088100316A TW401516B (en) 1998-02-20 1999-01-11 Optical device and a microlithography projection exposure system with passive thermal compensation
DE59912313T DE59912313D1 (de) 1998-02-20 1999-01-19 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
DE59914228T DE59914228D1 (de) 1998-02-20 1999-01-19 Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
EP05106797A EP1596235B1 (de) 1998-02-20 1999-01-19 Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
EP99100845A EP0938009B1 (de) 1998-02-20 1999-01-19 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
JP11035932A JPH11287936A (ja) 1998-02-20 1999-02-15 受動熱補償を伴う光学構造及びマイクロリソグラフィの投影露光装置
US09/934,817 US7274430B2 (en) 1998-02-20 2001-08-21 Optical arrangement and projection exposure system for microlithography with passive thermal compensation
US10/826,823 US20040207825A1 (en) 1998-02-20 2004-04-15 Optical arrangement and projection exposure system for microlithography with passive thermal compensation
US12/119,693 US20080212052A1 (en) 1998-02-20 2008-05-13 Optical arrangement and projection exposure system for microlithography with passive thermal compensation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19807094A DE19807094A1 (de) 1998-02-20 1998-02-20 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation

Publications (1)

Publication Number Publication Date
DE19807094A1 true DE19807094A1 (de) 1999-08-26

Family

ID=7858359

Family Applications (3)

Application Number Title Priority Date Filing Date
DE19807094A Withdrawn DE19807094A1 (de) 1998-02-20 1998-02-20 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
DE59912313T Expired - Fee Related DE59912313D1 (de) 1998-02-20 1999-01-19 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
DE59914228T Expired - Fee Related DE59914228D1 (de) 1998-02-20 1999-01-19 Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE59912313T Expired - Fee Related DE59912313D1 (de) 1998-02-20 1999-01-19 Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
DE59914228T Expired - Fee Related DE59914228D1 (de) 1998-02-20 1999-01-19 Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation

Country Status (5)

Country Link
EP (2) EP0938009B1 (enExample)
JP (1) JPH11287936A (enExample)
KR (1) KR100593429B1 (enExample)
DE (3) DE19807094A1 (enExample)
TW (1) TW401516B (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963588A1 (de) * 1999-12-29 2001-07-26 Zeiss Carl Optische Anordnung
DE19956353C1 (de) * 1999-11-24 2001-08-09 Zeiss Carl Optische Anordnung
DE10210893A1 (de) * 2002-03-07 2003-09-18 Zeiss Carl Laser Optics Gmbh Optische Anordnung mit einem optischen Bauelement, insbesondere einer Blende
DE102015115929B3 (de) * 2015-09-21 2016-10-06 Jenoptik Optical Systems Gmbh Monolithische Linsenfassung
DE102015115931B3 (de) * 2015-09-21 2016-10-27 Jenoptik Optical Systems Gmbh Spannungsentkoppelte monolithische Linsenfassung
DE102017217107A1 (de) * 2017-09-26 2019-03-28 Robert Bosch Gmbh Anordnung eines optischen Systems und Entwärmungsverfahren
DE102017217111A1 (de) * 2017-09-26 2019-03-28 Robert Bosch Gmbh Anordnung eines optischen Systems und Entwärmungsverfahren

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7274430B2 (en) 1998-02-20 2007-09-25 Carl Zeiss Smt Ag Optical arrangement and projection exposure system for microlithography with passive thermal compensation
DE19959741A1 (de) * 1999-12-10 2001-06-13 Zeiss Carl Vorrichtung zur deformationsarmen Lagerung eines optischen Elementes und Verfahren zur deformationsarmen Lagerung des optischen Elementes
US6621557B2 (en) 2000-01-13 2003-09-16 Nikon Corporation Projection exposure apparatus and exposure methods
DE10151919B4 (de) * 2001-10-20 2007-02-01 Carl Zeiss Smt Ag Belichtungsobjektiv in der Halbleiterlithographie
EP1310829B1 (en) * 2001-11-07 2007-05-02 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2003218023A (ja) * 2002-01-28 2003-07-31 Nikon Corp Ｘ線反射鏡、ｘ線露光転写装置及び半導体デバイスの製造方法
JP4590205B2 (ja) * 2003-05-14 2010-12-01 キヤノン株式会社 ミラー保持方法、光学装置、露光装置、およびデバイス製造方法
GB0511692D0 (en) 2005-06-08 2005-07-13 Digital Projection Ltd Heat transfer apparatus
DE102006021797A1 (de) * 2006-05-09 2007-11-15 Carl Zeiss Smt Ag Optische Abbildungseinrichtung mit thermischer Dämpfung
GB2451684A (en) * 2007-08-09 2009-02-11 Digital Projection Ltd Heat transfer apparatus for cooling a light valve or digital micro mirror
WO2009124590A1 (en) * 2008-04-09 2009-10-15 Carl Zeiss Smt Ag Optical aperture device
DE102009035788B4 (de) * 2009-07-31 2011-06-30 Carl Zeiss Laser Optics GmbH, 73447 Optische Anordnung in einem optischen System, insbesondere einer Beleuchtungseinrichtung
DE102013203032A1 (de) * 2013-02-25 2014-02-27 Carl Zeiss Smt Gmbh Optische Anordnung mit einem optischen Element und einem zusätzlichen Wärmeleitelement
CN103499865B (zh) * 2013-10-10 2015-07-29 中国科学院上海技术物理研究所 一种具有热应力缓冲结构的滤光片安装支架
EP3704546A1 (en) * 2017-10-30 2020-09-09 ASML Holding N.V. Assembly for use in semiconductor photolithography and method of manufacturing same
JP6951498B2 (ja) * 2019-06-25 2021-10-20 キヤノン株式会社 露光装置、露光方法および物品製造方法
IL284361B2 (en) * 2021-06-24 2024-08-01 Rafael Advanced Defense Systems Ltd Temperature balanced spacer

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US4057332A (en) * 1976-04-21 1977-11-08 Caterpillar Tractor Co. Peripherally cooled laser lens assembly
US4155631A (en) * 1977-04-14 1979-05-22 W. J. Schafer Associates, Inc. Apparatus for compensating for thermally introduced distortions in reflecting surfaces
JPS56102392A (en) * 1980-01-22 1981-08-15 Nec Corp Laser working optical device
JPS6037632B2 (ja) * 1983-02-15 1985-08-27 株式会社東芝 固体レ−ザ発振装置
JPS59175178A (ja) * 1983-03-24 1984-10-03 Mitsubishi Electric Corp レ−ザ装置
JPS61208002A (ja) * 1985-03-13 1986-09-16 Toshiba Corp 光透過装置
DE69220868T2 (de) 1991-09-07 1997-11-06 Canon K.K., Tokio/Tokyo System zur Stabilisierung der Formen von optischen Elementen, Belichtungsvorrichtung unter Verwendung dieses Systems und Verfahren zur Herstellung von Halbleitervorrichtungen
JPH05203884A (ja) * 1992-01-24 1993-08-13 Toshiba Corp 光学素子
JP3169267B2 (ja) * 1992-06-17 2001-05-21 パイオニア株式会社 液体プリズム
JP3368091B2 (ja) * 1994-04-22 2003-01-20 キヤノン株式会社 投影露光装置及びデバイスの製造方法
US5881088A (en) * 1997-01-08 1999-03-09 Trw Inc. Face-cooled high-power laser optic cell

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956353C1 (de) * 1999-11-24 2001-08-09 Zeiss Carl Optische Anordnung
US6521877B1 (en) 1999-11-24 2003-02-18 Carl-Zeiss-Stiftung Optical arrangement having improved temperature distribution within an optical element
DE19963588A1 (de) * 1999-12-29 2001-07-26 Zeiss Carl Optische Anordnung
DE19963588C2 (de) * 1999-12-29 2002-01-10 Zeiss Carl Optische Anordnung
US6466382B2 (en) 1999-12-29 2002-10-15 Carl-Zeiss-Stiftung Optical arrangement
DE10210893A1 (de) * 2002-03-07 2003-09-18 Zeiss Carl Laser Optics Gmbh Optische Anordnung mit einem optischen Bauelement, insbesondere einer Blende
DE102015115929B3 (de) * 2015-09-21 2016-10-06 Jenoptik Optical Systems Gmbh Monolithische Linsenfassung
DE102015115931B3 (de) * 2015-09-21 2016-10-27 Jenoptik Optical Systems Gmbh Spannungsentkoppelte monolithische Linsenfassung
US10036869B2 (en) 2015-09-21 2018-07-31 Jenoptik Optical Systems Gmbh Monolithic lens mount
DE102017217107A1 (de) * 2017-09-26 2019-03-28 Robert Bosch Gmbh Anordnung eines optischen Systems und Entwärmungsverfahren
DE102017217111A1 (de) * 2017-09-26 2019-03-28 Robert Bosch Gmbh Anordnung eines optischen Systems und Entwärmungsverfahren

Also Published As

Publication number Publication date
DE59912313D1 (de) 2005-09-01
EP1596235A1 (de) 2005-11-16
JPH11287936A (ja) 1999-10-19
EP0938009B1 (de) 2005-07-27
DE59914228D1 (de) 2007-04-12
EP1596235B1 (de) 2007-02-28
EP0938009A1 (de) 1999-08-25
KR100593429B1 (ko) 2006-10-24
KR19990071443A (ko) 1999-09-27
TW401516B (en) 2000-08-11

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: CARL ZEISS SMT AG, 73447 OBERKOCHEN, DE

8110 Request for examination paragraph 44
8139 Disposal/non-payment of the annual fee