DE1964649A1 - Ionenquelle der Magnetron-Type,insbesondere fuer Gasanalysatoren - Google Patents

Ionenquelle der Magnetron-Type,insbesondere fuer Gasanalysatoren

Info

Publication number
DE1964649A1
DE1964649A1 DE19691964649 DE1964649A DE1964649A1 DE 1964649 A1 DE1964649 A1 DE 1964649A1 DE 19691964649 DE19691964649 DE 19691964649 DE 1964649 A DE1964649 A DE 1964649A DE 1964649 A1 DE1964649 A1 DE 1964649A1
Authority
DE
Germany
Prior art keywords
anode
ion source
gas analyzers
magnetron type
net
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691964649
Other languages
German (de)
English (en)
Inventor
Jack Moreau
Gerard Vassal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cegelec SA
Original Assignee
Cegelec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cegelec SA filed Critical Cegelec SA
Publication of DE1964649A1 publication Critical patent/DE1964649A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/102—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE19691964649 1968-12-31 1969-12-23 Ionenquelle der Magnetron-Type,insbesondere fuer Gasanalysatoren Pending DE1964649A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR183123 1968-12-31

Publications (1)

Publication Number Publication Date
DE1964649A1 true DE1964649A1 (de) 1970-07-23

Family

ID=8659941

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691964649 Pending DE1964649A1 (de) 1968-12-31 1969-12-23 Ionenquelle der Magnetron-Type,insbesondere fuer Gasanalysatoren

Country Status (3)

Country Link
DE (1) DE1964649A1 (enExample)
FR (1) FR1604695A (enExample)
NL (1) NL6919148A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012838A1 (de) * 1978-12-22 1980-07-09 International Business Machines Corporation Ionenquelle, insbesondere für Ionenimplantationsanlagen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012838A1 (de) * 1978-12-22 1980-07-09 International Business Machines Corporation Ionenquelle, insbesondere für Ionenimplantationsanlagen

Also Published As

Publication number Publication date
FR1604695A (enExample) 1972-01-03
NL6919148A (enExample) 1970-07-02

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