DE1804028C3 - Ablesevorrichtung für Meßteilungen oder andere periodische Objekte - Google Patents
Ablesevorrichtung für Meßteilungen oder andere periodische ObjekteInfo
- Publication number
- DE1804028C3 DE1804028C3 DE1804028A DE1804028A DE1804028C3 DE 1804028 C3 DE1804028 C3 DE 1804028C3 DE 1804028 A DE1804028 A DE 1804028A DE 1804028 A DE1804028 A DE 1804028A DE 1804028 C3 DE1804028 C3 DE 1804028C3
- Authority
- DE
- Germany
- Prior art keywords
- signals
- measuring
- raster
- photoelectric
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000737 periodic effect Effects 0.000 title claims 3
- 238000003384 imaging method Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 3
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 238000009834 vaporization Methods 0.000 claims 1
- 239000002699 waste material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1804028A DE1804028C3 (de) | 1968-10-19 | 1968-10-19 | Ablesevorrichtung für Meßteilungen oder andere periodische Objekte |
| GB49821/69A GB1237040A (en) | 1968-10-19 | 1969-10-10 | Photoelectric digital transmission arrangement |
| FR6935027A FR2021062A1 (show.php) | 1968-10-19 | 1969-10-13 | |
| US866845A US3573468A (en) | 1968-10-19 | 1969-10-16 | Photoelectric incremental transducer for 4-phase signals comprising means for geometrically splitting the light beams |
| CH1556269A CH488167A (de) | 1968-10-19 | 1969-10-17 | Fotoelektrischer Schrittgeber für Vierphasen-Signale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1804028A DE1804028C3 (de) | 1968-10-19 | 1968-10-19 | Ablesevorrichtung für Meßteilungen oder andere periodische Objekte |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE1804028A1 DE1804028A1 (de) | 1970-05-21 |
| DE1804028B2 DE1804028B2 (de) | 1974-09-19 |
| DE1804028C3 true DE1804028C3 (de) | 1975-04-30 |
Family
ID=5710939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1804028A Expired DE1804028C3 (de) | 1968-10-19 | 1968-10-19 | Ablesevorrichtung für Meßteilungen oder andere periodische Objekte |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3573468A (show.php) |
| CH (1) | CH488167A (show.php) |
| DE (1) | DE1804028C3 (show.php) |
| FR (1) | FR2021062A1 (show.php) |
| GB (1) | GB1237040A (show.php) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2163200C2 (de) * | 1971-12-20 | 1983-06-09 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Einrichtung zur berührungslosen Messung |
| DE2835390A1 (de) | 1978-08-12 | 1980-02-21 | Leitz Ernst Gmbh | Optischer korrelator |
| US4427883A (en) | 1981-05-27 | 1984-01-24 | The Stanley Works | Optical sensing system for extensible tape rules |
| GB8729246D0 (en) * | 1987-12-15 | 1988-01-27 | Renishaw Plc | Opto-electronic scale-reading apparatus |
| DE3807011C1 (show.php) * | 1988-03-04 | 1989-04-27 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De | |
| EP0419701B1 (de) * | 1989-09-27 | 1993-06-09 | Dr. Johannes Heidenhain GmbH | Winkelmesseinrichtung |
| CN109307936B (zh) * | 2018-11-28 | 2020-11-20 | 湖北华中光电科技有限公司 | 一种加快天文定向器瞄准速度的辅助装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1548703B2 (de) * | 1966-07-16 | 1971-04-15 | Ernst Leitz Gmbh, 6330 Wetzlar | Fotoelektrischer schrittgeber fuer vierphasen signale |
-
1968
- 1968-10-19 DE DE1804028A patent/DE1804028C3/de not_active Expired
-
1969
- 1969-10-10 GB GB49821/69A patent/GB1237040A/en not_active Expired
- 1969-10-13 FR FR6935027A patent/FR2021062A1/fr not_active Withdrawn
- 1969-10-16 US US866845A patent/US3573468A/en not_active Expired - Lifetime
- 1969-10-17 CH CH1556269A patent/CH488167A/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| GB1237040A (en) | 1971-06-30 |
| FR2021062A1 (show.php) | 1970-07-17 |
| US3573468A (en) | 1971-04-06 |
| CH488167A (de) | 1970-03-31 |
| DE1804028A1 (de) | 1970-05-21 |
| DE1804028B2 (de) | 1974-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3926349C2 (show.php) | ||
| DE2161405A1 (de) | Optische Vorrichtung zur Bestimmung des Ortes eines Punktes auf einer Flache | |
| CH678663A5 (show.php) | ||
| DE3337874A1 (de) | Optisches system zur erfassung von ausrichtungsmarken | |
| DE2518047A1 (de) | Interferometer | |
| DE3110287A1 (de) | Druckgeraet mit scharfeinstelldetektor | |
| EP3101385A1 (de) | Vorrichtung und verfahren zur erfassung von oberflächentopographien | |
| EP0908709B1 (de) | Vorrichtung zur berührungslosen Schwingungsmessung | |
| DE2822027B2 (de) | Vorrichtung zur Scharfeinstellung des Objektivs einer einäugigen Spiegelreflexkamera | |
| DE1804028C3 (de) | Ablesevorrichtung für Meßteilungen oder andere periodische Objekte | |
| DE2846696C2 (de) | Automatische Scharfeinstelleinrichtung für ein optisches Abbildungssystem | |
| DE2811817B2 (show.php) | ||
| DE602005001961T2 (de) | Optischer Axialverschiebungssensor | |
| DE2451668A1 (de) | Anordnung zur geometrischen trennung von lichtfluessen in abbildungssystemen | |
| DE102011001289B4 (de) | Vorrichtung zur optischen Erfassung von Prüfobjekten | |
| DE102014222271B4 (de) | Maskeninspektionssystem zur Inspektion von Lithographiemasken | |
| DE102022116214A1 (de) | Messkamera und Verfahren zur zweidimensionalen Vermessung von Gegenständen | |
| DE2026340A1 (de) | Fokusslereinrichtung fur afokale Fernrohre | |
| DE1813743A1 (de) | Anordnung zur Abtastung eines Feldes in zwei Richtungen | |
| DE2628836C3 (de) | Optischer Phasendiskriminator | |
| DE10236218B4 (de) | Verfahren zur Messung der Überdeckung von kontrastarmen Strukturmerkmalen | |
| DE2637844A1 (de) | Verfahren und anordnung zur getrennten auswertung von bildinhalten nach zwei koordinatenrichtungen der bewegung | |
| EP1805476A1 (de) | Interferometer mit einer spiegelanordnung zur vermessung eines messobjektes | |
| EP2767797B1 (de) | Niedrigkohärenzinterferometer und Verfahren zur ortsaufgelösten optischen Vermessung des Oberflächenprofils eines Objekts | |
| DE3423142A1 (de) | Vorrichtung zur schaerfeermittlung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |