DE1514322C3 - Schaltungsanordnung zum Zünden und Betrieb eines Hochfrequenz-Induktions-Plasmabrenners - Google Patents

Schaltungsanordnung zum Zünden und Betrieb eines Hochfrequenz-Induktions-Plasmabrenners

Info

Publication number
DE1514322C3
DE1514322C3 DE1514322A DE1514322A DE1514322C3 DE 1514322 C3 DE1514322 C3 DE 1514322C3 DE 1514322 A DE1514322 A DE 1514322A DE 1514322 A DE1514322 A DE 1514322A DE 1514322 C3 DE1514322 C3 DE 1514322C3
Authority
DE
Germany
Prior art keywords
igniting
operating
plasma torch
circuit arrangement
frequency induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1514322A
Other languages
German (de)
English (en)
Other versions
DE1514322A1 (de
DE1514322B2 (de
Inventor
Werner 2091 Garstedt Gaertner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Publication of DE1514322A1 publication Critical patent/DE1514322A1/de
Publication of DE1514322B2 publication Critical patent/DE1514322B2/de
Application granted granted Critical
Publication of DE1514322C3 publication Critical patent/DE1514322C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/04—Sources of current
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
    • H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • General Induction Heating (AREA)
  • Furnace Details (AREA)
  • Arc Welding Control (AREA)
  • Plasma Technology (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE1514322A 1965-11-12 1965-11-12 Schaltungsanordnung zum Zünden und Betrieb eines Hochfrequenz-Induktions-Plasmabrenners Expired DE1514322C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEP0038111 1965-11-12

Publications (3)

Publication Number Publication Date
DE1514322A1 DE1514322A1 (de) 1969-09-04
DE1514322B2 DE1514322B2 (de) 1973-11-15
DE1514322C3 true DE1514322C3 (de) 1974-06-06

Family

ID=7375687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1514322A Expired DE1514322C3 (de) 1965-11-12 1965-11-12 Schaltungsanordnung zum Zünden und Betrieb eines Hochfrequenz-Induktions-Plasmabrenners

Country Status (8)

Country Link
US (1) US3440387A (Direct)
AT (1) AT273330B (Direct)
BE (1) BE689622A (Direct)
CH (1) CH454300A (Direct)
DE (1) DE1514322C3 (Direct)
GB (1) GB1139049A (Direct)
NL (1) NL6615715A (Direct)
SE (1) SE300663B (Direct)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2460589A1 (fr) * 1979-07-04 1981-01-23 Instruments Sa Generateur de plasma
US5288971A (en) * 1991-08-09 1994-02-22 Advanced Energy Industries, Inc. System for igniting a plasma for thin film processing
JP2002533868A (ja) 1997-10-14 2002-10-08 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 早い電圧増加によるプラズマ点火を目的としたシステム
FR2778525B1 (fr) * 1998-05-05 2000-07-13 Chapel Et Cie Procede et dispositif de traitement a haute frequence de produits et inductance et generateur a haute frequence utilises pour leur mise en oeuvre

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB667657A (en) * 1950-04-26 1952-03-05 Westinghouse Electric Int Co Improvements in or relating to high frequency heating systems
US2727212A (en) * 1950-10-27 1955-12-13 Westinghouse Electric Corp Constant load voltage circuit
BE508359A (Direct) * 1951-01-12
FR1358425A (fr) * 1963-01-22 1964-04-17 Traitements Electrolytiques & Perfectionnement au chalumeau à plasma haute fréquence
NL6412703A (Direct) * 1964-10-31 1966-05-02
US3353060A (en) * 1964-11-28 1967-11-14 Hitachi Ltd High-frequency discharge plasma generator with an auxiliary electrode

Also Published As

Publication number Publication date
NL6615715A (Direct) 1967-05-16
US3440387A (en) 1969-04-22
BE689622A (Direct) 1967-04-14
CH454300A (de) 1968-04-15
AT273330B (de) 1969-08-11
SE300663B (Direct) 1968-05-06
DE1514322A1 (de) 1969-09-04
GB1139049A (en) 1969-01-08
DE1514322B2 (de) 1973-11-15

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee