DE1521525B1 - Verfahren und Vorrichtung zum Herstellen von UEberzuegen,insbesondere auf flaechigen Traegerunterlagen,durch Vakuumaufdampfen - Google Patents
Verfahren und Vorrichtung zum Herstellen von UEberzuegen,insbesondere auf flaechigen Traegerunterlagen,durch VakuumaufdampfenInfo
- Publication number
- DE1521525B1 DE1521525B1 DE19641521525 DE1521525A DE1521525B1 DE 1521525 B1 DE1521525 B1 DE 1521525B1 DE 19641521525 DE19641521525 DE 19641521525 DE 1521525 A DE1521525 A DE 1521525A DE 1521525 B1 DE1521525 B1 DE 1521525B1
- Authority
- DE
- Germany
- Prior art keywords
- crucible
- evaporator crucible
- evaporator
- rotation
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000007738 vacuum evaporation Methods 0.000 title 1
- 239000000463 material Substances 0.000 claims description 49
- 230000008020 evaporation Effects 0.000 claims description 14
- 238000001704 evaporation Methods 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 13
- 239000012768 molten material Substances 0.000 claims description 13
- 238000009835 boiling Methods 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 239000006200 vaporizer Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 1
- 239000011819 refractory material Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 229910052726 zirconium Inorganic materials 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 6
- 229910052758 niobium Inorganic materials 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000003517 fume Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000723368 Conium Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000005426 magnetic field effect Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/16—Remelting metals
- C22B9/22—Remelting metals with heating by wave energy or particle radiation
- C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US287386A US3329524A (en) | 1963-06-12 | 1963-06-12 | Centrifugal-type vapor source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1521525B1 true DE1521525B1 (de) | 1970-03-12 |
Family
ID=23102660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19641521525 Withdrawn DE1521525B1 (de) | 1963-06-12 | 1964-06-12 | Verfahren und Vorrichtung zum Herstellen von UEberzuegen,insbesondere auf flaechigen Traegerunterlagen,durch Vakuumaufdampfen |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3329524A (enExample) |
| JP (1) | JPS519687B1 (enExample) |
| AT (1) | AT252683B (enExample) |
| BE (1) | BE649234A (enExample) |
| CH (1) | CH452312A (enExample) |
| DE (1) | DE1521525B1 (enExample) |
| DK (1) | DK128824B (enExample) |
| FR (1) | FR1406666A (enExample) |
| GB (1) | GB1031963A (enExample) |
| LU (1) | LU46281A1 (enExample) |
| NL (1) | NL6406691A (enExample) |
| SE (1) | SE315461B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2296457A1 (fr) * | 1975-01-06 | 1976-07-30 | Jersey Nuclear Avco Isotopes | Source de vapeur d'un metal a temperature elevee de vaporisation |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3467058A (en) * | 1965-12-03 | 1969-09-16 | United States Steel Corp | Apparatus for vaporizing metal |
| US3384049A (en) * | 1966-10-27 | 1968-05-21 | Emil R. Capita | Vapor deposition apparatus including centrifugal force substrate-holding means |
| US3659552A (en) * | 1966-12-15 | 1972-05-02 | Western Electric Co | Vapor deposition apparatus |
| US3502499A (en) * | 1967-05-22 | 1970-03-24 | Texas Instruments Inc | Cladding method and apparatus |
| US3552352A (en) * | 1968-02-13 | 1971-01-05 | Du Pont | Electron beam vaporization coating apparatus |
| US3572672A (en) * | 1968-11-22 | 1971-03-30 | Rca Corp | Vacuum evaporation apparatus |
| US3661117A (en) * | 1969-12-03 | 1972-05-09 | Stanford Research Inst | Apparatus for depositing thin lines |
| US3613633A (en) * | 1970-03-18 | 1971-10-19 | Schjeldahl Co G T | Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible |
| US3684268A (en) * | 1970-04-17 | 1972-08-15 | Optical Coating Laboratory Inc | Source for evaporating materials |
| US3776535A (en) * | 1970-04-17 | 1973-12-04 | Optical Coating Laboratory Inc | Method for evaporating aluminum |
| GB1440921A (en) * | 1972-07-14 | 1976-06-30 | Secr Defence | Evaporation of metals |
| JPS52137789U (enExample) * | 1976-04-15 | 1977-10-19 | ||
| US4030964A (en) * | 1976-04-29 | 1977-06-21 | The United States Of America As Represented By The United States Energy Research And Development Administration | Temperature cycling vapor deposition HgI2 crystal growth |
| JPS6057894U (ja) * | 1983-09-20 | 1985-04-22 | 大久保 敬四郎 | 自動火災報知器 |
| DE3639683A1 (de) * | 1986-11-20 | 1988-05-26 | Leybold Ag | Verdampferanordnung mit einem rechteckigen verdampfertiegel und mehreren elektronenkanonen |
| KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
| KR100615302B1 (ko) * | 2005-01-21 | 2006-08-25 | 삼성에스디아이 주식회사 | 가열용기 지지대 및 이를 구비한 증착장치 |
| EP1947210A1 (fr) * | 2007-01-16 | 2008-07-23 | ARCELOR France | Procede de revetement d'un substrat, installation de mise en oeuvre du procede et dispositif d'alimentation en metal d'une telle installation |
| TWI737718B (zh) * | 2016-04-25 | 2021-09-01 | 美商創新先進材料股份有限公司 | 含有瀉流源的沉積系統及相關方法 |
| US20180274083A1 (en) * | 2017-03-22 | 2018-09-27 | University Of Delaware | Centrifugal evaporation sources |
| CN112725714B (zh) * | 2020-12-04 | 2022-02-18 | 中国工程物理研究院材料研究所 | 一种铀铌合金表层夹杂物的细化方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE848287C (de) * | 1949-08-27 | 1952-09-01 | Siemens Ag | Verfahren zur Bedampfung, insbesondere zur Vakuum-Bedampfung von Isolierstoff-Folien |
| DE862991C (de) * | 1944-02-22 | 1953-01-15 | Bosch Gmbh Robert | Verfahren zur Herstellung von Legierungen durch Kondensation aus der Gasphase |
| DE868091C (de) * | 1950-03-07 | 1953-02-23 | Bosch Gmbh Robert | Vorrichtung zur Herstellung von Metallueberzuegen auf laufenden Baendern durch Bedampfen im Vakuum |
| DE970970C (de) * | 1943-02-09 | 1958-11-20 | Heraeus Gmbh W C | Einrichtung zum Herstellen von Oberflaechenschichten durch Verdampfen oder Sublimieren des UEberzugsstoffes im Hochvakuum |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE882171C (de) * | 1942-01-31 | 1953-07-06 | Bosch Gmbh Robert | Verfahren zur thermischen Verdampfung von Stoffen |
| US2665223A (en) * | 1949-12-31 | 1954-01-05 | Nat Res Corp | Process for depositing an aluminum film on a substrate by thermal vaporization |
| CH311812A (de) * | 1951-11-05 | 1955-12-15 | Zeiss Carl Fa | Aufdampfeinrichtung. |
| US2932588A (en) * | 1955-07-06 | 1960-04-12 | English Electric Valve Co Ltd | Methods of manufacturing thin films of refractory dielectric materials |
| US2998376A (en) * | 1956-10-29 | 1961-08-29 | Temescal Metallurgical Corp | High-vacuum evaporator |
| US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
| US3029777A (en) * | 1959-01-30 | 1962-04-17 | Nat Res Corp | Vapor deposition coating apparatus |
| US3020177A (en) * | 1959-05-13 | 1962-02-06 | Continental Can Co | Art of vaporizing materials |
| US3019129A (en) * | 1959-08-10 | 1962-01-30 | Nat Res Corp | Apparatus and process for coating |
| US3023727A (en) * | 1959-09-10 | 1962-03-06 | Ibm | Substrate processing apparatus |
-
1963
- 1963-06-12 US US287386A patent/US3329524A/en not_active Expired - Lifetime
-
1964
- 1964-06-09 GB GB23938/64A patent/GB1031963A/en not_active Expired
- 1964-06-09 LU LU46281D patent/LU46281A1/xx unknown
- 1964-06-12 DK DK296864AA patent/DK128824B/da unknown
- 1964-06-12 AT AT507464A patent/AT252683B/de active
- 1964-06-12 NL NL6406691A patent/NL6406691A/xx unknown
- 1964-06-12 DE DE19641521525 patent/DE1521525B1/de not_active Withdrawn
- 1964-06-12 BE BE649234A patent/BE649234A/xx unknown
- 1964-06-12 JP JP39033689A patent/JPS519687B1/ja active Pending
- 1964-06-12 CH CH771264A patent/CH452312A/de unknown
- 1964-06-12 FR FR978084A patent/FR1406666A/fr not_active Expired
- 1964-06-12 SE SE7218/64A patent/SE315461B/xx unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE970970C (de) * | 1943-02-09 | 1958-11-20 | Heraeus Gmbh W C | Einrichtung zum Herstellen von Oberflaechenschichten durch Verdampfen oder Sublimieren des UEberzugsstoffes im Hochvakuum |
| DE862991C (de) * | 1944-02-22 | 1953-01-15 | Bosch Gmbh Robert | Verfahren zur Herstellung von Legierungen durch Kondensation aus der Gasphase |
| DE848287C (de) * | 1949-08-27 | 1952-09-01 | Siemens Ag | Verfahren zur Bedampfung, insbesondere zur Vakuum-Bedampfung von Isolierstoff-Folien |
| DE868091C (de) * | 1950-03-07 | 1953-02-23 | Bosch Gmbh Robert | Vorrichtung zur Herstellung von Metallueberzuegen auf laufenden Baendern durch Bedampfen im Vakuum |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2296457A1 (fr) * | 1975-01-06 | 1976-07-30 | Jersey Nuclear Avco Isotopes | Source de vapeur d'un metal a temperature elevee de vaporisation |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1031963A (en) | 1966-06-02 |
| NL6406691A (enExample) | 1964-12-14 |
| JPS519687B1 (enExample) | 1976-03-29 |
| FR1406666A (fr) | 1965-07-23 |
| SE315461B (enExample) | 1969-09-29 |
| BE649234A (enExample) | 1964-10-01 |
| AT252683B (de) | 1967-03-10 |
| CH452312A (de) | 1968-05-31 |
| US3329524A (en) | 1967-07-04 |
| LU46281A1 (enExample) | 1964-12-09 |
| DK128824B (da) | 1974-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E77 | Valid patent as to the heymanns-index 1977 | ||
| 8339 | Ceased/non-payment of the annual fee |