DE1922871B2 - Ionenquelle - Google Patents
IonenquelleInfo
- Publication number
- DE1922871B2 DE1922871B2 DE19691922871 DE1922871A DE1922871B2 DE 1922871 B2 DE1922871 B2 DE 1922871B2 DE 19691922871 DE19691922871 DE 19691922871 DE 1922871 A DE1922871 A DE 1922871A DE 1922871 B2 DE1922871 B2 DE 1922871B2
- Authority
- DE
- Germany
- Prior art keywords
- ion
- target
- ion source
- plate
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 71
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims 2
- 239000013077 target material Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052729 chemical element Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010979 ruby Substances 0.000 description 2
- 229910001750 ruby Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR151943 | 1968-05-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE1922871A1 DE1922871A1 (de) | 1969-11-20 |
DE1922871B2 true DE1922871B2 (de) | 1972-02-17 |
Family
ID=8650281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19691922871 Pending DE1922871B2 (de) | 1968-05-15 | 1969-05-05 | Ionenquelle |
Country Status (8)
Country | Link |
---|---|
US (1) | US3644731A (es) |
BE (1) | BE732190A (es) |
CH (1) | CH510369A (es) |
DE (1) | DE1922871B2 (es) |
ES (1) | ES367221A1 (es) |
FR (1) | FR1580234A (es) |
GB (1) | GB1268813A (es) |
LU (1) | LU58541A1 (es) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3748475A (en) * | 1972-02-17 | 1973-07-24 | T Roberts | Neutron generator axially assisted by laser |
US3944826A (en) * | 1973-07-19 | 1976-03-16 | Applied Research Laboratories Limited | Methods and apparatus for analyzing mixtures |
DE2540505A1 (de) * | 1975-09-11 | 1977-03-24 | Leybold Heraeus Gmbh & Co Kg | Flugzeit-massenspektrometer fuer ionen mit unterschiedlichen energien |
DE2739829C2 (de) * | 1977-09-03 | 1986-04-10 | Gesellschaft für Strahlen- und Umweltforschung mbH, 8000 München | Anordnung zur Analyse einer Probenschicht durch Beschuß mit elektromagnetischer Strahlung |
DE2740183A1 (de) * | 1977-09-07 | 1979-03-08 | Leybold Heraeus Gmbh & Co Kg | Einrichtung zur fokussierung elektromagnetischer strahlung auf eine probe |
JPS57205953A (en) * | 1981-06-12 | 1982-12-17 | Jeol Ltd | Ion source |
DE3201264A1 (de) * | 1982-01-16 | 1983-07-28 | Leybold-Heraeus GmbH, 5000 Köln | Lasermikrosonde |
US4740692A (en) * | 1985-06-13 | 1988-04-26 | Mitsubishi Denki Kabushiki Kaisha | Laser mass spectroscopic analyzer and method |
GB8703012D0 (en) * | 1987-02-10 | 1987-03-18 | Vg Instr Group | Secondary ion mass spectrometer |
JP2564404B2 (ja) * | 1989-09-20 | 1996-12-18 | 株式会社日立製作所 | 質量分析方法 |
US5204530A (en) * | 1991-12-27 | 1993-04-20 | Philippe Chastagner | Noise reduction in negative-ion quadrupole mass spectrometry |
DE19637480C2 (de) * | 1996-09-13 | 2001-02-08 | Thorald Bergmann | Vorrichtung zur massenspektrometrischen Analyse von Oberflächen |
GB2400976B (en) * | 2000-09-06 | 2005-02-09 | Kratos Analytical Ltd | Ion optics system for TOF mass spectrometer |
GB0021902D0 (en) * | 2000-09-06 | 2000-10-25 | Kratos Analytical Ltd | Ion optics system for TOF mass spectrometer |
US20090202692A1 (en) * | 2008-02-11 | 2009-08-13 | Sang Hoon Chun | Seasoning dispenser |
JP5801144B2 (ja) * | 2011-08-30 | 2015-10-28 | 株式会社東芝 | イオン源 |
CN110828281B (zh) * | 2019-11-15 | 2020-10-09 | 中国科学院大连化学物理研究所 | 一种离子富集离子迁移管 |
-
1968
- 1968-05-15 FR FR151943A patent/FR1580234A/fr not_active Expired
-
1969
- 1969-04-28 GB GB21575/69A patent/GB1268813A/en not_active Expired
- 1969-04-28 BE BE732190D patent/BE732190A/xx not_active IP Right Cessation
- 1969-04-29 US US820078A patent/US3644731A/en not_active Expired - Lifetime
- 1969-04-30 LU LU58541D patent/LU58541A1/xx unknown
- 1969-05-05 DE DE19691922871 patent/DE1922871B2/de active Pending
- 1969-05-14 ES ES367221A patent/ES367221A1/es not_active Expired
- 1969-05-14 CH CH738869A patent/CH510369A/fr not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
ES367221A1 (es) | 1971-05-01 |
LU58541A1 (es) | 1969-07-29 |
US3644731A (en) | 1972-02-22 |
CH510369A (fr) | 1971-07-15 |
FR1580234A (es) | 1969-09-05 |
BE732190A (es) | 1969-10-01 |
DE1922871A1 (de) | 1969-11-20 |
GB1268813A (en) | 1972-03-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
E77 | Valid patent as to the heymanns-index 1977 |