DE17783234T1 - Verfahren, system und vorrichtung zur abgabe von prozessgas - Google Patents
Verfahren, system und vorrichtung zur abgabe von prozessgas Download PDFInfo
- Publication number
- DE17783234T1 DE17783234T1 DE17783234.2T DE17783234T DE17783234T1 DE 17783234 T1 DE17783234 T1 DE 17783234T1 DE 17783234 T DE17783234 T DE 17783234T DE 17783234 T1 DE17783234 T1 DE 17783234T1
- Authority
- DE
- Germany
- Prior art keywords
- vapor phase
- solution
- carrier gas
- vapor
- hydrazine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract 27
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims abstract 20
- 239000000126 substance Substances 0.000 claims abstract 16
- 239000012808 vapor phase Substances 0.000 claims abstract 14
- 239000012159 carrier gas Substances 0.000 claims abstract 11
- 239000007789 gas Substances 0.000 claims abstract 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims abstract 9
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 claims abstract 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract 6
- GUVUOGQBMYCBQP-UHFFFAOYSA-N dmpu Chemical compound CN1CCCN(C)C1=O GUVUOGQBMYCBQP-UHFFFAOYSA-N 0.000 claims abstract 6
- 239000002904 solvent Substances 0.000 claims abstract 6
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 claims abstract 3
- 239000007788 liquid Substances 0.000 claims abstract 3
- YPFDHNVEDLHUCE-UHFFFAOYSA-N propane-1,3-diol Chemical compound OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims abstract 3
- 235000013772 propylene glycol Nutrition 0.000 claims abstract 3
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 claims abstract 3
- 239000000243 solution Substances 0.000 claims 15
- 239000007864 aqueous solution Substances 0.000 claims 6
- 239000012528 membrane Substances 0.000 claims 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 229910021529 ammonia Inorganic materials 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 2
- 239000001307 helium Substances 0.000 claims 2
- 229910052734 helium Inorganic materials 0.000 claims 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 239000003014 ion exchange membrane Substances 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 239000012466 permeate Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
- B01D53/44—Organic components
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
- B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
- B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/36—Pervaporation; Membrane distillation; Liquid permeation
- B01D61/363—Vapour permeation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/02—Hollow fibre modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/30—Polyalkenyl halides
- B01D71/32—Polyalkenyl halides containing fluorine atoms
- B01D71/36—Polytetrafluoroethene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C11/00—Use of gas-solvents or gas-sorbents in vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D2053/221—Devices
- B01D2053/223—Devices with hollow tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/42—Ion-exchange membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/08—Hollow fibre membranes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Environmental & Geological Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Water Supply & Treatment (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662323697P | 2016-04-16 | 2016-04-16 | |
| US201662323697P | 2016-04-16 | ||
| PCT/US2017/027634 WO2017181013A1 (en) | 2016-04-16 | 2017-04-14 | Method, system, and device for delivery of process gas |
| EP17783234.2A EP3442691A4 (en) | 2016-04-16 | 2017-04-14 | METHOD, SYSTEM AND DEVICE FOR DISTRIBUTION OF PROCESS GAS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE17783234T1 true DE17783234T1 (de) | 2019-06-27 |
Family
ID=60042719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE17783234.2T Pending DE17783234T1 (de) | 2016-04-16 | 2017-04-14 | Verfahren, system und vorrichtung zur abgabe von prozessgas |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP3442691A4 (ja) |
| JP (1) | JP6918921B2 (ja) |
| KR (1) | KR102483803B1 (ja) |
| CN (1) | CN109152990B (ja) |
| DE (1) | DE17783234T1 (ja) |
| WO (1) | WO2017181013A1 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10150048B2 (en) | 2014-10-23 | 2018-12-11 | Rasirc, Inc. | Method, system, and device for delivery of process gas |
| JP7141395B2 (ja) * | 2016-12-01 | 2022-09-22 | ラシルク，インコーポレイテッド | ガス供給システムにおける過酸化水素の分解を抑制する方法、システム、および装置 |
| US11471816B2 (en) * | 2019-03-11 | 2022-10-18 | Karim Salehpoor | Pollutant capturer and mobilizer |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2785052A (en) * | 1951-06-22 | 1957-03-12 | Metalectro Corp | Production of hydrazine |
| US2865714A (en) * | 1954-08-02 | 1958-12-23 | Guggenheim Brothers | Production of anhydrous hydrazine |
| US3557009A (en) * | 1967-05-15 | 1971-01-19 | Norac Co | Nonhazardous polymerization initiators |
| LU85789A1 (fr) * | 1985-02-26 | 1986-09-02 | Oreal | Utilisation dans les domaines therapeutique et cosmetique d'une solution anhydre de peroxyde d'hydrogene |
| JPH04154193A (ja) * | 1990-10-18 | 1992-05-27 | Mitsubishi Gas Chem Co Inc | 多層プリント板の製造法 |
| JPH07230953A (ja) * | 1994-02-15 | 1995-08-29 | Sumitomo Chem Co Ltd | ３ｂ−５ｂ族化合物半導体の気相成長方法 |
| JP4232264B2 (ja) | 1999-03-26 | 2009-03-04 | 株式会社Ｉｈｉ | 窒化物半導体の製造方法および製造装置 |
| FR2802829B1 (fr) * | 1999-12-24 | 2002-05-17 | Atofina | Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre |
| FR2815956B1 (fr) * | 2000-10-26 | 2003-05-23 | Atofina | Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre |
| CA2867883C (en) | 2012-03-28 | 2020-06-02 | Rasirc, Inc. | Method of delivering a process gas from a multi-component solution |
| WO2014014511A1 (en) * | 2012-07-16 | 2014-01-23 | Rasirc | Method, system, and device for delivery of high purity hydrogen peroxide |
| KR102192990B1 (ko) * | 2013-04-05 | 2020-12-18 | 라시크 아이엔씨. | 고농도 과산화수소 가스 스트림의 공급 |
| WO2016065132A1 (en) * | 2014-10-23 | 2016-04-28 | Rasirc, Inc. | Method, system, and device for delivery of process gas |
-
2017
- 2017-04-14 WO PCT/US2017/027634 patent/WO2017181013A1/en active Application Filing
- 2017-04-14 JP JP2019505137A patent/JP6918921B2/ja active Active
- 2017-04-14 CN CN201780029147.5A patent/CN109152990B/zh active Active
- 2017-04-14 KR KR1020187031690A patent/KR102483803B1/ko active IP Right Grant
- 2017-04-14 DE DE17783234.2T patent/DE17783234T1/de active Pending
- 2017-04-14 EP EP17783234.2A patent/EP3442691A4/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP3442691A4 (en) | 2019-12-18 |
| KR102483803B1 (ko) | 2022-12-30 |
| CN109152990A (zh) | 2019-01-04 |
| JP6918921B2 (ja) | 2021-08-11 |
| EP3442691A1 (en) | 2019-02-20 |
| JP2019521948A (ja) | 2019-08-08 |
| WO2017181013A1 (en) | 2017-10-19 |
| CN109152990B (zh) | 2021-11-09 |
| KR20180135915A (ko) | 2018-12-21 |
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