DE1764917A1 - Ionenpumpe - Google Patents
IonenpumpeInfo
- Publication number
- DE1764917A1 DE1764917A1 DE19681764917 DE1764917A DE1764917A1 DE 1764917 A1 DE1764917 A1 DE 1764917A1 DE 19681764917 DE19681764917 DE 19681764917 DE 1764917 A DE1764917 A DE 1764917A DE 1764917 A1 DE1764917 A1 DE 1764917A1
- Authority
- DE
- Germany
- Prior art keywords
- anode
- ions
- cathode
- ion
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 title claims description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 10
- 238000000889 atomisation Methods 0.000 claims description 9
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- 241000272517 Anseriformes Species 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 48
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 20
- 239000000463 material Substances 0.000 description 15
- 238000004544 sputter deposition Methods 0.000 description 15
- 229910052786 argon Inorganic materials 0.000 description 10
- 238000005086 pumping Methods 0.000 description 9
- 229910052756 noble gas Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000002835 noble gases Chemical class 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 101100072702 Drosophila melanogaster defl gene Proteins 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66883967A | 1967-09-19 | 1967-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1764917A1 true DE1764917A1 (de) | 1971-12-02 |
Family
ID=24683943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19681764917 Pending DE1764917A1 (de) | 1967-09-19 | 1968-09-04 | Ionenpumpe |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3452923A (enrdf_load_stackoverflow) |
| DE (1) | DE1764917A1 (enrdf_load_stackoverflow) |
| FR (1) | FR1586208A (enrdf_load_stackoverflow) |
| GB (1) | GB1228207A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6004104A (en) * | 1997-07-14 | 1999-12-21 | Duniway Stockroom Corp. | Cathode structure for sputter ion pump |
| US6228149B1 (en) | 1999-01-20 | 2001-05-08 | Patterson Technique, Inc. | Method and apparatus for moving, filtering and ionizing air |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| US10665437B2 (en) * | 2015-02-10 | 2020-05-26 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| US10550829B2 (en) * | 2016-09-08 | 2020-02-04 | Edwards Vacuum Llc | Ion trajectory manipulation architecture in an ion pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1289986A (fr) * | 1960-05-27 | 1962-04-06 | Varian Associates | Appareil à effluves |
| US3292844A (en) * | 1962-05-23 | 1966-12-20 | Robert A Cornog | Vacuum pump |
-
1967
- 1967-09-19 US US668839A patent/US3452923A/en not_active Expired - Lifetime
-
1968
- 1968-09-04 DE DE19681764917 patent/DE1764917A1/de active Pending
- 1968-09-16 FR FR1586208D patent/FR1586208A/fr not_active Expired
- 1968-09-16 GB GB1228207D patent/GB1228207A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3452923A (en) | 1969-07-01 |
| GB1228207A (enrdf_load_stackoverflow) | 1971-04-15 |
| FR1586208A (enrdf_load_stackoverflow) | 1970-02-13 |
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