DE1808385A1 - Hochvakuumeinrichtung - Google Patents
HochvakuumeinrichtungInfo
- Publication number
- DE1808385A1 DE1808385A1 DE19681808385 DE1808385A DE1808385A1 DE 1808385 A1 DE1808385 A1 DE 1808385A1 DE 19681808385 DE19681808385 DE 19681808385 DE 1808385 A DE1808385 A DE 1808385A DE 1808385 A1 DE1808385 A1 DE 1808385A1
- Authority
- DE
- Germany
- Prior art keywords
- pump
- section
- high vacuum
- getter material
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 55
- 229910052756 noble gas Inorganic materials 0.000 claims description 55
- 150000002500 ions Chemical class 0.000 claims description 50
- 239000007789 gas Substances 0.000 claims description 46
- 238000012360 testing method Methods 0.000 claims description 31
- 150000002835 noble gases Chemical class 0.000 claims description 28
- 108010083687 Ion Pumps Proteins 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000003116 impacting effect Effects 0.000 claims description 3
- 244000025254 Cannabis sativa Species 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 230000002745 absorbent Effects 0.000 claims 1
- 239000002250 absorbent Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 description 28
- 239000003921 oil Substances 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 6
- 239000001307 helium Substances 0.000 description 6
- 229910052734 helium Inorganic materials 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000006199 nebulizer Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 2
- BHMLFPOTZYRDKA-IRXDYDNUSA-N (2s)-2-[(s)-(2-iodophenoxy)-phenylmethyl]morpholine Chemical compound IC1=CC=CC=C1O[C@@H](C=1C=CC=CC=1)[C@H]1OCCNC1 BHMLFPOTZYRDKA-IRXDYDNUSA-N 0.000 description 1
- FDKRWZJDFCVMQQ-UHFFFAOYSA-N 6-[2-aminoethyl(ethyl)amino]-2,3-dihydrophthalazine-1,4-dione Chemical compound O=C1NNC(=O)C=2C1=CC(N(CCN)CC)=CC=2 FDKRWZJDFCVMQQ-UHFFFAOYSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 206010011469 Crying Diseases 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 206010035148 Plague Diseases 0.000 description 1
- 241000342387 Trichilia pallida Species 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013208 measuring procedure Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- NMEHNETUFHBYEG-IHKSMFQHSA-N tttn Chemical compound C([C@@H](C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CC=1C=CC(O)=CC=1)C(=O)N[C@@H](CO)C(=O)N[C@@H](CC=1NC=NC=1)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](C)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](C(C)C)C(=O)NCC(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N1[C@@H](CCC1)C(=O)NCC(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCCN)C(O)=O)NC(=O)[C@H](CC(C)C)NC(=O)[C@H](CCSC)NC(=O)[C@H](CCC(O)=O)NC(=O)[C@H](CCC(O)=O)NC(=O)[C@H](CC(O)=O)NC(=O)[C@@H](NC(=O)[C@H]1N(CCC1)C(=O)[C@H](CCC(N)=O)NC(=O)[C@@H](N)[C@@H](C)O)[C@@H](C)O)C1=CC=CC=C1 NMEHNETUFHBYEG-IHKSMFQHSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US68660967A | 1967-11-29 | 1967-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1808385A1 true DE1808385A1 (de) | 1969-07-17 |
Family
ID=24757020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19681808385 Pending DE1808385A1 (de) | 1967-11-29 | 1968-11-12 | Hochvakuumeinrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3591827A (https=) |
| DE (1) | DE1808385A1 (https=) |
| FR (1) | FR1595764A (https=) |
| GB (1) | GB1245153A (https=) |
| NL (1) | NL6815469A (https=) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3866041A (en) * | 1973-10-23 | 1975-02-11 | Allis Chalmers | Method and apparatus for evaluating the gas content of materials |
| JPS56126733A (en) * | 1980-03-10 | 1981-10-05 | Nippon Sanso Kk | Detecting method for leakage of helium |
| GB2123153A (en) * | 1982-06-30 | 1984-01-25 | Boc Group Plc | Leak detector |
| GB2190204B (en) * | 1986-05-09 | 1990-10-17 | Boc Group Plc | Improvement in leak detectors |
| FR2666410B1 (fr) * | 1990-09-05 | 1993-10-08 | Alcatel Cit | Detecteur de fuite haut flux a trois filtres moleculaires. |
| DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
| US5655886A (en) * | 1995-06-06 | 1997-08-12 | Color Planar Displays, Inc. | Vacuum maintenance device for high vacuum chambers |
| FR2761776B1 (fr) * | 1997-04-03 | 1999-07-23 | Alsthom Cge Alcatel | Detecteur de fuite a gaz traceur |
| TW460943B (en) * | 1997-06-11 | 2001-10-21 | Applied Materials Inc | Reduction of mobile ion and metal contamination in HDP-CVD chambers using chamber seasoning film depositions |
| US6082414A (en) * | 1998-12-03 | 2000-07-04 | Taiwan Semiconductor Manufacturing Company, Ltd | Apparatus and method for replacing an attachment on a vacuum chamber |
| US6498344B1 (en) * | 1999-10-01 | 2002-12-24 | Siemens Energy & Automation, Inc. | Triode ion pump |
| JP4511543B2 (ja) * | 2003-06-11 | 2010-07-28 | バリアン・インコーポレイテッド | 蓄積法による漏れ検出装置および方法 |
| EP1860419B1 (en) * | 2003-06-11 | 2014-02-26 | Agilent Technologies, Inc. | Apparatus for leak detection |
| JP4431145B2 (ja) * | 2003-06-11 | 2010-03-10 | バリアン・インコーポレイテッド | 大規模漏れテスト方法および装置 |
| EP1631806B1 (en) * | 2003-06-11 | 2011-04-20 | Agilent Technologies, Inc. | Methods and apparatus for detection of large leaks in sealed articles |
| AU2003300743A1 (en) * | 2003-12-19 | 2005-07-05 | Tpa Brianza Picc.Soc.Coop.A.R.L. | System and device for leak detection |
| US7030619B2 (en) * | 2004-02-19 | 2006-04-18 | Brooks Automation, Inc. | Ionization gauge |
| US7295015B2 (en) * | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
| DE102004034381A1 (de) * | 2004-07-16 | 2006-02-16 | Inficon Gmbh | Gassensor und Verfahren zum Betreiben einer Getterpumpe |
| KR100773391B1 (ko) * | 2005-09-01 | 2007-11-05 | 한국전기연구원 | 박판 접합 장치 및 이를 이용한 박판 접합 방법 |
| US7459677B2 (en) * | 2006-02-15 | 2008-12-02 | Varian, Inc. | Mass spectrometer for trace gas leak detection with suppression of undesired ions |
| US7427751B2 (en) | 2006-02-15 | 2008-09-23 | Varian, Inc. | High sensitivity slitless ion source mass spectrometer for trace gas leak detection |
| US7429863B2 (en) * | 2006-07-18 | 2008-09-30 | Brooks Automation, Inc. | Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments |
| US7497110B2 (en) * | 2007-02-28 | 2009-03-03 | Varian, Inc. | Methods and apparatus for test gas leak detection |
| US20080202210A1 (en) * | 2007-02-28 | 2008-08-28 | Varian, Inc. | Test gas leak detection using a composite membrane |
| DE102008011686A1 (de) * | 2008-02-28 | 2009-09-03 | Inficon Gmbh | Heliumsensor |
| US9359554B2 (en) | 2012-08-17 | 2016-06-07 | Suncoke Technology And Development Llc | Automatic draft control system for coke plants |
| US9243186B2 (en) | 2012-08-17 | 2016-01-26 | Suncoke Technology And Development Llc. | Coke plant including exhaust gas sharing |
| US9476547B2 (en) | 2012-12-28 | 2016-10-25 | Suncoke Technology And Development Llc | Exhaust flow modifier, duct intersection incorporating the same, and methods therefor |
| CN104884578B (zh) | 2012-12-28 | 2016-06-22 | 太阳焦炭科技和发展有限责任公司 | 通风竖管盖以及相关联的系统和方法 |
| CN104902984B (zh) | 2012-12-28 | 2019-05-31 | 太阳焦炭科技和发展有限责任公司 | 用于去除排放物中的汞的系统和方法 |
| US10883051B2 (en) | 2012-12-28 | 2021-01-05 | Suncoke Technology And Development Llc | Methods and systems for improved coke quenching |
| WO2014105063A1 (en) | 2012-12-28 | 2014-07-03 | Suncoke Technology And Development Llc. | Systems and methods for maintaining a hot car in a coke plant |
| US9273250B2 (en) | 2013-03-15 | 2016-03-01 | Suncoke Technology And Development Llc. | Methods and systems for improved quench tower design |
| US8829425B1 (en) | 2013-05-24 | 2014-09-09 | Bayspec, Inc. | Apparatus and methods for creating a vacuum in a portable mass spectrometer |
| CN105916965B (zh) | 2013-12-31 | 2021-02-23 | 太阳焦炭科技和发展有限责任公司 | 用于焦炉脱碳的方法及相关系统和装置 |
| UA125278C2 (uk) | 2014-09-15 | 2022-02-16 | Санкоук Текнолоджі Енд Дівелепмент Ллк | Коксові печі, що мають конструкцію з монолітних компонентів |
| CN107406773B (zh) | 2014-12-31 | 2021-07-23 | 太阳焦炭科技和发展有限责任公司 | 多模态炼焦材料床 |
| WO2016109854A1 (en) | 2015-01-02 | 2016-07-07 | Suncoke Technology And Development Llc | Integrated coke plant automation and optimization using advanced control and optimization techniques |
| PL3397719T3 (pl) | 2015-12-28 | 2021-02-22 | Suncoke Technology And Development Llc | Sposób i system do dynamicznego załadunku pieca koksowniczego |
| MX387575B (es) | 2016-06-03 | 2025-03-18 | Suncoke Tech & Development Llc | Métodos y sistemas para generar automaticamente una acción correctiva en una instalación industrial. |
| MX2019014017A (es) | 2017-05-23 | 2020-08-17 | Suncoke Tech & Development Llc | Sistema y metodo para reparar un horno de coque. |
| CA3125340C (en) | 2018-12-28 | 2022-04-26 | Suncoke Technology And Development Llc | Spring-loaded heat recovery oven system and method |
| WO2020140079A1 (en) | 2018-12-28 | 2020-07-02 | Suncoke Technology And Development Llc | Decarbonizatign of coke ovens, and associated systems and methods |
| BR112021012598B1 (pt) | 2018-12-28 | 2024-01-23 | Suncoke Technology And Development Llc | Método para detectar um vazamento em um sistema para coqueificar carvão, método para detectar um vazamento de ar em um sistema para coqueificar carvão, método para detectar um vazamento de ar em um sistema para coqueificar carvão sob uma pressão negativa e método para detectar um vazamento de ar entre um sistema de alta pressão e um sistema de baixa pressão |
| WO2020140092A1 (en) | 2018-12-28 | 2020-07-02 | Suncoke Technology And Development Llc | Heat recovery oven foundation |
| WO2020140074A1 (en) | 2018-12-28 | 2020-07-02 | Suncoke Technology And Development Llc | Improved oven uptakes |
| BR122023020289A2 (pt) | 2018-12-31 | 2024-01-23 | SunCoke Technology and Development LLC | Planta de coque e método de modificar um gerador de valor de recuperação de calor (hrsg) |
| CA3125589A1 (en) | 2018-12-31 | 2020-07-09 | Suncoke Technology And Development Llc | Methods and systems for providing corrosion resistant surfaces in contaminant treatment systems |
| WO2021134071A1 (en) | 2019-12-26 | 2021-07-01 | Suncoke Technology And Development Llc | Oven health optimization systems and methods |
| WO2021225988A1 (en) | 2020-05-03 | 2021-11-11 | Suncoke Technology And Development Llc | High-quality coke products |
| MX2023013069A (es) | 2021-05-04 | 2023-12-14 | Suncoke Tech & Development Llc | Productos de coque de fundición y sistemas y métodos asociados. |
| US11946108B2 (en) | 2021-11-04 | 2024-04-02 | Suncoke Technology And Development Llc | Foundry coke products and associated processing methods via cupolas |
| US11851724B2 (en) | 2021-11-04 | 2023-12-26 | Suncoke Technology And Development Llc. | Foundry coke products, and associated systems, devices, and methods |
| DE102022111596A1 (de) * | 2022-05-10 | 2023-11-16 | Inficon Gmbh | Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling |
| EP4612261A1 (en) | 2022-11-04 | 2025-09-10 | Suncoke Technology and Development LLC | Coal blends, foundry coke products, and associated systems, devices, and methods |
| WO2025111437A1 (en) | 2023-11-21 | 2025-05-30 | Suncoke Technology And Development Llc | Flat push hot car for foundry coke and associated systems and methods |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2486199A (en) * | 1945-09-10 | 1949-10-25 | Univ Minnesota | Method and apparatus for determining leaks |
| DE1302826B (https=) * | 1962-07-16 | Ges Fuer Kernforschung Mbh | ||
| US3391303A (en) * | 1965-01-25 | 1968-07-02 | Lewis D. Hall | Electronic vacuum pump including a sputter electrode |
-
1967
- 1967-11-29 US US686609A patent/US3591827A/en not_active Expired - Lifetime
-
1968
- 1968-10-30 NL NL6815469A patent/NL6815469A/xx unknown
- 1968-11-12 DE DE19681808385 patent/DE1808385A1/de active Pending
- 1968-11-26 FR FR1595764D patent/FR1595764A/fr not_active Expired
- 1968-11-26 GB GB55987/68A patent/GB1245153A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6815469A (https=) | 1969-06-02 |
| GB1245153A (en) | 1971-09-08 |
| US3591827A (en) | 1971-07-06 |
| FR1595764A (https=) | 1970-06-15 |
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