DE1964649A1 - Ion source of the magnetron type, especially for gas analyzers - Google Patents

Description

Dipl.-Ing. Dipl. Oec. publ.

DIElSiCIJ 15WINSKY

PATENT ADVOCATE
8 Munich 21 - GolÜrardstr. 81 12/23/1069

Telephone 561762 5-53-1 / ob

neralt; de Constructions Llectriquos et 'iecaniques J ^ rJ ₁ S ^

utjr ia, netron - '^ jpe, especially for gas analyzer

Priority from rl. December 1960 from the French patent application Jr. Io3 123 (Seine)

The jirfindurii ·; relates to an ion source with a cylindrical e ^ inside which the ionizing electrons are generated . and with a controllable focus / iden "! agnetfeld, insbederi; for an -asaniilysator for Ilachvreis of at least 1/1000 share or ο '! llliori.

V> av 0;>^f;'iiiii.ly;.5'itoron ■ .-; (- ■ rden, as is well known, "anyhow high currents d'j :; lGnenatroiiis as well as a' great resolving power demand ;; t Iu remaining,"; en sinl the current needs of Laboratorierierart, at.Λ one must prove 1/1000 share per million; what

lluii j ^ ro ^ er IonLsatlonsleistunf, requires. The ion cells with which blue analyzers are equipped are four of the _three ; and do not meet these requirements!

'.Κ'.λ the Iononorzou uri; · and the'uessunc; Concerning the vacuum, L : }} (: η wox'-ifiti lit. This • Oer'it has an ulne anode and a

iathorio, 1Iq mlfcfiLnander »iroaxl'iL ari '-; are arranged, and weLat den

ι ι ι «a

t964649

Advantage Dinar -rol'en lonLsatlunsleisfcun ": i: i P ^ ensbei ^ e i on. '.,' Ie Oleichun. ·, Ivolciic- the various small nt e iaitein <n! He linked, loudat

1 / pia
RV e "

In this -rleichunr; is ü the an;.; ele; te axial ΐα> netf old! I. ^ r radius of the anode , V the ■ inode K'.bhodon voltage:, η die '.-. "as se und e die Ladun The amplification of Ioaeriotroni on the electron current of such an ion source amounts to about 3000 to 30,000 and more , while with usual ionon levels it amounts to only 0.1 to 1.

The magnetron iafc so far as an ionization shaft and not al. ' Ion source used for path analysis. Fs is adapted n ^Vi ilich poorly for such puncture. The exit of the ions takes place at the end of the device ₃ and the potential distribution; i.it ₃ such that the Ener ;; ieverlust of ions, so teron Cejc'i'-in.li -ke quite remarkable is Incidentally, the Austrittsc'f-'nun- · ^ v "similar kreisf'irnii;; ^ i / aa at p-leichuri cross-section the "Tfnun; ΐ5 .. · 1η1..ο1 des Elekbronenstrahlß"e.'ien over a square corner ΊΊ'ηιιη ■ vei · - enlarged. For the analysis of tiasen it is nuii but necessary-: a very strange bundle of with küii-I .; iinterschle.llLcneii:. · -uili. / h di,; kelten bov / o ^ ten Ioiküi

Der Ει ¹ ! 'Iiidun ₍ ; lle-'t uio Aai "abo:', Ui, i'i.iiuie, oino lo.uüu'uollo dor a; angs .-; tinennen ArI; zu scu: u'.Yen , dL ·; --To ^ e Etuii ;? .t-ions l.el; il.un--

n returns, win them mainly from C-isanaL.vsul>! · <; η Vs? »'lan .ι ·. ci'den dies p; ellri | I at an oololien Eonon [iiel to thereby. via;. '· t; tM'iii', un ■ :: ■; eni'if) die i'.y i.irnku-c'-iiodu · ο ta]. "n \ -. \ o.1iu; t · j porridge · -u.ntt> 1 1. inlen leading rouhbouk tfo. » Ι '\ ϊη: ί luv ".um .u.-lbli«'v> n \ u «Lilt.t ίο · Ι ^ αοη

(IeL olricM '.solo im Li-nenqiu> LL. ^% N.-uMi dor .Ji'i'

; orf'ol-t oils

009830/1178

BATH

Vc /.- t .: ^j iluii ·: de ;; -'otentials parallel to the I-antellines of the anode, thus parallel to your invention ^ el · :; ';'. envisaged exit window vo -jurcli the - ".. ner .-; .. lever lust nerkuar is reduced. In addition, the escape of ions from your invention can do as possible, on uie3e ^r oise the a -.- anrcs mentioned parameters or ti :, "-al shave -. and z * .ja.r while maintaining the extraordinarily v-iUon lo-ij-SHtj onoleistung of the ion source.

TJ: · ΐϊ-, 'clc ^ now is an ion source of the he:? Induncsgemäße kind in e.>R;;ren'jclijrrlc-liivjelse!.;Ei; j. '. Old £ unfiTurun .-' sformen scheraati 1 ' j-Ciiiltt ν ■ ::: ■ ": ■.] 13 cho.ulj ent. Ls a ei; -," en.

'I'. 1 -i; i. Io: ienquelle after the 1 rf indunc in the? Alle- da JtIi; ■ leirtroneii by an aur anode coaxial hot - ctio- .jc eri'.eu. '^ T vjerden ₃ -

-Ί. . λ clii'-ii ciinltt uer Fir; · 1! '". n ^ G of line 2-2,

: I,. ;; oi.i-ii ^ eilBchnitt eirior special arrangement "f-anüß der -.v? iii -, un ^. at which the anode and the dan IIa; netf eld Il tr / .ί.α -OJj (Ic ^T ia; 'iiet only form a single piece, and

i. ^! ! ciiii- 'oitore Ausfüh2 ^j uri ;; sforr-i, in which the electrons lurci. a-.joi plane j ^ lelectrodes with honing l'etentic-, 1 generated -.iu .-. '■: t; i. u? '; so electrons; e: i "ß the principle of ion- ■ • 'u;: lleii -alt to generate cold ilathoae.

■ • Λ. C.-ji- I. · ¹ ' ¹ I. 1 shown ion source is a cathodon- -v · -ht 1 au: -. "- irr.'ti .. l ^; 'n / s of the axis of a cylindrical anode 2 ': \\ i '-'j'"'uet. J.io of a ¹ ". a '; netfeld I ^T from 100 to 300 Oersted'i'jj-c rju ^ rt ■■ h'd, - ■> ?, · .π of einin Hf net 3 ⁱⁿ .it the poles Ά and Π or /. ou 't -.iir! ... I: i "' ronKberoich bilien the electrons a Plasna 'I (" i ■. - ■ *) UJj-; -.rl-: egg-like ions 5 'are grounded by an electrode <\ vι- ·,' :. ''"];"i-'i' ¹ PiOr " ^f jntellinie dor anole 2 running straight line: ¹ 1 · ·" -1, ^ t ι 7 j »id'ton" uii] it.i ° ier Abnou ^ eloktrode 6 ab'-e-;', · - ■ - ·). 1''■.' lic -t - ;. Ji "oiiic ·: or; i tiviii"ot'-ntial of ',' ■ • ι: ■ - " ·";i>i'- - ^ n- ¹ V ht 1 and -He J.oJ tro-lo 6] ii

ι 17b

at a negative potential of 100 to 200 V.

The Eathodendraht 1 is held "t'itsen of Z rel, one of which in part section in Figure 2 illustrates actual although they are not in the _{8chnittebene;} Dar is but above the same. To be analyzed 'las ^T FIRD in the usual 7ei.se. In a space next to which a '.'andun-x part is attached to the magnet 3 and which is the anode 2.

The ion source must be the lirfindunc; ^T -: ann;:; e / i * eniH, ef der Ausfihrun;.:; Sform der 7if · ;. ; 1 various technological iVb'- ^T eiehun "x 3 the up construction of anode 2 and L s up \ jeisen Thus, in the Ausführun ^ SExample the [.?!. A; net 3 to a simple cylindrical '. χ.: ηβ- th 9 reduced; one of the :; exit window 7 of the ΓΊ- ·. 1 and entöT-i ^: eCiiende rectangular opening 7 on'.eist. 3ei der Ausf ührun; ε form of the J ⁷ ! · -; .. ^ the (hot) emitting li ^ tliode durcli z \ is; ol planar electrode 10 is replaced, there is a high cienea between PctentinldiffereriK of nehreren IIA to by the principle of ion sources;:. lilelctronen it kaltKer cathode to erseU'.en . The anode 11]: - · ιηη thereby the formation of the anode 2 dor ^:? 1,;. 1 nit outer. ■ - ia ■ 'have ine part. GIe can also uic both Aucr ^ liruri ^^ fom - he Fi.r. 3 iileichseitifi; serve the iLrzeucuii- ■ of the magnetic field, as in Γ1:;. 3 and - ^r : a? r ;; parts are self-explanatory in an 'enclosed space, the - Ce "usual , - not>r;; est3llt is ii "di: _ non das au anal'-nit ^ '- onae' ias oiuric ^ rrcht

009830/1176

Claims (1)

Dipl.-lng. Dipi. oec. pim'i
Γ * ■■ *: ·:. · ■ ·· ■. · ■ * ■■ '| PATENT ADVERTISER ₂ - _{± o ± C)} * _q 8 Münde ;: 21 - Golitardstr. 81 ^ '* "''' ° "' Telephone 561 762 5 · "53-ϊ / 3υ ■ Ij'öZ -onsrale do Constructions Lloctrioue «et, iecaniques Claims. lone-ii [uolle with an ayllndrisclien anode, inside which .lit.- ioiii-jiüj'oridan ^ lokbronen creates foci., and with elnetu iitju ^ ri.-..'- ;;! focus; ::; Lorenden _ -3. -; net part _{5 in} particular for one! '' .. j.-.-.iiril./ütor zu :. ¹ .tachi-zeis of at least 1/1000 share per • union, '"iadurcii,: el; enua e lehne 1 ₃ α ate the cylinder anode (2) a l"n:;; one of its laritellinien running rectangle - :. es. '■ j.iatv ;. ¹ (7) 2 around the side exit of the ions. i. Ion .aelle according to claim 1, characterized in that the _s Ληου.ο from einom ;; leichzeiti. "; The i-Iaxnetfeld erzeur ^ eiivlen zylino.iun la _o net (9) (Fij; x 3). ft Π α fi 1 Ω / 1 1 7 β BAD ORfGfNAL