DE1275219B - Elektromechanisches Filter und Verfahren zu seiner Herstellung - Google Patents

Elektromechanisches Filter und Verfahren zu seiner Herstellung

Info

Publication number
DE1275219B
DE1275219B DEW41805A DEW0041805A DE1275219B DE 1275219 B DE1275219 B DE 1275219B DE W41805 A DEW41805 A DE W41805A DE W0041805 A DEW0041805 A DE W0041805A DE 1275219 B DE1275219 B DE 1275219B
Authority
DE
Germany
Prior art keywords
oscillator
transistor
filter according
semiconductor
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEW41805A
Other languages
German (de)
English (en)
Inventor
Harvey Nathanson
Robert A Wickstrom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of DE1275219B publication Critical patent/DE1275219B/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B11/00—Generation of oscillations using a shock-excited tuned circuit
    • H03B11/04—Generation of oscillations using a shock-excited tuned circuit excited by interrupter
    • H03B11/10—Generation of oscillations using a shock-excited tuned circuit excited by interrupter interrupter being semiconductor device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/364—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device the amplifier comprising field effect transistors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03C—MODULATION
    • H03C1/00—Amplitude modulation
    • H03C1/36—Amplitude modulation by means of semiconductor device having at least three electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F13/00—Amplifiers using amplifying element consisting of two mechanically- or acoustically-coupled transducers, e.g. telephone-microphone amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
    • H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
    • H03F3/195—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only in integrated circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/485—Coupling means therefor for microelectro-mechanical filters
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M1/00—Substation equipment, e.g. for use by subscribers
    • H04M1/26—Devices for calling a subscriber
    • H04M1/30—Devices which can set up and transmit only one digit at a time
    • H04M1/50—Devices which can set up and transmit only one digit at a time by generating or selecting currents of predetermined frequencies or combinations of frequencies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H03H2009/02314—Beams forming part of a transistor structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Power Engineering (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DEW41805A 1965-06-18 1966-06-16 Elektromechanisches Filter und Verfahren zu seiner Herstellung Pending DE1275219B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US465090A US3413573A (en) 1965-06-18 1965-06-18 Microelectronic frequency selective apparatus with vibratory member and means responsive thereto

Publications (1)

Publication Number Publication Date
DE1275219B true DE1275219B (de) 1968-08-14

Family

ID=23846452

Family Applications (1)

Application Number Title Priority Date Filing Date
DEW41805A Pending DE1275219B (de) 1965-06-18 1966-06-16 Elektromechanisches Filter und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (1) US3413573A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE (1) BE682735A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1275219B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR1483669A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1125897A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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US3513356A (en) * 1967-06-27 1970-05-19 Westinghouse Electric Corp Electromechanical tuning apparatus particularly for microelectronic components
US3422371A (en) * 1967-07-24 1969-01-14 Sanders Associates Inc Thin film piezoelectric oscillator
US3533022A (en) * 1967-08-11 1970-10-06 Gen Electric Magnetically driven electromechanical filter with cantilevered resonator and variable q
US3517349A (en) * 1967-08-11 1970-06-23 Gen Electric Miniature electromechanical filter with magnetic drive
US3614678A (en) * 1967-08-11 1971-10-19 Gen Electric Electromechanical filters with integral piezoresistive output and methods of making same
US3634787A (en) * 1968-01-23 1972-01-11 Westinghouse Electric Corp Electromechanical tuning apparatus particularly for microelectronic components
US3585466A (en) * 1968-12-10 1971-06-15 Westinghouse Electric Corp Resonant gate transistor with improved gain having a vibratory member disposed in a spaced relationship between a field responsive member and a field plate
US3749984A (en) * 1969-04-11 1973-07-31 Rca Corp Electroacoustic semiconductor device employing an igfet
US3886584A (en) * 1970-11-23 1975-05-27 Harris Corp Radiation hardened mis devices
US3742254A (en) * 1971-01-27 1973-06-26 Texas Instruments Inc Automatic mos grounding circuit
JPS4854957A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-11-08 1973-08-02
DE3013770A1 (de) * 1980-04-10 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Sensor
JPS5938621A (ja) * 1982-08-27 1984-03-02 Nissan Motor Co Ltd 振動分析装置
US4674180A (en) * 1984-05-01 1987-06-23 The Foxboro Company Method of making a micromechanical electric shunt
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
EP0363550B1 (en) * 1988-10-14 1994-08-03 International Business Machines Corporation Distance-controlled tunneling transducer and direct access storage unit employing the transducer
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5511427A (en) * 1993-07-21 1996-04-30 Honeywell Inc. Cantilevered microbeam temperature sensor
US5417115A (en) * 1993-07-23 1995-05-23 Honeywell Inc. Dielectrically isolated resonant microsensors
US5729075A (en) * 1995-06-12 1998-03-17 National Semiconductor Corporation Tuneable microelectromechanical system resonator
GB9623077D0 (en) * 1996-11-06 1997-01-08 Ml Lab Plc System and method for monitoring physical activity
US5874675A (en) * 1997-03-20 1999-02-23 Interscience, Inc. Wideband vibration sensor
DE10029501C1 (de) * 2000-06-21 2001-10-04 Fraunhofer Ges Forschung Vertikal-Transistor mit beweglichen Gate und Verfahren zu dessen Herstelllung
US8749054B2 (en) 2010-06-24 2014-06-10 L. Pierre de Rochemont Semiconductor carrier with vertical power FET module
EP1797617A4 (en) 2004-10-01 2009-08-12 Rochemont L Pierre De CERAMIC ANTENNA MODULE AND METHODS OF MAKING SAME
DE102004055937B4 (de) * 2004-11-19 2006-08-24 Siemens Ag Schaltmatrix
CN102255143B (zh) 2005-06-30 2014-08-20 L.皮尔·德罗什蒙 电子元件及制造方法
US8354294B2 (en) 2006-01-24 2013-01-15 De Rochemont L Pierre Liquid chemical deposition apparatus and process and products therefrom
US7959598B2 (en) 2008-08-20 2011-06-14 Asante Solutions, Inc. Infusion pump systems and methods
US8952858B2 (en) 2009-06-17 2015-02-10 L. Pierre de Rochemont Frequency-selective dipole antennas
US8922347B1 (en) 2009-06-17 2014-12-30 L. Pierre de Rochemont R.F. energy collection circuit for wireless devices
EP2312749B1 (en) * 2009-10-15 2011-11-30 Alcatel Lucent RF power amplifier with spectrally grouped nanosized switches
EP2330738A1 (fr) 2009-12-03 2011-06-08 ETA SA Manufacture Horlogère Suisse Résonateur MEMS à transistor et oscillateur comportant un tel résonateur
US8552708B2 (en) 2010-06-02 2013-10-08 L. Pierre de Rochemont Monolithic DC/DC power management module with surface FET
US9023493B2 (en) 2010-07-13 2015-05-05 L. Pierre de Rochemont Chemically complex ablative max-phase material and method of manufacture
WO2012027412A1 (en) * 2010-08-23 2012-03-01 De Rochemont L Pierre Power fet with a resonant transistor gate
EP2437393B1 (en) * 2010-10-01 2012-09-12 Alcatel Lucent Power control for an RF power amplifier with spectrally grouped nanosized switches
CN103415925A (zh) 2010-11-03 2013-11-27 L·皮尔·德罗什蒙 具有单片集成的量子点器件的半导体芯片载体及其制造方法
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US9561324B2 (en) 2013-07-19 2017-02-07 Bigfoot Biomedical, Inc. Infusion pump system and method
HK1257246A1 (zh) 2016-01-13 2019-10-18 Bigfoot Biomedical, Inc. 糖尿病管理系统的用户界面
WO2017124006A1 (en) 2016-01-14 2017-07-20 Bigfoot Biomedical, Inc. Adjusting insulin delivery rates
US10610643B2 (en) 2016-01-14 2020-04-07 Bigfoot Biomedical, Inc. Occlusion resolution in medication delivery devices, systems, and methods
US12383166B2 (en) 2016-05-23 2025-08-12 Insulet Corporation Insulin delivery system and methods with risk-based set points
WO2017205816A1 (en) 2016-05-26 2017-11-30 Insulet Corporation Single dose drug delivery device
CA3037432A1 (en) 2016-12-12 2018-06-21 Bigfoot Biomedical, Inc. Alarms and alerts for medication delivery devices and related systems and methods
US10758675B2 (en) 2017-01-13 2020-09-01 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
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US11033682B2 (en) 2017-01-13 2021-06-15 Bigfoot Biomedical, Inc. Insulin delivery methods, systems and devices
US10500334B2 (en) 2017-01-13 2019-12-10 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
USD874471S1 (en) 2017-06-08 2020-02-04 Insulet Corporation Display screen with a graphical user interface
USD928199S1 (en) 2018-04-02 2021-08-17 Bigfoot Biomedical, Inc. Medication delivery device with icons
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USD977502S1 (en) 2020-06-09 2023-02-07 Insulet Corporation Display screen with graphical user interface
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DE518331C (de) * 1929-10-16 1931-02-14 Hartmann & Braun Akt Ges Elektrostatischer Frequenzmesser mit einer Reihe schwingender Zungen
GB788159A (en) * 1953-05-29 1957-12-23 Philco Corp Improvements in and relating to frequency sensitive electro-mechanical apparatus

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US2898477A (en) * 1955-10-31 1959-08-04 Bell Telephone Labor Inc Piezoelectric field effect semiconductor device
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Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
DE518331C (de) * 1929-10-16 1931-02-14 Hartmann & Braun Akt Ges Elektrostatischer Frequenzmesser mit einer Reihe schwingender Zungen
GB788159A (en) * 1953-05-29 1957-12-23 Philco Corp Improvements in and relating to frequency sensitive electro-mechanical apparatus

Also Published As

Publication number Publication date
US3413573A (en) 1968-11-26
GB1125897A (en) 1968-09-05
BE682735A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1966-12-01
FR1483669A (fr) 1967-06-02

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