DE1515056A1 - Verfahren zum Entfernen duenner Metallschichten - Google Patents
Verfahren zum Entfernen duenner MetallschichtenInfo
- Publication number
- DE1515056A1 DE1515056A1 DE19631515056 DE1515056A DE1515056A1 DE 1515056 A1 DE1515056 A1 DE 1515056A1 DE 19631515056 DE19631515056 DE 19631515056 DE 1515056 A DE1515056 A DE 1515056A DE 1515056 A1 DE1515056 A1 DE 1515056A1
- Authority
- DE
- Germany
- Prior art keywords
- metal layer
- electrode
- thin metal
- erosion
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims description 23
- 238000000034 method Methods 0.000 title claims description 8
- 239000003990 capacitor Substances 0.000 claims description 11
- 230000003628 erosive effect Effects 0.000 claims description 9
- 238000009760 electrical discharge machining Methods 0.000 claims description 5
- 238000000576 coating method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/06—Marking or engraving
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49004—Electrical device making including measuring or testing of device or component part
Landscapes
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Die Bonding (AREA)
- ing And Chemical Polishing (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL277476 | 1962-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1515056A1 true DE1515056A1 (de) | 1969-11-20 |
Family
ID=19753775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19631515056 Pending DE1515056A1 (de) | 1962-04-19 | 1963-04-17 | Verfahren zum Entfernen duenner Metallschichten |
Country Status (8)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3221828A1 (de) * | 1981-09-25 | 1983-04-14 | Fiziko-techničeskij institut Akademii Nauk Belorusskoj SSR, Minsk | Verfahren zur elektroerosiven bearbeitung von loechern und elektrode zu dessen durchfuehrung |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3718970A (en) * | 1968-11-13 | 1973-03-06 | Vibrionics Res Co | Electromechanical transducer process |
| US4350866A (en) * | 1977-10-11 | 1982-09-21 | Fujitsu Limited | Discharge device and method for use in processing semiconductor devices |
| US4458129A (en) * | 1979-11-29 | 1984-07-03 | Fujitsu, Limited | Discharge device and method for use in processing semiconductor devices |
| FR2559960B1 (fr) * | 1984-02-20 | 1987-03-06 | Solems Sa | Procede de formation de circuits electriques en couche mince et produits obtenus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2248057A (en) * | 1939-01-25 | 1941-07-08 | Bell Telephone Labor Inc | Electrical cutting device |
| US2377159A (en) * | 1943-06-26 | 1945-05-29 | Callite Tungsten Corp | Method of diamond drilling |
| GB710235A (en) * | 1952-08-08 | 1954-06-09 | Eisler Paul | Printed electric circuits and electric circuit components |
| US2884313A (en) * | 1955-09-07 | 1959-04-28 | Libbey Owens Ford Glass Co | Method of removing an electrically conducting film |
| NL246463A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1958-12-20 |
-
0
- BE BE631176D patent/BE631176A/xx unknown
- NL NL277476D patent/NL277476A/xx unknown
- NL NL113391D patent/NL113391C/xx active
-
1963
- 1963-04-15 US US273078A patent/US3324276A/en not_active Expired - Lifetime
- 1963-04-16 CH CH474663A patent/CH423032A/de unknown
- 1963-04-16 GB GB14850/63A patent/GB1018979A/en not_active Expired
- 1963-04-16 AT AT307263A patent/AT266277B/de active
- 1963-04-17 ES ES287124A patent/ES287124A1/es not_active Expired
- 1963-04-17 DE DE19631515056 patent/DE1515056A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3221828A1 (de) * | 1981-09-25 | 1983-04-14 | Fiziko-techničeskij institut Akademii Nauk Belorusskoj SSR, Minsk | Verfahren zur elektroerosiven bearbeitung von loechern und elektrode zu dessen durchfuehrung |
Also Published As
| Publication number | Publication date |
|---|---|
| NL277476A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
| CH423032A (de) | 1966-10-31 |
| GB1018979A (en) | 1966-02-02 |
| US3324276A (en) | 1967-06-06 |
| BE631176A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
| ES287124A1 (es) | 1963-12-01 |
| NL113391C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
| AT266277B (de) | 1968-11-11 |
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