DE1665236A1 - Stabile Widerstandsschicht aus NiCr - Google Patents
Stabile Widerstandsschicht aus NiCrInfo
- Publication number
- DE1665236A1 DE1665236A1 DE19671665236 DE1665236A DE1665236A1 DE 1665236 A1 DE1665236 A1 DE 1665236A1 DE 19671665236 DE19671665236 DE 19671665236 DE 1665236 A DE1665236 A DE 1665236A DE 1665236 A1 DE1665236 A1 DE 1665236A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- resistance
- nickel
- pressure
- chrome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 title description 5
- 229910001120 nichrome Inorganic materials 0.000 title description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 18
- 238000007740 vapor deposition Methods 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000006641 stabilisation Effects 0.000 description 4
- 238000011105 stabilization Methods 0.000 description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 235000008694 Humulus lupulus Nutrition 0.000 description 1
- 244000025221 Humulus lupulus Species 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6603768A NL6603768A (enrdf_load_stackoverflow) | 1966-03-23 | 1966-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1665236A1 true DE1665236A1 (de) | 1971-01-21 |
Family
ID=19796062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671665236 Pending DE1665236A1 (de) | 1966-03-23 | 1967-03-20 | Stabile Widerstandsschicht aus NiCr |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3472691A (enrdf_load_stackoverflow) |
| AT (1) | AT274966B (enrdf_load_stackoverflow) |
| CH (1) | CH464644A (enrdf_load_stackoverflow) |
| DE (1) | DE1665236A1 (enrdf_load_stackoverflow) |
| FR (1) | FR1515479A (enrdf_load_stackoverflow) |
| GB (1) | GB1133402A (enrdf_load_stackoverflow) |
| NL (1) | NL6603768A (enrdf_load_stackoverflow) |
| SE (1) | SE305994B (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2902244A1 (de) * | 1979-01-20 | 1980-07-24 | Heraeus Gmbh W C | Dehnungsmesstreifen mit aufgedampftem oder aufgestaeubtem messgitter |
| DE3429607A1 (de) * | 1984-08-09 | 1986-02-20 | Klaus 1000 Berlin Oppermann | Messwertaufnehmer zum elektrischen messen von kraeften, druecken und spannungen |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3607384A (en) * | 1968-07-11 | 1971-09-21 | Western Electric Co | Thin-film resistors having positive resistivity profiles |
| US3637421A (en) * | 1969-08-27 | 1972-01-25 | Joseph Paul Gimigliano | Vacuum vapor coating with metals of high vapor pressure |
| US3833410A (en) * | 1971-12-30 | 1974-09-03 | Trw Inc | High stability thin film alloy resistors |
| CN116105901A (zh) * | 2021-11-11 | 2023-05-12 | 西安交通大学苏州研究院 | 一种薄膜压力传感器及其制备方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2586752A (en) * | 1946-09-26 | 1952-02-19 | Polytechnic Inst Brooklyn | Alloy resistance element and method for manufacturing same |
| US2882377A (en) * | 1951-10-24 | 1959-04-14 | Pittsburgh Plate Glass Co | Electrical resistor metal coatings on refractory materials |
| US3059197A (en) * | 1952-06-07 | 1962-10-16 | John G Ruckelshaus | Potentiometer |
| US2962393A (en) * | 1953-04-21 | 1960-11-29 | John G Ruckelshaus | Method of preparing electrical resistors |
| US2981611A (en) * | 1956-03-14 | 1961-04-25 | Metropolitanvickers Electrical | Manufacture of printed electrical circuits or components |
-
1966
- 1966-03-23 NL NL6603768A patent/NL6603768A/xx unknown
-
1967
- 1967-03-17 US US623924A patent/US3472691A/en not_active Expired - Lifetime
- 1967-03-20 CH CH398367A patent/CH464644A/de unknown
- 1967-03-20 SE SE3839/67A patent/SE305994B/xx unknown
- 1967-03-20 AT AT263967A patent/AT274966B/de active
- 1967-03-20 GB GB12864/67A patent/GB1133402A/en not_active Expired
- 1967-03-20 DE DE19671665236 patent/DE1665236A1/de active Pending
- 1967-03-22 FR FR99791A patent/FR1515479A/fr not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2902244A1 (de) * | 1979-01-20 | 1980-07-24 | Heraeus Gmbh W C | Dehnungsmesstreifen mit aufgedampftem oder aufgestaeubtem messgitter |
| DE3429607A1 (de) * | 1984-08-09 | 1986-02-20 | Klaus 1000 Berlin Oppermann | Messwertaufnehmer zum elektrischen messen von kraeften, druecken und spannungen |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6603768A (enrdf_load_stackoverflow) | 1967-09-25 |
| GB1133402A (en) | 1968-11-13 |
| AT274966B (de) | 1969-10-10 |
| FR1515479A (fr) | 1968-03-01 |
| CH464644A (de) | 1968-10-31 |
| US3472691A (en) | 1969-10-14 |
| SE305994B (enrdf_load_stackoverflow) | 1968-11-11 |
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