FR1604695A - - Google Patents

Info

Publication number
FR1604695A
FR1604695A FR1604695DA FR1604695A FR 1604695 A FR1604695 A FR 1604695A FR 1604695D A FR1604695D A FR 1604695DA FR 1604695 A FR1604695 A FR 1604695A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1604695A publication Critical patent/FR1604695A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/102Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02Vessels; Containers; Shields associated therewith; Vacuum locks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR1604695D 1968-12-31 1968-12-31 Expired FR1604695A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR183123 1968-12-31

Publications (1)

Publication Number Publication Date
FR1604695A true FR1604695A (en) 1972-01-03

Family

ID=8659941

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1604695D Expired FR1604695A (en) 1968-12-31 1968-12-31

Country Status (3)

Country Link
DE (1) DE1964649A1 (en)
FR (1) FR1604695A (en)
NL (1) NL6919148A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855864A1 (en) * 1978-12-22 1980-07-10 Ibm Deutschland ION SOURCE, ESPECIALLY FOR ION IMPLANTATION PLANTS

Also Published As

Publication number Publication date
NL6919148A (en) 1970-07-02
DE1964649A1 (en) 1970-07-23

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Legal Events

Date Code Title Description
ST Notification of lapse