DE1589060A1 - Duennschicht-Kondensatoren aus ss-Tantal - Google Patents
Duennschicht-Kondensatoren aus ss-TantalInfo
- Publication number
- DE1589060A1 DE1589060A1 DE19661589060 DE1589060A DE1589060A1 DE 1589060 A1 DE1589060 A1 DE 1589060A1 DE 19661589060 DE19661589060 DE 19661589060 DE 1589060 A DE1589060 A DE 1589060A DE 1589060 A1 DE1589060 A1 DE 1589060A1
- Authority
- DE
- Germany
- Prior art keywords
- tantalum
- electrode
- thin
- capacitors
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052715 tantalum Inorganic materials 0.000 title claims description 60
- 239000003990 capacitor Substances 0.000 title claims description 59
- 239000010409 thin film Substances 0.000 title claims description 32
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title description 19
- 238000000034 method Methods 0.000 claims description 13
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000012360 testing method Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000007743 anodising Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005088 metallography Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/10—Metal-oxide dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Inorganic Insulating Materials (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48038365A | 1965-08-17 | 1965-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1589060A1 true DE1589060A1 (de) | 1970-01-02 |
Family
ID=23907747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661589060 Pending DE1589060A1 (de) | 1965-08-17 | 1966-08-02 | Duennschicht-Kondensatoren aus ss-Tantal |
Country Status (10)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2300813A1 (de) * | 1972-01-14 | 1973-07-26 | Western Electric Co | Verfahren zum niederschlagen von stickstoffdotiertem beta-tantal sowie eine beta-tantal-duennschicht aufweisender artikel |
| DE2513858A1 (de) * | 1975-03-27 | 1976-09-30 | Siemens Ag | Verfahren zur herstellung eines tantal-duennschichtkondensators |
-
1966
- 1966-07-04 IL IL2608666A patent/IL26086A/xx unknown
- 1966-08-02 DE DE19661589060 patent/DE1589060A1/de active Pending
- 1966-08-03 ES ES0330267A patent/ES330267A1/es not_active Expired
- 1966-08-04 SE SE1061066A patent/SE327011B/xx unknown
- 1966-08-09 JP JP5195766A patent/JPS497434B1/ja active Pending
- 1966-08-10 AT AT766666A patent/AT266276B/de active
- 1966-08-11 BE BE685408D patent/BE685408A/xx unknown
- 1966-08-12 CH CH1164366A patent/CH455942A/de unknown
- 1966-08-16 GB GB3658066A patent/GB1157903A/en not_active Expired
- 1966-08-17 NL NL6611578A patent/NL153012B/xx not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2300813A1 (de) * | 1972-01-14 | 1973-07-26 | Western Electric Co | Verfahren zum niederschlagen von stickstoffdotiertem beta-tantal sowie eine beta-tantal-duennschicht aufweisender artikel |
| DE2513858A1 (de) * | 1975-03-27 | 1976-09-30 | Siemens Ag | Verfahren zur herstellung eines tantal-duennschichtkondensators |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1157903A (en) | 1969-07-09 |
| BE685408A (US06826419-20041130-M00005.png) | 1967-01-16 |
| JPS497434B1 (US06826419-20041130-M00005.png) | 1974-02-20 |
| AT266276B (de) | 1968-11-11 |
| SE327011B (US06826419-20041130-M00005.png) | 1970-08-10 |
| NL153012B (nl) | 1977-04-15 |
| IL26086A (en) | 1970-07-19 |
| CH455942A (de) | 1968-05-15 |
| NL6611578A (US06826419-20041130-M00005.png) | 1967-02-20 |
| ES330267A1 (es) | 1967-06-16 |
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