DE1925761A1 - Herstellung von Duennfilmbauelementen - Google Patents
Herstellung von DuennfilmbauelementenInfo
- Publication number
- DE1925761A1 DE1925761A1 DE19691925761 DE1925761A DE1925761A1 DE 1925761 A1 DE1925761 A1 DE 1925761A1 DE 19691925761 DE19691925761 DE 19691925761 DE 1925761 A DE1925761 A DE 1925761A DE 1925761 A1 DE1925761 A1 DE 1925761A1
- Authority
- DE
- Germany
- Prior art keywords
- mask
- pallet
- metal
- graphite
- documents
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000010409 thin film Substances 0.000 title description 6
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 18
- 229910002804 graphite Inorganic materials 0.000 claims description 18
- 239000010439 graphite Substances 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010970 precious metal Substances 0.000 claims description 5
- 229910000510 noble metal Inorganic materials 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 2
- 244000235115 Alocasia x amazonica Species 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 241000282898 Sus scrofa Species 0.000 description 19
- 239000010408 film Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000004927 clay Substances 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 241001220243 Sus scrofa taivanus Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 241001233037 catfish Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US73296568A | 1968-05-29 | 1968-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1925761A1 true DE1925761A1 (de) | 1969-12-11 |
Family
ID=24945637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691925761 Pending DE1925761A1 (de) | 1968-05-29 | 1969-05-21 | Herstellung von Duennfilmbauelementen |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3577325A (OSRAM) |
| BE (1) | BE732733A (OSRAM) |
| DE (1) | DE1925761A1 (OSRAM) |
| FR (1) | FR2009540A1 (OSRAM) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2062101C3 (de) * | 1970-12-17 | 1973-10-25 | Ahlmann-Carlshuette Kg, 2370 Rendsburg | Verfahren zum stellenweisen Auf bringen eines rutschfesten Belages auf den Boden von emaillierten Bade oder Brause wannen aus Stahl oder Gußeisen und Vorrichtung zur Ausfuhrung des Ver fahrens |
| US4049857A (en) * | 1976-07-28 | 1977-09-20 | International Business Machines Corporation | Deposition mask and methods of making same |
| US4261738A (en) * | 1979-10-01 | 1981-04-14 | Arthur D. Little, Inc. | Process for recovering precious metals from bimetallic material |
| US4436797A (en) | 1982-06-30 | 1984-03-13 | International Business Machines Corporation | X-Ray mask |
| US7122224B2 (en) * | 2003-06-11 | 2006-10-17 | General Electric Company | Methods and apparatus for turbine engine component coating |
-
1968
- 1968-05-29 US US732965A patent/US3577325A/en not_active Expired - Lifetime
-
1969
- 1969-05-08 BE BE732733D patent/BE732733A/xx unknown
- 1969-05-08 FR FR6914786A patent/FR2009540A1/fr not_active Withdrawn
- 1969-05-21 DE DE19691925761 patent/DE1925761A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| BE732733A (OSRAM) | 1969-10-16 |
| US3577325A (en) | 1971-05-04 |
| FR2009540A1 (OSRAM) | 1970-02-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2440481C3 (de) | Verfahren zum Herstellen von Dünnschicht-Leiterzügen auf einem elektrisch isolierenden Träger | |
| DE2721086A1 (de) | Verfahren zum abaetzen einer siliziumdioxidschicht von einer unterlage | |
| DE3940087A1 (de) | Verfahren zur herstellung eines gemusterten gegenstands und danach hergestellter gegenstand | |
| DE3906018A1 (de) | Verfahren zum einkapseln von leitern | |
| DE2048915A1 (de) | Verfahren zur Veränderung von Eigen schäften eines metallischen Films | |
| DE1615010B1 (de) | Mit dünnen Filmen mehrlagig beschichtete Unterlage | |
| DE3532858A1 (de) | Verfahren zum anbringen von abschluessen an keramikkoerpern | |
| DE2628327A1 (de) | Verfahren und vorrichtung zum herstellen von mehrschichtkondensatoren | |
| DE1281601B (de) | Verfahren zum Herstellen einer Magnetelementmatrix | |
| DE102009060066B4 (de) | Verfahren zum Herstellen eines elektronischen Bauelements sowie elektronisches Bauelement | |
| DE2304685C3 (de) | Verfahren zur Herstellung mikroskopisch kleiner Metall- oder Metallegierungs-Strukturen | |
| DE1925761A1 (de) | Herstellung von Duennfilmbauelementen | |
| US3678892A (en) | Pallet and mask for substrates | |
| DE2050125A1 (de) | Verfahren zur Herstellung von elektrischen Sicherungselementen | |
| DE3638799A1 (de) | Verfahren zum elektrischen miteinanderverbinden von leitern auf einem substrat sowie dafuer geeignetes substrat | |
| DE1275699B (de) | Verfahren zur Herstellung einer magnetischen Duennschichtanordnung | |
| DE910185C (de) | Verfahren zur Herstellung eines elektrischen Widerstandes aus Metall | |
| DE642447C (de) | Abdeckverfahren fuer Metallisierung von Isolierstoffen durch Kathodenzerstaeubung | |
| DE2165622C3 (de) | Dünnschichtschaltkreis | |
| DE2259182A1 (de) | Verfahren zum herstellen einer matrix zur verwendung in der galvanoformung | |
| DE1665248C3 (de) | Verfahren zur Herstellung eines Trägers für eine miniaturisierte Schaltung | |
| DE69929841T2 (de) | Herstellungsverfahren für einen Dünnschichtwiderstand auf ein Keramik-Polymersubstrat | |
| DE3107857C2 (de) | Verfahren zur Herstellung von Dünnfilmschaltungen mit sehr gut lötbaren Leiterbahnschichtsystemen | |
| DE2706418B2 (de) | Verfahren zur Herstellung eines Temperaturmeßwiderstandes für ein Widerstandsthermometer | |
| DE1285581C2 (de) | Traeger mit einer Mikroschaltung und Verfahren zu seiner Herstellung |